menu
en

International

Local language pages

Print

Download datasheet

PREMIUM GAS SYSTEMS FOR ULTRA HIGH PURITY GASES

Safety & Quality

  • State-of-the-art UHP gas solutions including pressure regulators, line valves, cylinder valves, cylinder connectors and fittings
  • 100% Helium leak test performed on all products
  • Specific packaging to respect the purity level
  • ISO 4 Cleanroom manufacturing conditions

All gas types

  • HP & UHP gas equipment and cylinder valves for semiconductor, photovoltaic (solar cells), LED light manufacturing processes and other applications
  • For electronics, corrosive, toxic and specialty gases
  • Purity levels from 6.0 to 9.0 and more
  • Precise control of low to high pressure gases and fluids

All technologies to fit your application

  • Tied diaphragm, diaphragm, packed seal, bellow seal or o-ring seal technologies
  • Sealing level up to 10-11 mbarl/s

All connections & standards

  • Gas systems : various end connections available to cover all needs and all applications
  • Cylinder valves : Inlet & outlet connections for all standards & gases: DIN, CG, JIS, BS, AFNOR, UNI, NEN, NBR
downloads
  • Download
    Complete UHP Solution
    Last update: Jul 02, 2024
    Available in: en/JA/CN
  • Download
    RX1000 Compact UHP Pressure Regulator
    Last update: Jul 01, 2024
    Available in: en/CN/JA
  • Download
    RX3200 UHP Pressure Regulator
    Last update: Jul 01, 2024
    Available in: en/CN
  • Download
    RX3000 UHP Pressure Regulator
    Last update: Jul 01, 2024
    Available in: en/CN/JA
  • Download
    RX4200 UHP Pressure Regulator
    Last update: Jul 02, 2024
    Available in: en/CN
  • Download
    RX4000 UHP Pressure Regulator
    Last update: Jul 01, 2024
    Available in: en/CN/JA

FULLY CUSTOMIZABLE UHP GAS SOLUTIONS TO FIT ANY SYSTEM CONFIGURATION

3D Model Preview 3D View Icon
Ready to install UHP gas systems for:
  • Gas Cabinets
  • VMBs
  • Process tools
  • Gas Delivery Sytems
  • And many others...
Benefit from Rotarex high performance and quality components such as:
  • UHP Pressure Regulators
  • UHP Line Valves
  • UHP Fittings
  • UHP Cylinder Connectors
  • and much more...

THREADLESS & SPRINGLESS UHP PRESSURE REGULATORS

RX3000 AND RX4000 UHP PRESSURE REGULATORS
  • Single-stage diaphragm pressure regulator for high and ultra high purity gases
  • Unique threadless design for a higher purity level
  • Springless design for tied diaphragm version
  • Sub-atmospheric option available
  • Optimized supply pressure effect and excellent flow stability
  • Life duration according to CGA E4
  • Electropolished surface roughness per SEMI F19 UHP Grade
  • UHP Material - Semi F20 option available
videos

