Why choose Rotarex for your Ultra High Purity application?

At the heart of semiconductor manufacturing lies the need for ultra-high purity (UHP) gases. Because even the smallest impurity can cause major defects, the reliability of gas valves and equipment is just as critical as the purity of the gas itself. That’s where Rotarex makes the difference.

UHP equipment one stop shop

Rotarex plays a vital role in the demanding semiconductor manufacturing process at two levels:

At the source of the UHP gas:

Rotarex offers a comprehensive range of cylinder valves for UHP gases such as fluorocarbons, nitrogen, carbon-based, and silicon gases. Recognized worldwide as a leader in UHP cylinder valves, Rotarex designs its products with tied diaphragm seal technology and offers manual or pneumatic actuation for working pressures up to 300 bar.

Rotarex also pioneered the development of valves with integrated pressure regulation (VIPR), enhancing both productivity and safety.

In the semiconductor manufacturing process itself:

Rotarex provides a complete portfolio of UHP gas equipment, including CGA-DISS cylinder connections, pressure regulators, line valves, and fittings to ensure precise control and distribution throughout the process. Every product in the UHP range guarantees excellent tightness, high cycle life, and zero particle generation, meeting the most stringent semiconductor industry requirements.

A century of stainless steel expertise

Since 1922, Rotarex has built up unmatched experience in gas applications, holding more than 350 patents and maintaining a vast internal database of material-fluid compatibility. Backed by a rapid-response R&D infrastructure, Rotarex collaborates closely with leading gas industry players to anticipate future needs and deliver innovative solutions.

UHP gas valves and equipment from Rotarex undergo a rigorous, fully integrated manufacturing process to guarantee the highest levels of cleanliness, purity, and safety. Each step includes strict quality control, with individual product traceability ensured. Machined parts pass through multiple decontamination stages (cleaning, ultrasonic treatment, and rinsing) and can be optionally electropolished for an even finer surface finish. Final products are assembled in cleanrooms and 100% helium leak tested.

Your trusted partner worldwide for UHP gas solutions

With its global presence, Rotarex provides local support wherever semiconductor manufacturing takes place. From its headquarters in Luxembourg, Rotarex serves Europe with dedicated teams in France, Italy, Spain, Poland, and Russia. In the Americas, customers are supported through offices in the USA, Mexico, and Brazil.

Given that the largest share of semiconductor production is concentrated in Asia, Rotarex has reinforced its commercial presence and technical expertise in the region. Experts based in China, Korea, Japan, Taiwan, and Singapore ensure fast, knowledgeable support and a resilient supply chain.