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THE ELECTRONICS INDUSTRY: A FAST-GROWING MARKET WITH SPECIFIC NEEDS

The electronics industry
Semiconductors evolution
  • Electronic components, integrated-circuits, chips and sensors are now used in more and more products & applications, even outside the digital world
  • Components tend to be smaller, more performant & cheaper
Techniques & process evolution
  • Strong use of specific corrosive or toxic gases requiring the highest level of tightness and security
  • The highest level of gas purity is required to avoid contamination of the process and final product
  • Requirement of the highest level of UHP gas valves & equipment reliability
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WORLD LEADING CYLINDER VALVES FOR HIGH & ULTRA HIGH PURITY GASES

WORLD LEADING CYLINDER VALVES FOR HIGH & ULTRA HIGH PURITY GASES
Highest level of safety and cleanliness
  • 100% tested
  • Specific packaging
  • Cleanroom manufactured
Ultra-high purity gas valves
  • Valves for UHP gases for electronics, chemicals and other applications
  • All purity levels from 4.0 to 9.0 and more
  • Low and high pressure valves
All Technologies to fit your application
  • Tied diaphragm or packed seal technology
  • Sealing level up to 10-11 mbarl/s
All connections and standards
  • Outlet connections for all standards & gases: DIN, CG, JIS, BS, AFNOR, UNI, NEN, NBR
  • All inlet connections
Learn More

FOR SEMICONDUCTOR, BIOTECH AND PHARMACEUTICAL GAS SYSTEMS, ULTRA-HIGH PURITY, LEAK INTEGRITY & RELIABILITY ARE ESSENTIAL

A FULL RANGE OF VALVES AND REGULATORS FOR UHP APPLICATIONS
UHP line valves:
  • Springless and threadless design for Minimized particle generation
  • Maximum flow capacity thanks to a minimum dead space design
  • Working pressure up to 240 bar
  • Supported temperatures from -20 to 150 Celsius degrees
  • Assembling, testing & packaging in cleanroom: Class ISO 4
  • Excellent resistance to corrosion with electropolished surface roughness as per SEMI F19 UHP Grade
  • 100% Helium leak tested
UHP line pressure regulators
  • High level of outlet pressure stability
  • Flow rates range Expanded to meet all applications
  • Pressure handling up to 240 bar
  • Supported temperatures from -20 to 65 Celsius degrees
Learn More

The electronics industry

Ultra-high purity pressure regulators

Line regulators

  • Compact single-stage diaphragm pressure regulator for HP & UHP gases - RX1000
    RX1000
    HP & UHP regulator
    Cv 0.04, 0.09, 0.15
    Free diaphragm
  • Single-stage diaphragm pressure regulator for HP & UHP gases - RX3000
    RX3000
    HP & UHP regulator
    Cv 0.09, 0.15
    Free diaphragm
  • Sub-atmospheric pressure regulator for HP & UHP gases - RX3100
    RX3100
    HP & UHP regulator
    Cv 0.09
    Tied diaphragm
  • Single-stage tied-diaphragm pressure regulator for HP & UHP gases - RX3200
    RX3200
    HP & UHP regulator
    Cv 0.09, 0.15
    Tied diaphragm
  • Diaphragm loaded high pressure regulator for HP & UHP gases - RX3600
    RX3600
    HP & UHP regulator
    Cv 0.15
    Free diaphragm
  • Piston loaded high pressure regulator for HP & UHP gases - RX3700
    RX3700
    HP & UHP regulator
    Cv 0.09, 0.15
    Tied diaphragm
  • Dual stage pressure regulator for HP & UHP gases - RX3900
    RX3900
    HP & UHP regulator
    Cv 0.09
    Tied diaphragm
  • Single-stage diaphragm pressure regulator for HP & UHP gases - RX4000
    RX4000
    HP & UHP regulator
    Cv 0.15, 0.25, 0.5, 0.9, 1.1
    Free diaphragm
  • Sub-atmospheric pressure regulator for HP & UHP gases - RX4100
    RX4100
    HP & UHP regulator
    Cv 0.5
    Tied diaphragm
  • Single-stage tied-diaphragm pressure regulator for HP & UHP gases - RX4200
    RX4200
    HP & UHP regulator
    Cv 0.15, 0.25, 0.5, 0.9, 1.1
    Tied diaphragm

