Print

Dual stage pressure regulator for HP & UHP gases - RX3900

RX3900 is a dual stage pressure regulator for HP & UHP applications. Pressure reduction with the lowest supply pressure effect.
Key advantages
  • Supply pressure effect is close to zero
  • Life duration according to CGA E4
  • Vacuum to 310 bar (4,500 psig) inlet
  • Assembling, testing & packaging in cleanroom: Class ISO 4
  • Individual serial number for full traceability
  • Electropolished surface per SEMI F19 UHP Grade
  • UHP Material - Semi F20 option available

CONSTRUCTION MATERIAL

  Parts Material
Wetted parts Body SS 316L, UHP Material - Semi F20
Seat PCTFE, Polyimid (mandatory for 310 bar / 4500 psig inlet pressure)
Diaphragm SS 316L (Hastelloy® optional)
Poppet SS 316L (Hastelloy® optional)
Spring SS 316L (Hastelloy® optional)
Spring Holder SS 316L
Non-wetted parts Bonnet SS 303
Handwheel PA 6.6
Others Stainless Steel and Brass

SURFACE FINISH

S V U
Ra 0.4 μm (15 μin) Ra 0.25 μm EP (10 μin) Ra 0.13 μm EP (5 μin)  

 

Flow capacity (Cv) 0.09
Supply pressure effect I* 0.001
*1 bar / 100 bar inlet pressure change

FLOW CURVES 

RX3900Product image

 RX3900 - Supply pressure effect

 

Product image

 

Specifications
Max inlet pressure240 / 310 bar (2,500 / 4,500 psig)
Outlet Pressure0.7 / 2 / 4 / 7 / 10 bar (10 / 30 / 60 / 100 / 150 psig)
Regulator typeTied diaphragm
Burst pressure300% of operating pressure
Proof pressure150% of operating pressure
Temperature range-20°C to +65°C (-4°F to +149°F)
Certified max. helium outboard leak rate≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)≤ 1 x 10-8 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)≤ 1 x 10-9 mbar.l/s
Dimensional drawings
Drawing
Product Configurator
 
Regulator type
Outlet Pressure
Seat material
Cv value
Body material
Surface finish
Porting configuration
Connections
Actuation
Inlet pressure
Options
RX
39
01
K
009
S
S
2W1
4F
M
240
H
 
Double stage (Tied diaphragm)
39
0.7 bar (10 psig)
01
2 bar (30 psig)
02
4 bar (60 psig)
04
7 bar (100 psig)
07
10 bar (150 psig)
10
PCTFE
K
Polyimid
V
0.09
009
Stainless Steel AISI 316L
S
UHP Material - Semi F20
V
Ra 0.4 μm (15 μin)
S
Ra 0.25 μm EP (10 μin)
V
Ra 0.13 μm EP (5 μin)
U
2 ports
2W1
3 ports
3W4
4 ports
4W6
1/4” Female VCR
4F
1/4” Male VCR
4M
Handwheel
M
240 bar (3,500 psig)
240
310 bar (4,500 psig)*
310
Hastelloy Trim**
H
Gauge (bar/PSI)***
PG0
Gauge (MPa)***
PG1
* Polyimid mandatory for 310 bar (4,500 psig) inlet pressure
** Includes Hastelloy C22 Poppet, wetted spring & diaphragm
*** Standard gauge ports are Metal Face Seal ¼\" Male

Downloadable catalogs, brochures
  • Download
    RX3900 UHP Pressure Regulator
    Last update: Jul 01, 2024
    Available in: en/CN
  • Download
    Complete UHP Solution
    Last update: Sep 12, 2024
    Available in: en/JA/CN
Connect with an Expert
×
Loading