Ultra High Purity pressure regulators

Pressure regulators for ultra high purity gases are ideal for applications requiring high precision and purity to prevent any risk of gas contamination. They are essential equipment at various stages of the manufacturing processes for semiconductors and photovoltaic cells. Processes such as diffusion, chemical vapour deposition (CVD), screen printing, annealing, curing, oxidation, lithography, etching and atomic layer deposition (ALD) demand the highest levels of purity.

Rotarex has developed a comprehensive range of diaphragm pressure regulators that exceed the industry’s stringent requirements. They are designed to ensure precise and safe gas delivery whilst preventing any contamination.

Key features of UHP pressure regulators

Diaphragm technology: Rotarex ultra high purity gas regulators ensure stable, precise pressure and flow
A very high level of purity: UHP gases are used in applications where gas purity is essential
Reliability and safety: excellent leak tightness is a must when toxic and corrosive gases are involved

PRODUCT FEATURES

Assembling, testing & packaging in cleanroom: Class ISO 4

Life duration according to CGA E4

Electropolished surface per SEMI F19 UHP Grade

316L VAR^® stainless steel double melt per SEMI F20 option available

Sub-atmospheric option available

Individual serial number for full traceability

Applications: Where UHP Gas Pressure Regulators Are Required

Ultra high purity gas pressure regulators are essential in highly demanding environments where even the smallest contamination, pressure fluctuation, or instability can directly impact process yield, product quality, and equipment reliability. In these critical applications, maintaining absolute gas purity, consistent pressure control, and long-term operational stability is not optional, it is fundamental.

UHP regulators are specifically designed to meet these stringent requirements, ensuring particle-free gas delivery, minimal dead volume, and exceptional leak-tightness, even under continuous operation and highly controlled process conditions.

Semiconductor manufacturing: CVD, ALD, diffusion, oxidation, lithography, and etching processes
Photovoltaic cell manufacturing: screen printing, baking, and curing
Specialty gas: specialty gas supply systems requiring critical purity levels
Inert gas applications: inert gas purging and blanketing in precision manufacturing environments

Applications: Where UHP Gas Pressure Regulators Are Required

Materials and Construction Standards

The performance of a UHP gas pressure regulator depends directly on material grade and manufacturing conditions. Rotarex UHP regulators are built to the following specifications:

316L VAR^® stainless steel: double-melt alloy per SEMI F20 (option available), selected for controlled inclusion content and corrosion resistance in aggressive gas service
Electropolished internal surfaces: per SEMI F19, reducing surface roughness, adsorption, and outgassing
Diaphragm construction: eliminates sliding contact seals and associated particle generation in the gas path
ISO Class 4 cleanroom assembly and packaging preserves internal surface integrity from manufacture to site installation

How to Select a UHP Gas Pressure Regulator

Selecting the correct UHP regulator requires matching the device to the process gas type, flow requirements, and installation configuration:

Type of gas: inert gases (nitrogen, argon, helium) are compatible with standard UHP construction; toxic, corrosive, or pyrophoric specialty gases may require specific material or configuration verification
Cv and flow rate: Rotarex UHP models cover Cv from 0.09 to 1.1; select based on the flow rate demanded by the process
Inlet pressure: models are rated for 21, 117, 207, or 240 bar; match to the cylinder supply pressure
Sub-atmospheric delivery: the RX3100 and RX4100 models deliver gas at sub-atmospheric pressure, required for specialty gas processes where backflow prevention is critical
Connection type: tube fitting or FNPT connection, depending on the gas distribution system

Related UHP Rotarex Products

To ensure complete system integrity and maintain ultra-high purity throughout your gas delivery system, UHP pressure regulators are typically used in combination with other high-performance components. Explore our full range of compatible UHP solutions:

UHP Valves

UHP valves are designed to provide precise flow control and absolute shut-off performance in ultra-clean gas systems. Whether used for isolation, control, or distribution, they play a key role in maintaining system integrity across complex gas networks.

UHP Fittings

UHP fittings are engineered to create secure, leak-tight, and contamination-free connections between system components. In ultra-high purity applications, connection quality is critical, as even the smallest leak or particle source can compromise the entire process.

UHP Connectors

UHP connectors provide flexible and reliable connection solutions for complex gas distribution systems, enabling safe and efficient gas transfer between modules or subsystems. They are particularly valuable in environments requiring frequent connection and disconnection without compromising purity.

UHP Bellows Valves

UHP bellows valves feature a metal-to-metal sealing design, eliminating the need for elastomers and significantly reducing the risk of contamination or permeation. This makes them particularly suited for ultra-high purity and high-cycle applications.

UHP Cylinder Valves

Installed directly on gas cylinders, UHP cylinder valves represent the first and most critical control point in the gas delivery chain. Their design is essential to preserving gas purity right from the source, preventing contamination before the gas even enters the distribution system.

Single Stage vs. Two Stage UHP Gas Regulators

Single stage UHP regulators perform pressure reduction in one step. Compact and straightforward to install, they are suited to applications where outlet pressure variation across the cylinder service life is acceptable.

Dual stage UHP regulators reduce pressure across two sequential steps, delivering consistent delivery pressure from a full cylinder to near-empty. They are the preferred configuration for processes that require tight outlet pressure control throughout the full cylinder service life.

Rotarex offers both configurations across the RX3000 and RX4000 series, with Cv values from 0.09 to 1.1 and inlet pressure ratings from 21 to 240 bar depending on the model.

Why Rotarex UHP Gas Pressure Regulators Are Trusted by the Semiconductor and Specialty Gas Industries

Rotarex is a specialist manufacturer of precision pressure control equipment for semiconductor, specialty gas, medical, and industrial applications.

Our UHP regulator range is trusted by process engineers, gas equipment distributors, and cylinder manufacturers worldwide.

Diaphragm technology for particle-free gas delivery in contamination-critical processes
316L VAR^® stainless steel and electropolished internals per SEMI F19 for maximum purity retention
Sub-atmospheric models for specialty gas processes requiring backflow prevention
Cv range from 0.09 to 1.1 and inlet pressure ratings from 21 to 240 bar
ISO Class 4 cleanroom assembly with individual serialization for complete traceability
Compliance with CGA E4, SEMI F19, and SEMI F20 standards

Maintaining Gas Purity in UHP Systems

Maintaining purity of gases in a UHP distribution system involves more than simply selecting the right regulator. The individual serial numbers on each Rotarex UHP regulator enable full traceability, facilitate investigations in the event of contamination, and support the implementation of preventive maintenance programs. For reactive or corrosive specialty gases, models operating at sub-atmospheric pressure prevent ambient air from entering the gas line when the cylinder is nearly empty, which is an essential requirement for safety and purity in semiconductor and specialty gas environments.

Compliance & Certifications

Rotarex UHP gas pressure regulators are designed and manufactured to the applicable standards for ultra high purity gas equipment:

CGA E4: life duration testing for gas pressure regulators
SEMI F19: electropolished surface finish specification for UHP gas wetted components
SEMI F20: 316L VAR^® double melt stainless steel specification (option available)
ISO Class 4: cleanroom assembly and packaging standard