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Diaphragm pressure regulator for HP & UHP gases - RX2500

Equipment for gas systems > Ultra high purity gas equipment > UHP pressure regulators

RX2500 is a diaphragm pressure regulator for HP & UHP applications. Its springless design keeps the highest level of purity of the gas. The regulator exists in two versions : standard version & high flow version.

Key advantages

100% Functional & Helium Leak Test performed
Hastelloy® diaphragm
Internally springless
Assembling, testing & Packaging in cleanroom: Class ISO 4
Individual serial number for full traceability
Corrosion resistant internal option available: Hastelloy® poppet
Electropolished surface roughness per SEMI F19 UHP Grade
316L VAR® stainless steel double melt per SEMI F20 option available
High-Flow (HF) version (Cv:1.2) up to 1150 SLPM available
Fluid specific seat material as standard options
Additional multi-port options

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CONSTRUCTION MATERIAL

	Parts	Material
Wetted parts	Body	SS 316L, VAR
	Seat	PCTFE (PVDF, VESPEL®, PCTFE Ni optional)
	Diaphragm	Hastelloy®
	Poppet	SS 316L, Hastelloy®
Non-wetted parts	Bonnet	Chrome Plated Brass
	Handwheel	Aluminium
	Others	Stainless Steel and Alloys

SURFACE FINISH

S	V	U
Ra 0.4 μm (15 μin)	Ra 0.25 μm EP (10 μin)	Ra 0.13 μm EP (5 μin)

RATED FLOW CAPACITY (QR(1)) / OUTLET PRESSURE (P2)

P2 (bar)	QR(1) (SLPM)	QR(1) (SLPM) HF
5	650	950
8	1,100	-
10	-	1,900

(1) According to CGA-E4

All specifications subject to change without notice.

FLOW CURVES

Product image

Specifications

Max. inlet pressure	Standard: 240 bar, HF: 50 bar, (PVDF: 10 bar)
Outlet Pressure	5/8/10 bar*
Temperature range	20°C to +60°C (-4°F to +140°F)
Flow capacity (cv)	Standard: 0.45 High Flow: 1.2
Burst pressure**	300% of operating pressure
Proof pressure**	150% of operating pressure
Supply pressure effect i*	Standard: 1.5 bar / 100 bar HF: 6 bar / 100 bar
Certified max. helium outboard leak rate (at max. pressure)	≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)	≤ 1 x 10-7 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)	≤ 1 x 10-9 mbar.l/s

Dimensional drawings

Product Configurator

	Outlet regulated pressure	Body material	Surface finish	Porting configuration	Inlet / outlet connections	Options	Version
RX25	05	-	S	2V1	8M	V	Standard (Cv 0.45)
	5 bar (73 psig) 8 bar (116 psig) 10 bar (145 psig)	SS 316L VAR	Ra 0.4 μm (15 μin) Ra 0.25 μm EP (10 μin) Ra 0.13 μm EP (5 μin)(1)	2 ports 3 ports 4 ports	Metal face seal 1/2” - Male Metal face seal 1/2” - Female Metal face seal 1/4” - Male Metal face seal 1/4” - Female Metal face seal 1/4”- Internal(2)	Vespel Seat PDVF Seat Hastelloy Poppet Gauge(s)(3) PTFE Nickel loaded(4)

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(1) On demand
(2) Gauge port(s) only
(3) Gauge(s) requires 4FI connection(s)
(4) Contact Rotarex

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Ultra High Purity valves and pressure regulators

Last update: May 17, 2021
Available in: en/fr/cn