UHP Solutions

Ultra high purity line valves & pressure regulators

Ultra high purity gas pressure regulators

  • Compact single-stage diaphragm pressure regulator for HP & UHP gases - RX1000
    RX1000
    HP & UHP regulator
    Cv 0.04, 0.09, 0.15
    Free diaphragm
  • Single-stage diaphragm pressure regulator for HP & UHP gases - RX3000
    RX3000
    HP & UHP regulator
    Cv 0.09, 0.15
    Free diaphragm
  • Sub-atmospheric pressure regulator for HP & UHP gases - RX3100
    RX3100
    HP & UHP regulator
    Cv 0.09
    Tied diaphragm
  • Single-stage tied-diaphragm pressure regulator for HP & UHP gases - RX3200
    RX3200
    HP & UHP regulator
    Cv 0.09, 0.15
    Tied diaphragm
  • Diaphragm loaded high pressure regulator for HP & UHP gases - RX3600
    RX3600
    HP & UHP regulator
    Cv 0.15
    Free diaphragm
  • Piston loaded high pressure regulator for HP & UHP gases - RX3700
    RX3700
    HP & UHP regulator
    Cv 0.09, 0.15
    Tied diaphragm
  • Dual stage pressure regulator for HP & UHP gases - RX3900
    RX3900
    HP & UHP regulator
    Cv 0.09
    Tied diaphragm
  • Single-stage diaphragm pressure regulator for HP & UHP gases - RX4000
    RX4000
    HP & UHP regulator
    Cv 0.15, 0.25, 0.5, 0.9, 1.1
    Free diaphragm
  • Sub-atmospheric pressure regulator for HP & UHP gases - RX4100
    RX4100
    HP & UHP regulator
    Cv 0.5
    Tied diaphragm
  • Single-stage tied-diaphragm pressure regulator for HP & UHP gases - RX4200
    RX4200
    HP & UHP regulator
    Cv 0.15, 0.25, 0.5, 0.9, 1.1
    Tied diaphragm

Springless diaphragm line valves

  • Diaphragm high and low pressure line valve for HP & UHP gases - RX04
    RX04
    HP & UHP line valve
    Flow capacity 0.2
    Springless diaphragm
  • Diaphragm high and low pressure line valve for HP & UHP gases - RX08
    RX08
    HP & UHP line valve
    Flow capacity 0.5
    Springless diaphragm
  • Diaphragm high and low pressure line valve for HP & UHP gases - RX04F
    RX04F
    HP & UHP line valve
    Flow capacity 0.2
    Forged body
  • Diaphragm high and low pressure line valve for HP & UHP gases - RX08F
    RX08F
    HP & UHP line valve
    Flow capacity 0.5
    Forged body
  • Diaphragm low pressure line valve for HP & UHP gases - RX12
    RX12
    HP & UHP line valve
    Flow capacity 1.75
    Springless diaphragm
  • Diaphragm low pressure line valve for HP & UHP gases - RX20
    RX20
    HP & UHP line valve
    Flow capacity 3.5
    Springless diaphragm

Tied diaphragm line valves

  • High Pressure manual line valve for UHP gases – D604
    D604
    Manual line valve
    Soft Seat
    4mm orifice
  • High Pressure line valve for UHP gases with oleo-pneumatic actuator – D654
    D654
    Oleo-pneumatic line valve
    Soft Seat
    4mm orifice
  • High Pressure line valve for UHP gases with pneumatic actuator – D688
    D688
    Pneumatic line valve
    Soft knife edge Seat
    4mm orifice
  • High Pressure manual line valve for UHP gases – D639S
    D639S
    Manual line valve
    Soft Seat
    6mm orifice
  • High Pressure line valve for UHP gases with oleo-pneumatic actuator – D689S
    D689S
    Oleo-pneumatic line valve
    Soft Seat
    6mm orifice

Bellows & check valves

  • Bellows low to high pressure valve for HP, UHP, corrosive gases and fluids – K300
    K300
    Bellows valve
    Low or high pressure
    -40°C to + 120°C (ambient)
  • Bellows high pressure valve for HP, UHP, corrosive gases and fluids – HP2000
    HP2000
    Bellows valve
    High pressure
    -40°C to + 120°C (ambient)
  • Bellows low to high pressure valve for HP, UHP, cryogenic gases and fluids – K900
    K900
    Bellows valve
    Low to high pressure
    -196°C to + 250°C (cryogenic)
  • Bellows high pressure valve for HP, UHP, cryogenic gases and fluids – HP9000
    HP9000
    Bellows valve
    High pressure
    -196 °C to + 250°C (cryogenic)
  • Bellows high pressure valve for HP, UHP, corrosive gases and fluids – HP3000
    HP3000
    Bellows valve
    High pressure
    -40°C to + 120°C (ambient)
  • Bellows low pressure valve for HP, UHP, cryogenic gases and fluids – SUPRA
    SUPRA
    Bellows valve
    Low pressure
    -270°C to + 80°C (cryogenic)
  • Spring type check valve for HP, UHP, cryogenic gases and fluids – CAR(S)
    CAR(S)
    Check valves
    Low to high pressure
    -196°C to +250°C (cryogenic)

