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Diaphragm pressure regulator for HP & UHP gases - RX2500
Key advantages
  • 100% Functional & Helium Leak Test performed
  • Hastelloy® diaphragm
  • Internally springless
  • Assembling, testing & Packaging in cleanroom: Class ISO 4
  • Individual serial number for full traceability
  • Corrosion resistant internal option available: Hastelloy® poppet
  • Electropolished surface roughness per SEMI F19 UHP Grade
  • 316L VAR® stainless steel double melt per SEMI F20 option available
  • High-Flow (HF) version (Cv:1.2) up to 1150 SLPM available
  • Fluid specific seat material as standard options
  • Additional multi-port options

CONSTRUCTION MATERIAL

  Parts Material
Wetted parts Body SS 316L, VAR
Seat PCTFE (PVDF, VESPEL®, PCTFE Ni optional)
Diaphragm Hastelloy®
Poppet SS 316L, Hastelloy®
Non-wetted parts Bonnet Chrome Plated Brass 
Handwheel Aluminium
Others Stainless Steel and Alloys

SURFACE FINISH

S V U
Ra 0.4 μm (15 μin) Ra 0.25 μm EP (10 μin) Ra 0.13 μm EP (5 μin)  

RATED FLOW CAPACITY (QR(1)) / OUTLET PRESSURE (P2)

P2 (bar) QR(1) (SLPM) QR(1) (SLPM) HF
5 650 950
8 1,100 -
10 - 1,900

(1) According to CGA-E4

All specifications subject to change without notice.

FLOW CURVES

Specifications
Max. inlet pressureStandard: 240 bar, HF: 50 bar, (PVDF: 10 bar)
Outlet pressure5/8/10 bar*
Temperature range20°C to +60°C (-4°F to +140°F)
Flow capacity (cv)Standard: 0.45 High Flow: 1.2
Burst pressure** 300% of operating pressure
Proof pressure** 150% of operating pressure
Supply pressure effect i*Standard: 1.5 bar / 100 bar HF: 6 bar / 100 bar
Certified max. helium outboard leak rate (at max. pressure)≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)≤ 1 x 10-7 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)≤ 1 x 10-9 mbar.l/s
Dimensional drawings
Product Configurator
 
Outlet regulated pressure
Body material
Surface finish
Porting configuration
Inlet / outlet connections
Options
Version
RX25
05
-
S
2V1
8M
V
Standard (Cv 0.45)
 
 
(1) On demand
(2) Gauge port(s) only
(3) Gauge(s) requires 4FI connection(s)
(4) Contact Rotarex
Downloadable catalogs, brochures
  • Ultra High Purity valves and pressure regulators
    Last update: May 17, 2021
    Available in: en/fr/cn
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