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Diaphragm pressure regulator for HP & UHP gases - RX2200

Equipment for gas systems > Ultra high purity gas equipment > UHP pressure regulators

Diaphragm pressure regulator for HP & UHP gases - RX2200

RX2200 is a diaphragm pressure regulator for HP & UHP applications. Its springless and threadless design keeps the highest level of purity of the gas.

Key advantages

100% Functional & Helium Leak Test performed
Hastelloy® diaphragm
Internally spring- and threadless for highest UHP requirements
Assembling, testing & Packaging in cleanroom: Class ISO 4
Individual serial number for full traceability
Corrosion resistant internal option available: Hastelloy® poppet
Electropolished surface roughness per SEMI F19 UHP Grade
Coating option of wetted areas is available
316L VAR® stainless steel double melt per SEMI F20 option available
Fluid specific seat material as standard options
Additional multi-port options

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CONSTRUCTION MATERIAL

	Parts	Material
Wetted parts	Body	SS 316L, VAR
	Seat	PCTFE
	Diaphragm	Hastelloy®
	Poppet	SS 316L, Hastelloy®
	Joint	Nickel, SS 316L
Non-wetted parts	Bonnet	Brass
	Handwheel	Aluminium
	Others	Stainless Steel and Alloys

SURFACE FINISH

S	V	U
Ra 0.4 μm (15 μin)	Ra 0.25 μm EP (10 μin)	Ra 0.13 μm EP (5 μin)

RATED FLOW CAPACITY (QR(1)) / OUTLET PRESSURE (P2)

P2 (bar)	QR(1) (SLPM)
3	280
8	580
10	680
15	970
25	1,550
50	3,000

(1) According to CGA-4

All specifications subject to change without notice.

FLOW CURVES

Product image

Specifications

Max. inlet pressure	240 bar
Outlet Pressure	3/8/10/15/25/50 bar
Temperature range	-20°C to +65°C
Flow capacity (cv)	0.2
Burst pressure*	300% of operating pressure
Proof pressure*	150% of operating pressure
Supply pressure effect i*	1.35 bar / 100 bar
Certified max. helium outboard leak rate	≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)	≤ 1 x 10-7 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)	≤ 1 x 10-9 mbar.l/s

Dimensional drawings

Product Configurator

	Outlet regulated pressure	Body material	Surface finish	Porting configuration	Inlet / outlet connections	Options
RX22	03	-	S	2V1	4M	HP
	3 bar (44 psig) 8 bar (116 psig) 10 bar (145 psig) 15 bar (218 psig) 25 bar (363 psig) 50 bar (725 psig)	SS 316L VAR	Ra 0.4 μm (15 μin) Ra 0.25 μm EP (10 μin) Ra 0.13 μm EP (5 μin)(1)	2 ports 3 ports 4 ports	Metal face seal 1/4” - Male Metal face seal 1/4” - Female Metal face seal 3/8” - Female Metal face seal 3/8” - Male Metal face seal 1/4” - Internal(2)	Hastelloy Poppet Gauge(s)(3)

I am interested

(1) On demand
(2) Gauge port(s) only
(3) Gauge(s) requires 4FI connection(s)

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Ultra High Purity valves and pressure regulators

Last update: May 17, 2021
Available in: en/fr/cn