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Single-stage diaphragm pressure regulator for HP & UHP gases - RX4000

RX4000 are single stage Free diaphragm pressure regulators for HP & UHP applications. The first of its kind threadless pressure regulators for the highest level of purity.
Key advantages
  • Unique threadless design in all versions for a higher purity level
  • Optimized supply pressure effect and excellent flow stability
  • Life duration according to CGA E4
  • Vacuum to 240 bar (3500 psi) inlet
  • Assembling, testing & packaging in cleanroom: Class ISO 4
  • Individual serial number for full traceability
  • Electropolished surface per SEMI F19 UHP Grade
  • 316L VAR® stainless steel double melt per SEMI F20 option available

CONSTRUCTION MATERIAL

  Parts Material
Wetted parts Body SS 316L, VAR
Seat PCTFE (PVDF, Polyimid optional)
Diaphragm SS 316L (Hastelloy® optional)
Poppet SS 316L (Hastelloy® optional)
Spring SS 316L (Hastelloy® optional)
Spring Holder SS 316L
Non-wetted parts Bonnet SS 303
Handwheel PA 6.6
Others Stainless Steel and Brass

SURFACE FINISH

S V U
Ra 0.4 μm (15 μin) Ra 0.25 μm EP (10 μin) Ra 0.13 μm EP (5 μin)  

 

Flow capacity (Cv) 0.15 0.25 0.5 0.9 1.1
Supply pressure effect I* 0.25 0.5 1.4 3 4
*1 bar / 100 bar inlet pressure change

 

It's not possible to reach all outlet pressure with all inlet pressures, see compatibility table below:

COMPATIBLE OUTLET/INLET PRESSURE

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FLOW CURVES 

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Specifications
Poppet typeFree diaphragm
Temperature range-20°C to +65°C (-4°F to +149°F)
Burst pressure300% of operating pressure
Proof pressure150% of operating pressure
Certified max. helium outboard leak rate≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)≤ 1 x 10-8 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)≤ 1 x 10-9 mbar.l/s
Dimensional drawings
Drawing
Product Configurator
Column 2
Regulator type
Outlet Pressure
Seat material
Cv value
Body material
Surface finish
Porting configuration
Connection
Actuator
Inlet pressure
Options
RX
40
02
K
015
S
S
2W1
4F
M
021
H
 
Free diaphragm
40
2 bar (29 psig)
02
4 bar (58 psig)
04
7 bar (102 psig)
07
10 bar (145 psig)
10
PCTFE
K
Polyimid
V
PVDF*
P
PTFE*
T
0.15
015
0.25
025
0.5
050
0.9
090
1.1
110
Stainless Steel AISI 316L
S
Stainless Steel AISI 316 AOD Var
V
Ra 0.4 μm (15 μin)
S
Ra 0.25 μm EP (10 μin)
V
Ra 0.13 μm EP (5 μin)
U
2 ports
2W1
3 ports
3W4
4 ports
4W6
1/4” Female VCR
4F
1/4” Male VCR
4M
1/2” Female VCR
8F
1/2” Male VCR
8M
Handwheel
M
21 bar (305 psig)
021
117 bar (1,700 psig)
117
207 bar (3,000 psig)
207
240 bar (3,500 psig)
240
Hastelloy Trim**
H
Gauge (bar/PSI)***
PG0
Gauge (MPa)***
PG1
* PTFE and PVDF seat are only available with 21 bar inlet pressure
** Includes Hastelloy C22 Poppet, wetted spring & diaphragm
*** Standard gauge ports are Metal Face Seal ¼\" Male
Downloadable catalogs, brochures
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    RX3900 UHP Pressure Regulator
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    RX4000 UHP Pressure Regulator
    Last update: Apr 24, 2024
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    RX4100 UHP Pressure Regulator
    Last update: Apr 24, 2024
    Available in: en/CN
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    Complete UHP Solution
    Last update: Mar 13, 2024
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    RX1000 Compact UHP Pressure Regulator
    Last update: Mar 26, 2024
    Available in: en/CN/JA
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