Ultra high purity fittings & connectors

Metal gasket face seal fittings

High flow fittings

  • UHP Fitting Female Nut for High Flow Applications - FN-HF
    FN-HF
    Female Nut for High Flow Applications
  • UHP Fitting Male Nut for High Flow Applications - MN-HF
    MN-HF
    Male Nut for High Flow Applications
  • UHP Fitting Short Male Gland for High Flow Applications - EM-HF
    EM-HF
    Short Male Gland for High Flow Applications
  • UHP Fittings Automatic Buttweld Body for High Flow Applications - UM-ABW HF
    UM-ABW HF
    Automatic Buttweld Body for High Flow Applications
  • UHP Fitting Automatic Buttweld Body for High Flow Applications - UM-AB HF
    UM-AB HF
    Automatic Buttweld Body for High Flow Applications
  • UHP Fittings Buttweld Bulkhead Union for High Flow Applications - BU-HF
    BU-HF
    Buttweld Bulkhead Union for High Flow Applications

Weld fittings

  • UHP Fitting EB-ABW
    EB-ABW
  • UHP Fitting Automatic Buttweld Reducing Union Without Shoulder - RU-ABW
    RU-ABW
    Automatic Buttweld Reducing Union without Shoulder
  • UHP Fitting Automatic Buttweld Elbow Without Shoulder - E-ABW
    E-ABW
    Automatic Buttweld Elbow without Shoulder
  • UHP Fitting Automatic Buttweld Reducing Elbow Without Shoulder - RE-ABW
    RE-ABW
    Automatic Buttweld Reducing Elbow without Shoulder
  • UHP Fitting Automatic Buttweld Tee Without Shoulder - T-ABW
    T-ABW
    Automatic Buttweld Tee without Shoulder
  • UHP Fitting Automatic Buttweld Reducing Tee Without Shoulder - RT-ABW
    RT-ABW
    Automatic Buttweld Reducing Tee without Shoulder
  • UHP Fitting Automatic Buttweld Cross Without Shoulder - C-ABW
    C-ABW
    Automatic Buttweld Cross without Shoulder

Ultra high purity connectors

Ultra high purity gas cylinder valves

Tied diaphragm seal type

  • High pressure UHP cylinder valve – D304
    D304
    High pressure
    Soft seat
    4mm orifice
  • High pressure pneumatic UHP cylinder valve - D385S
    D385S
    High pressure Pneumatic valve
    Soft seat
    4mm orifice
  • Tied diaphragm cylinder valve for fluorine mixtures with pneumatic actuator - D386S
    D386S
    Tied diaphragm cylinder valve for fluorine mixtures with pneumatic actuator
  • High Pressure, oleo-pneumatic, UHP cylinder valve - D354
    D354
    Oleo-Pneumatic
    Soft seat
    4mm orifice
  • High pressure, dual port UHP cylinder valve - D340S
    D340S
    Dual Port UHP valve
    Soft seat
    4mm orifice
  • High pressure UHP cylinder valve for highly oxidizing gases – D306
    D306
    High pressure valve
    Metal / Metal sealing
    4mm orifice
  • Oleo-pneumatic UHP cylinder valve for highly oxidizing gases – D356
    D356
    Oleo-pneumatic valve
    Metal / Metal sealing
    3.5mm orifice
  • High pressure & high flow UHP cylinder valve – D339S
    D339S
    High pressure manual valve
    Soft seat
    6mm orifice
  • High pressure UHP cylinder valve with Oleo-pneumatic actuator - D389S
    D389S
    Oleo-Pneumatic
    Soft seat
    6mm orifice
  • Dual port high pressure UHP cylinder valve - D349
    D349
    Dual Port UHP valve
    Soft seat
    6mm orifice
  • Low pressure & high flow UHP cylinder valve - D337
    D337
    Tied-diaphragm seal
    Low Pressure
    8mm orifice
  • Low pressure & high flow UHP cylinder valve with pneumatic actuator - D387
    D387
    Pneumatic actuator
    Low Pressure
    8mm orifice
  • Low pressure & high flow dual port UHP cylinder valve - D342
    D342
    Dual Port UHP valve
    Soft seat
    8mm orifice

