Single-stage diaphragm pressure regulator for HP & UHP gases - RX4000

RX4000 is single stage free diaphragm pressure regulator for high purity & ultra high purity applications. The first of its kind threadless pressure regulators for the highest level of purity.

Key advantages

Unique threadless design in all versions for a higher purity level
Optimized supply pressure effect and excellent flow stability
Life duration according to CGA E4
Vacuum to 240 bar (3500 psi) inlet
Assembling, testing & packaging in cleanroom: Class ISO 4
Individual serial number for full traceability
Electropolished surface per SEMI F19 UHP Grade
UHP Material - Semi F20 option available

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Download STP File

STP File Download Configurator

CONSTRUCTION MATERIAL

	Parts	Material
Wetted parts	Body	SS 316L, UHP Material - Semi F20
	Seat	PCTFE (Polyimid optional)
	Diaphragm	SS 316L (Hastelloy^® optional)
	Poppet	SS 316L (Hastelloy^® optional)
	Spring	SS 316L (Hastelloy^® optional)
	Spring Holder	SS 316L
Non-wetted parts	Bonnet	SS 303
	Handwheel	PA 6.6
	Others	Stainless Steel and Brass

SURFACE FINISH

S	V	U
Ra 0.4 μm (15 μin)	Ra 0.25 μm EP (10 μin)	Ra 0.13 μm EP (5 μin)

Flow capacity (Cv)	0.15	0.25	0.5	0.9	1.1
Supply pressure effect I*	0.25	0.5	1.4	3	4

*1 bar / 100 bar inlet pressure change

It's not possible to reach all outlet pressure with all inlet pressures, see compatibility table below:

COMPATIBLE OUTLET/INLET PRESSURE

Product image

FLOW CURVES

Specifications

Poppet type	Free diaphragm
Temperature range	-20°C to +65°C (-4°F to +149°F)
Burst pressure	300% of operating pressure
Proof pressure	150% of operating pressure
Certified max. helium outboard leak rate	≤ 1 x 10^-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)	≤ 1 x 10^-8 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)	≤ 1 x 10^-9 mbar.l/s

Dimensional drawings

Download STP File

Product Configurator

Column 2	Regulator type	Outlet Pressure	Seat material	Cv value	Body material	Surface finish	Porting configuration	Connection	Actuator	Inlet pressure	Options
RX	40	01	K	015	S	S	2W1	4F	M	021	H
	Free diaphragm 40	0.7 bar (10 psig) 01 2 bar (30 psig) 02 4 bar (60 psig) 04 7 bar (100 psig) 07 10 bar (150 psig) 10	PCTFE K Polyimid V PTFE* T	0.15 015 0.25 025 0.5 050 0.9 090 1.1 110	Stainless Steel AISI 316L S UHP Material - Semi F20 V	Ra 0.4 μm (15 μin) S Ra 0.25 μm EP (10 μin) V Ra 0.13 μm EP (5 μin) U	2 ports 2W1 3 ports 3W4 4 ports 4W6	1/4” Female VCR 4F 1/4” Male VCR 4M 1/2” Female VCR 8F 1/2” Male VCR 8M	Handwheel M Panel mount F	21 bar (30 psig)* 021 117 bar (1,700 psig) 117 207 bar (3,000 psig) 207 240 bar (3,500 psig) 240	Hastelloy Trim H Gauge (bar/PSI)* PG0 Gauge (MPa)*** PG1

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* PTFE seat is only available with 21 bar inlet pressure
** Includes Hastelloy C22 Poppet, wetted spring & diaphragm
*** Standard gauge ports are Metal Face Seal ¼” Male

Downloadable catalogs, brochures

RX4000 UHP Pressure Regulator

Last update: Oct 22, 2024
Available in: en/CN/JA
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Last update: Dec 09, 2024
Available in: en/JA/CN