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PREMIUM GAS SYSTEMS FOR ULTRA HIGH PURITY GASES
Safety & Quality
  • State-of-the-art UHP gas solutions including pressure regulators, line valves, cylinder valves, cylinder connectors and fittings
  • 100% Helium leak test performed on all products
  • Specific packaging to respect the purity level
  • ISO 4 Cleanroom manufacturing conditions
All gas types
  • HP & UHP gas equipment and cylinder valves for semiconductor, photovoltaic (solar cells), LED light manufacturing processes and other applications
  • For electronics, corrosive, toxic and specialty gases
  • Purity levels from 6.0 to 9.0 and more
  • Precise control of low to high pressure gases and fluids
All technologies to fit your application
  • Tied diaphragm, diaphragm, packed seal, bellow seal or -ring seal technologies
  • Sealing level up to 10-11 mbarl/s
All connections & standards
  • Gas systems : various end connections available to cover all needs and all applications
  • Cylinder valves : Inlet & outlet connections for all standards & gases: DIN, CG, JIS, BS, AFNOR, UNI, NEN, NBR
downloads
  • Download
    Complete UHP Solution
    Last update: Aug 29, 2023
    Available in: en
  • Download
    RX1000 Compact UHP Pressure Regulator
    Last update: Aug 29, 2023
    Available in: en
  • Download
    RX3200 UHP Pressure Regulator
    Last update: Sep 18, 2023
    Available in: en
  • Download
    RX3000 UHP Pressure Regulator
    Last update: Sep 18, 2023
    Available in: en
  • Download
    RX4200 UHP Pressure Regulator
    Last update: Sep 18, 2023
    Available in: en
  • Download
    RX4000 UHP Pressure Regulator
    Last update: Sep 18, 2023
    Available in: en
FULLY CUSTOMIZABLE UHP GAS SOLUTIONS TO FIT ANY SYSTEM CONFIGURATION
DOWN THE ENTIRE LINE
RX3000 AND RX4000 UHP PRESSURE REGULATORS
Ready to install UHP gas systems for:
  • Gas Cabinets
  • VMBs
  • Process tools
  • Gas Delivery Sytems
  • And many others...
Benefit from Rotarex high performance and quality components such as:
  • UHP Pressure Regulators
  • UHP Line Valves
  • UHP Fittings
  • UHP Cylinder Connectors
  • and much more...
THREADLESS & SPRINGLESS UHP PRESSURE REGULATORS
RX3000 AND RX4000 UHP PRESSURE REGULATORS
  • Single-stage diaphragm pressure regulator for high and ultra high purity gases
  • Unique threadless design for a higher purity level
  • Springless design for tied diaphragm version
  • Sub-atmospheric option available
  • Optimized supply pressure effect and excellent flow stability
  • Life duration according to CGA E4
  • Electropolished surface roughness per SEMI F19 UHP Grade
  • 316L VAR® stainless steel double melt per SEMI F20 option available
videos
UHP Solutions
Ultra high purity line valves & pressure regulators
Ultra high purity gas pressure regulators
  • Product
    HP & UHP regulator
    Cv 0.04, 0.09, 0.15
    Free diaphragm
  • Product
    HP & UHP regulator
    Cv 0.09, 0.15
    Free diaphragm
  • Product
    HP & UHP regulator
    Cv 0.09
    Tied diaphragm
  • Product
    HP & UHP regulator
    Cv 0.09, 0.15
    Tied diaphragm
  • Product
    HP & UHP regulator
    Cv 0.15
    Free diaphragm
  • Product
    HP & UHP regulator
    Cv 0.09, 0.15
    Tied diaphragm
  • Product
    HP & UHP regulator
    Cv 0.09
    Tied diaphragm
  • Product
    HP & UHP regulator
    Cv 0.15, 0.25, 0.5, 0.9, 1.1
    Free diaphragm
  • Product
    HP & UHP regulator
    Cv 0.5
    Tied diaphragm
  • Product
    HP & UHP regulator
    Cv 0.15, 0.25, 0.5, 0.9, 1.1
    Tied diaphragm
Springless diaphragm line valves
  • Product
    HP & UHP line valve
    Flow capacity 0.2
    Springless diaphragm
  • Product
    HP & UHP line valve
    Flow capacity 0.5
    Springless diaphragm
  • Product
    HP & UHP line valve
    Flow capacity 0.2
    Forged body
  • Product
    HP & UHP line valve
    Flow capacity 0.5
    Forged body
  • Product
    HP & UHP line valve
    Flow capacity 1.75
    Springless diaphragm
  • Product
    HP & UHP line valve
    Flow capacity 3.5
    Springless diaphragm
Tied diaphragm line valves
  • Product
    Manual line valve
    Soft Seat
    4mm orifice
  • Product
    Oleo-pneumatic line valve
    Soft Seat
    4mm orifice
  • Product
    Pneumatic line valve
    Soft knife edge Seat
    4mm orifice
  • Product
    Manual line valve
    Soft Seat
