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Single-stage diaphragm pressure regulator for HP & UHP gases - RX4000
Specialty gas systems > Ultra high purity gas equipment > Ultra high purity pressure regulators
RX4000 is a single stage diaphragm pressure regulator for HP & UHP applications. The first of its kind threadless and springless pressure regulator for the highest level of purity.
Key advantages
  • Unique threadless design in all versions for a higher purity level
  • Spring less design for tied diaphragm version
  • Sub-atmospheric option available
  • Optimized supply pressure effect and excellent flow stability
  • Life duration according to CGA E4
  • Vacuum to 240 bar (3500 psi) inlet
  • Assembling, testing & packaging in cleanroom: Class ISO 4
  • Individual serial number for full traceability
  • Electropolished surface roughness per SEMI F19 UHP Grade
  • 316L VAR® stainless steel double melt per SEMI F20 option available

CONSTRUCTION MATERIAL

  Parts Material
Wetted parts Body SS 316L, VAR
Seat PCTFE (PVDF, VESPEL® optional)
Diaphragm SS 316L (Hastelloy® optional)
Poppet SS 316L (Hastelloy® optional)
Spring SS 316L (Hastelloy® optional)
Spring Holder SS 316L
Non-wetted parts Bonnet SS 303
Handwheel PA 6.6
Others Stainless Steel and Brass

SURFACE FINISH

S V U
Ra 0.4 μm (15 μin) Ra 0.25 μm EP (10 μin) Ra 0.13 μm EP (5 μin)  

  

Specifications
Max. inlet pressureRX4400-RX4300: 240 bar (3500 psig) / RX4100: 160 bar (2320 psig) / RX4000-RX42000: 117 bar (2000 psig) / HF: 50 bar (730 psig)
Outlet Pressure100 mbara/ 2/4/7/10 bar (29/58/102/150 psig)
Temperature range-20°C to +65°C (-4°F to +149°F)
Flow capacity (cv)RX4400-RX4300: Standard: 0.15 / HF: 0.2 / RX4100: Standard: 0.45 / RX4000-RX4200: Standard: 0.9 / HF: 1.1
Poppet typeRX4000-RX4400 : Free poppet / RX4100-RX4200-RX4300: Tied diaphragm
Burst pressure300% of operating pressure
Proof pressure150% of operating pressure
Supply pressure effect iRX4400-RX4300: Standard: 0.25 / HF: 0.5 / RX4100: Standard: 1.4 / RX4000-RX4200: Standard: 3 / HF: 4
Certified max. helium outboard leak rate≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)≤ 1 x 10-8 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)≤ 1 x 10-9 mbar.l/s
Dimensional drawings
Drawing
Product Configurator
Ocodes ImageOcodes ImageOcodes Image
Downloadable catalogs, brochures
  • Download
    RX4000 UHP Pressure Regulator
    Last update: Jan 26, 2023
    Available in: en
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