Diaphragm pressure regulator for HP & UHP gases - RX1000
Key advantages
  • 100% Functional & Helium Leak Test performed
  • High-Flow (HF) version (Cv:0.2) available
  • Hastelloy® diaphragm
  • Assembling, testing & packaging in cleanroom: Class ISO 4
  • Individual serial number for full traceability
  • Electropolished surface roughness per SEMI F19 UHP Grade
  • Low internal volume
  • 316L VAR® stainless steel double melt per SEMI F20 option available
  • Excellent performance at low source pressure
  • Fluid specific seat material as standard options
  • Additional multi-port options
Description

CONSTRUCTION MATERIAL

  Parts Material
Wetted parts Body SS 316L, VAR
Seat PCTFE (PVDF, VESPEL® optional)
Diaphragm Hastelloy®
Poppet SS 316L
Spring SS 316L
Spring Holder SS 316L
Non-wetted parts Bonnet Brass 
Handwheel Aluminium
Others Stainless Steel and Alloys

SURFACE FINISH

S V U
Ra 0.4 μm (15 μin) Ra 0.25 μm EP (10 μin) Ra 0.13 μm EP (5 μin)  

RATED FLOW CAPACITY (QR(1)) / OUTLET PRESSURE (P2)

P2 (bar) QR(1) (SLPM) QR(1) (SLPM) HF
2 40 80
4 90 200
7 160 350
10 220 500

(1) According to CGA-E4

All specifications subject to change without notice.

FLOW CURVES

     

Specifications
Outlet pressure2/4/7/10 bar
Temperature range-20 to +65 °c
Flow capacity (cv)Standard: 0.09 High Flow: 0.2
Burst pressure*300% of operating pressure
Proof pressure*150% of operating pressure
Supply pressure effect i*Standard: 0.7 bar / 100 bar HF: 1.35 bar / 100 bar
Certified max. helium outboard leak rate≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)≤ 1 x 10-7 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)≤ 1 x 10-9 mbar.l/s
Dimensional drawings
Product Configurator
 
Outlet regulated pressure
Body material
Surface finish
Porting configuration
Inlet / outlet connections
Options
Version
RX10
02
-
S
2V1
4F
V
Standard (Cv 0.09)
 
 
(1) On demand
(2) Gauge port(s) only
(3) Gauge(s) requires 4FI connection(s)
(4) Absolute sub-atmospheric option
Downloadable catalogs, brochures
  • Ultra High Purity valves and pressure regulators
    Last update: May 17, 2021
    Available in: en/fr/cn
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