High purity gas cylinder valves

Valves with integrated pressure regulator (VIPR)

  • Integrated valve with adjustable pressure regulator - DUCAL D551
    D551 - Ducal
    Stainless Steel VIPR
    Adjustable pressure regulator
    For calibration applications
  • Integrated valve with flow selector - D552 Flowcal
    D552 - Flowcal
    Stainless Steel VIPR
    Integrated flow selector
    For calibration applications

Diaphragm seal type

  • High pressure cylinder valve for High purity gases – D200
    D200
    High pressure
    Soft seat
    4mm orifice
  • Diaphragm seal lecture bottle valve - D250
    D250
    Lecture bottle valve
    High pressure
    4mm orifice size
  • High pressure dual port cylinder valve for High Purity gases - D265
    D265
    Dual Port high purity valve
    Soft seat
    3.5mm orifice
  • Brass cylinder inline RPV valve for High Purity gases - D283
    D283
    Brass inline RPV
    Soft Seat
    3.5mm orifice
  • Stainless steel cylinder offline RPV valve for High Purity gases - D282
    D282
    Offline RPV
    Soft Seat
    3.5mm orifice
  • Direct seal brass cylinder valve for high purity gases - D203
    D203
    Direct seal type
    Soft Seat
    3.5mm orifice
  • Low pressure dual port brass cylinder valves - D285
    D285
    Dual port
    8mm orifice
    Low pressure

Packed seal type

  • High pressure cylinder valves, packed needle stem design, for high purity gases - D100
    D100
    High pressure cylinder valve
    Metal / Metal seat
    3.3mm orifice
  • High pressure cylinder and bundle valve with pneumatic actuator for corrosive gases - D131
    D131
    Pneumatic actuator
    Metal / Metal seat
    2.8mm orifice
  • 2-pieces sturdy stem design high pressure cylinder valves for corrosive gases – D160S
    D160S
    2-pieces sturdy stem design
    Soft Seat
    6mm orifice
  • High pressure cylinder valves with pneumatic actuator for corrosive gases – D156S
    D156S
    Pneumatic actuator
    6 mm orifice
    Soft seat
  • Spring loaded dual port cylinder valve for corrosive gases – D195S
    D195S
    Spring loaded
    Soft seat
    6mm orifice
  • Drum valve, 2-pieces sturdy stem packed type design for corrosive and toxic gases – D154S
    D154S
    Drum valve
    soft seat
    6mm orifice
  • High pressure cylinder valve with spring loaded v-gaskets and RPV – D167S
    D167S
    Offline RPV
    Soft seat
    6mm orifice
  • Drum valve, 2-pieces sturdy stem packed type design for corrosive and toxic gases – D158
    D158
    Drum valve
    soft seat
    12mm orifice
  • High pressure, packed type cylinder valve for corrosive and toxic gases with non-return valve – D183
    D183
    With non-return valve
    Soft reversed seat
    12mm orifice

O-ring seal type

  • High pressure line valve specific applications - D605
    D605
    Hydrogen, methane and acetylene applications
    O-ring
    12mm orifice
  • Constant Flow Cylinder Valve - D405
    D405
    Constant Flow Cylinder Valve
    Self-closing valve
    Up to 110 bar
  • High pressure cylinder valve specific applications - D488
    D488
    Hydrogen, methane and acetylene applications
    O-ring
    6mm orifice
Connect with an Expert
Go up
Learn more here
×
Search Rotarex
start typing...
Loading