Single-stage diaphragm pressure regulator for HP & UHP gases - RX4000
RX4000 is a single stage diaphragm pressure regulator for HP & UHP applications. The first of its kind threadless and springless pressure regulator for the highest level of purity.
Key advantages
- Unique threadless design in all versions for a higher purity level
- Spring less design for tied diaphragm version
- Sub-atmospheric option available
- Optimized supply pressure effect and excellent flow stability
- Life duration according to CGA E4
- Vacuum to 240 bar (3500 psi) inlet
- Assembling, testing & packaging in cleanroom: Class ISO 4
- Individual serial number for full traceability
- Electropolished surface roughness per SEMI F19 UHP Grade
- 316L VAR® stainless steel double melt per SEMI F20 option available
CONSTRUCTION MATERIAL
| Parts | Material | |
| Wetted parts | Body | SS 316L, VAR |
| Seat | PCTFE (PVDF, VESPEL® optional) | |
| Diaphragm | SS 316L (Hastelloy® optional) | |
| Poppet | SS 316L (Hastelloy® optional) | |
| Spring | SS 316L (Hastelloy® optional) | |
| Spring Holder | SS 316L | |
| Non-wetted parts | Bonnet | SS 303 |
| Handwheel | PA 6.6 | |
| Others | Stainless Steel and Brass |
SURFACE FINISH
| S | V | U |
| Ra 0.4 μm (15 μin) | Ra 0.25 μm EP (10 μin) | Ra 0.13 μm EP (5 μin) |
Specifications
| Max. inlet pressure | RX4400-RX4300: 240 bar (3500 psig) / RX4100: 160 bar (2320 psig) / RX4000-RX42000: 117 bar (2000 psig) / HF: 50 bar (730 psig) |
| Outlet Pressure | 100 mbara/ 2/4/7/10 bar (29/58/102/150 psig) |
| Temperature range | -20°C to +65°C (-4°F to +149°F) |
| Flow capacity (cv) | RX4400-RX4300: Standard: 0.15 / HF: 0.2 / RX4100: Standard: 0.45 / RX4000-RX4200: Standard: 0.9 / HF: 1.1 |
| Poppet type | RX4000-RX4400 : Free poppet / RX4100-RX4200-RX4300: Tied diaphragm |
| Burst pressure | 300% of operating pressure |
| Proof pressure | 150% of operating pressure |
| Supply pressure effect i | RX4400-RX4300: Standard: 0.25 / HF: 0.5 / RX4100: Standard: 1.4 / RX4000-RX4200: Standard: 3 / HF: 4 |
| Certified max. helium outboard leak rate | ≤ 1 x 10-9 mbar.l/s |
| Certified max. helium across the seat leak rate (at max. pressure) | ≤ 1 x 10-8 mbar.l/s |
| Certified max. helium inboard leak rate (at max. pressure) | ≤ 1 x 10-9 mbar.l/s |
Dimensional drawings
Product Configurator
Downloadable catalogs, brochures
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