Print
Diaphragm pressure regulator for HP & UHP gases - RX2200
Key advantages
  • 100% Functional & Helium Leak Test performed
  • Hastelloy® diaphragm
  • Internally spring- and threadless for highest UHP requirements
  • Assembling, testing & Packaging in cleanroom: Class ISO 4
  • Individual serial number for full traceability
  • Corrosion resistant internal option available: Hastelloy® poppet
  • Electropolished surface roughness per SEMI F19 UHP Grade
  • Coating option of wetted areas is available
  • 316L VAR® stainless steel double melt per SEMI F20 option available
  • Fluid specific seat material as standard options
  • Additional multi-port options

CONSTRUCTION MATERIAL

  Parts Material
Wetted parts Body SS 316L, VAR
Seat PCTFE 
Diaphragm Hastelloy®
Poppet SS 316L, Hastelloy®
Joint Nickel, SS 316L
Non-wetted parts Bonnet Brass 
Handwheel Aluminium
Others Stainless Steel and Alloys

SURFACE FINISH

S V U
Ra 0.4 μm (15 μin) Ra 0.25 μm EP (10 μin) Ra 0.13 μm EP (5 μin)  

RATED FLOW CAPACITY (QR(1)) / OUTLET PRESSURE (P2)

P2 (bar) QR(1) (SLPM)
3 280
8 580
10 680
15 970
25 1,550
50 3,000

(1) According to CGA-4

All specifications subject to change without notice.

FLOW CURVES

 

Specifications
Max. inlet pressure240 bar
Outlet pressure3/8/10/15/25/50 bar
Temperature range-20°C to +65°C
Flow capacity (cv)0.2
Burst pressure*300% of operating pressure
Proof pressure*150% of operating pressure
Supply pressure effect i*1.35 bar / 100 bar
Certified max. helium outboard leak rate≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)≤ 1 x 10-7 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)≤ 1 x 10-9 mbar.l/s
Dimensional drawings
Product Configurator
 
Outlet regulated pressure
Body material
Surface finish
Porting configuration
Inlet / outlet connections
Options
RX22
03
-
S
2V1
4M
HP
 
(1) On demand
(2) Gauge port(s) only
(3) Gauge(s) requires 4FI connection(s)
Downloadable catalogs, brochures
  • Ultra High Purity valves and pressure regulators
    Last update: May 17, 2021
    Available in: en/fr/cn
Connect with an Expert
×

This site uses cookies.

Rotarex uses cookies to ensure a better and easier online experience. Please click here to accept the continued use of these cookies after reading our revised COOKIES POLICY.

Please note, you may continue to use the website even if you do not accept the use of cookies. However, the visitor experience on subsequent visits will be diminished.

Read the full COOKIES POLICY.