    6mm orifice
  • Product
    Oleo-pneumatic line valve
    Soft Seat
    6mm orifice
Bellows & check valves
  • Product
    Bellows valve
    Low or high pressure
    -40°C to + 120°C (ambient)
  • Product
    Bellows valve
    High pressure
    -40°C to + 120°C (ambient)
  • Product
    Bellows valve
    Low to high pressure
    196°C to + 250°C (cryogenic)
  • Product
    Bellows valve
    High pressure
    -196 °C to + 250°C (cryogenic)
  • Product
    Bellows valve
    High pressure
    -40°C to + 120°C (ambient)
  • Product
    Bellows valve
    Low pressure
    -196 °C to + 250°C (cryogenic)
  • Product
    Check valves
    Low to high pressure
    -196°C to +250°C (cryogenic)
Ultra high purity fittings & connectors
Metal gasket face seal fittings
High flow fittings
  • Product
    Female Nut for High Flow Applications
  • Product
    Male Nut for High Flow Applications
  • Product
    Short Male Gland for High Flow Applications
  • Product
    Automatic Buttweld Body for High Flow Applications
  • Product
    Automatic Buttweld Body for High Flow Applications
  • Product
    Buttweld Bulkhead Union for High Flow Applications
Weld fittings
  • Product
  • Product
    Automatic Buttweld Reducing Union without Shoulder
  • Product
    Automatic Buttweld Elbow without Shoulder
  • Product
    Automatic Buttweld Reducing Elbow without Shoulder
  • Product
    Automatic Buttweld Tee without Shoulder
  • Product
    Automatic Buttweld Reducing Tee without Shoulder
  • Product
    Automatic Buttweld Cross without Shoulder
Ultra high purity connectors
Ultra high purity gas cylinder valves
Tied diaphragm seal type
  • Product
    High pressure
    Soft seat
    4mm orifice
  • Product
    High pressure Pneumatic valve
    Soft seat
    4mm orifice
  • Product
    Tied diaphragm cylinder valve for fluorine mixtures with pneumatic actuator
  • Product
    Oleo-Pneumatic
    Soft seat
    4mm orifice
  • Product
    Dual Port UHP valve
    Soft seat
    4mm orifice
  • Product
    High pressure valve
    Metal / Metal sealing
    4mm orifice
  • Product
    Oleo-pneumatic valve
    Metal / Metal sealing
    3.5mm orifice
  • Product
    High pressure manual valve
    Soft seat
    6mm orifice
  • Product
    Oleo-Pneumatic
    Soft seat
    6mm orifice
  • Product
    Dual Port UHP valve
    Soft seat
    6mm orifice
  • Product
    Tied-diaphragm seal
    Low Pressure
    8mm orifice
  • Product
    Pneumatic actuator
    Low Pressure
    8mm orifice
  • Product
    Dual Port UHP valve
    Soft seat
    8mm orifice
High purity gas cylinder valves
Valves with integrated pressure regulator (VIPR)
  • Product
    Stainless Steel VIPR
    Adjustable pressure regulator
    For calibration applications
  • Product
    Stainless Steel VIPR
    Integrated flow selector
    For calibration applications
Diaphragm seal type
  • Product
    High pressure
    Soft seat
    4mm orifice
  • Product
    Lecture bottle valve
    High pressure
    4mm orifice size
  • Product
    Dual Port high purity valve
    Soft seat
    3.5mm orifice
  • Product
    Brass inline RPV
    Soft Seat
    3.5mm orifice
  • Product
    Offline RPV
    Soft Seat
    3.5mm orifice
  • Product
    Direct seal type
    Soft Seat
    3.5mm orifice
  • Product
    Dual port
    8mm orifice
    Low pressure
Packed seal type
  • Product
    High pressure cylinder valve
    Metal / Metal seat
    3.3mm orifice
  • Product
    Pneumatic actuator
    Metal / Metal seat
    2.8mm orifice
  • Product
    2-pieces sturdy stem design
    Soft Seat
    6mm orifice
  • Product
    Pneumatic actuator
    6 mm orifice
    Soft seat
  • Product
    Spring loaded
    Soft seat
    6mm orifice
  • Product
    2-pieces sturdy stem design
    Metal / Metal seat
    6mm orifice
  • Product
    Drum valve
    soft seat
    6mm orifice
  • Product
    Offline RPV
    Soft seat
    6mm orifice
  • Product
    Drum valve
    soft seat
    12mm orifice
  • Product
    With non-return valve
    Soft reversed seat
    12mm orifice
O-ring seal type
  • Product
    Hydrogen, methane and acetylene applications
    O-ring
    12mm orifice
  • Product
    Constant Flow Cylinder Valve
    Self-closing valve
    Up to 110 bar
  • Product
    Hydrogen, methane and acetylene applications
    O-ring
    6mm orifice
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