RX4000 are single stage Free diaphragm pressure regulators for HP & UHP applications. The first of its kind threadless pressure regulators for the highest level of purity.
Key advantages
Unique threadless design in all versions for a higher purity level
Optimized supply pressure effect and excellent flow stability
Life duration according to CGA E4
Vacuum to 240 bar (3500 psi) inlet
Assembling, testing & packaging in cleanroom: Class ISO 4
Individual serial number for full traceability
Electropolished surface per SEMI F19 UHP Grade
316L VAR® stainless steel double melt per SEMI F20 option available
Rotarex uses cookies to ensure a better and easier online experience. Please click here to accept the continued use of these cookies after reading our revised COOKIES POLICY.
Please note, you may continue to use the website even if you do not accept the use of cookies. However, the visitor experience on subsequent visits will be diminished.