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Diaphragm high and low pressure line valve for HP & UHP gases - M4SI
Equipment for gas systems > Ultra high purity gas equipment > Springless diaphragm line valves
Key advantages
  • 100% Helium Leak Test performed
  • Assembling, testing & Packaging in cleanroom: Class ISO 4
  • Reverse seat design for high life cycle
  • Individual serial number for full traceability
  • Electropolished surface roughness per SEMI F19 UHP Grade
  • Fluid specific seat material as standard options
  • Low internal volume
  • Constant bleed option available
  • 316L VAR® stainless steel double melt per SEMI F20 option available
  • Additional Multi-port options
  • 270° multiturn handwheel with open/close indicator

Also available with LOTO device

CONSTRUCTION MATERIAL

  Parts Material
Wetted parts Body SS 316L,VAR
Seat PCTFE, PVDF, VESPEL®
Diaphragm Phynox®
Non-wetted parts Backup diaphragm Phynox® 
Handwheel Aluminium
Actuator Body SS 316L or Aluminium
Others Stainless Steel and Alloys

SURFACE FINISH

S V
Ra 0.4 μm (15 μin) Ra 0.25 μm EP (10 μin)

TEMPERATURE RANGE

Seat (Actuation type) Temperature Range
PCTFE / PVDF (manual & pneumatic*) -40°C to +65°C (-40°F to +149°F)
Vespel® (manual & pneumatic*) -40°C to +150°C (-40°F to +302°F)

VALVE VERSION / MAX. WORKING PRESSURE

Valve Max. working pressure
M4SI (LM) Multiturn handwheel(1)(2) 20 bar
M4SI (HM) Multiturn handwheel(1)(2) 240 bar
M4SI (LQ) Quarter turn handwheel(1) 20 bar
M4SI (HQ) Quarter turn handwheel(1) 240 bar
M4SI(BP) Pneumatically actuated 10 bar
M4SI(LP) Pneumatically actuated 20 bar 
M4SI(HP) Pneumatically actuated 240 bar

(1) FT (Panel Mounting) option available

(2) MSF LOTO option available

MANUAL ACTUATION

Parts for all valve grades
Upper spindle Brass
Handle Aluminium
All others Stainless Stee

PNEUMATIC ACTUATION

Parts
Actuator Body Aluminium / Stainless Steel
Piston Brass / Aluminium / Stainless Steel
O-ring NBR
All others Stainless Steel

All specifications subject to change without notice.

Specifications
Max. working pressureSee table above
Pneumatic actuator opening pressure5 to 7 bar
Temperature rangeSee table above
Flow capacity (cv)0,2
Nominal seat diameter4 Mm
Wetted volume< 1.2 cm3
Burst pressure> 700 bar
Certified max. helium outboard leak rate≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)≤ 1 x 10-9 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)≤ 1 x 10-9 mbar.l/s
Dimensional drawings
Product Configurator
 
Surface finish
Actuation
Porting configuration
Body material
Seat material
End connection
Options
M4SI
S
LM
2V1
-
K
V 1/4 F
FT
 
(1) Add NO for normally open or NC for normally closed
(2) See dimensional drawings nr. 3
(3) On demand
(4) On HP and LP actuators only
Downloadable catalogs, brochures
  • LOTO Locking Mechanism for UHP Line Valves
    Last update: May 17, 2021
    Available in: en
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