Ultra-high purity line valves

Diaphragm seal

  • Diaphragm high and low pressure line valve for HP & UHP gases - RX04
    RX04
    HP & UHP line valve
    Flow capacity 0.2
    Springless diaphragm
  • Diaphragm high and low pressure line valve for HP & UHP gases - RX08
    RX08
    HP & UHP line valve
    Flow capacity 0.5
    Springless diaphragm
  • Diaphragm high and low pressure line valve for HP & UHP gases - RX04F
    RX04F
    HP & UHP line valve
    Flow capacity 0.2
    Forged body
  • Diaphragm high and low pressure line valve for HP & UHP gases - RX08F
    RX08F
    HP & UHP line valve
    Flow capacity 0.5
    Forged body
  • Diaphragm low pressure line valve for HP & UHP gases - M12
    M12
    HP & UHP line valve
    Flow capacity 1.75
    Springless diaphragm
  • Diaphragm low pressure line valve for HP & UHP gases - M20
    M20
    HP & UHP line valve
    Flow capacity 3.5
    Springless diaphragm

Tied diaphragm seal

  • High Pressure manual line valve for UHP gases – D604
    D604
    Manual line valve
    Soft Seat
    4mm orifice
  • High Pressure line valve for UHP gases with oleo-pneumatic actuator – D654
    D654
    Oleo-pneumatic line valve
    Soft Seat
    4mm orifice
  • High Pressure line valve for UHP gases with pneumatic actuator – D688
    D688
    Pneumatic line valve
    Soft knife edge Seat
    4mm orifice
  • High Pressure manual line valve for UHP gases – D639S
    D639S
    Manual line valve
    Soft Seat
    6mm orifice
  • High Pressure line valve for UHP gases with oleo-pneumatic actuator – D689S
    D689S
    Oleo-pneumatic line valve
    Soft Seat
    6mm orifice

Bellows valves

  • Bellows low to high pressure valve for HP, UHP, corrosive gases and fluids – K300
    K300
    Bellows valve
    Low or high pressure
    -40°C to + 120°C (ambient)
  • Bellows high pressure valve for HP, UHP, corrosive gases and fluids – HP2000
    HP2000
    Bellows valve
    High pressure
    -40°C to + 120°C (ambient)
  • Bellows high pressure valve for HP, UHP, cryogenic gases and fluids – HP9000
    HP9000
    Bellows valve
    High pressure
    -196 °C to + 250°C (cryogenic)
  • Bellows high pressure valve for HP, UHP, corrosive gases and fluids – HP3000
    HP3000
    Bellows valve
    High pressure
    -40°C to + 120°C (ambient)
  • Bellows low pressure valve for HP, UHP, cryogenic gases and fluids – SUPRA
    SUPRA
    Bellows valve
    Low pressure
    -270°C to + 80°C (cryogenic)

Check valves

  • Spring type check valve for HP, UHP, cryogenic gases and fluids – CAR(S)
    CAR(S)
    Check valves
    Low to high pressure
    -196°C to +250°C (cryogenic)

Ultra-high purity fittings & connections

Cylinder connectors

Metal-to-metal face seal fittings

Weld fittings

  • UHP Fitting EB-ABW
    EB-ABW
  • UHP Fitting Automatic Buttweld Reducing Union Without Shoulder - RU-ABW
    RU-ABW
    Automatic Buttweld Reducing Union without Shoulder
  • UHP Fitting Automatic Buttweld Elbow Without Shoulder - E-ABW
    E-ABW
    Automatic Buttweld Elbow without Shoulder
  • UHP Fitting Automatic Buttweld Reducing Elbow Without Shoulder - RE-ABW
    RE-ABW
    Automatic Buttweld Reducing Elbow without Shoulder
  • UHP Fitting Automatic Buttweld Tee Without Shoulder - T-ABW
    T-ABW
    Automatic Buttweld Tee without Shoulder
  • UHP Fitting Automatic Buttweld Reducing Tee Without Shoulder - RT-ABW
    RT-ABW
    Automatic Buttweld Reducing Tee without Shoulder
  • UHP Fitting Automatic Buttweld Cross Without Shoulder - C-ABW
    C-ABW
    Automatic Buttweld Cross without Shoulder

High-flow fittings

  • UHP Fitting Female Nut for High Flow Applications - FN-HF
    FN-HF
    Female Nut for High Flow Applications
  • UHP Fitting Male Nut for High Flow Applications - MN-HF
    MN-HF
    Male Nut for High Flow Applications
  • UHP Fitting Short Male Gland for High Flow Applications - EM-HF
    EM-HF
    Short Male Gland for High Flow Applications
  • UHP Fittings Automatic Buttweld Body for High Flow Applications - UM-ABW HF
    UM-ABW HF
    Automatic Buttweld Body for High Flow Applications
  • UHP Fitting Automatic Buttweld Body for High Flow Applications - UM-AB HF
    UM-AB HF
    Automatic Buttweld Body for High Flow Applications
  • UHP Fittings Buttweld Bulkhead Union for High Flow Applications - BU-HF
    BU-HF
    Buttweld Bulkhead Union for High Flow Applications

Ultra-high purity gas cylinder valves

Tied diaphragm seal

  • High pressure UHP cylinder valve – D304
    D304
    High pressure
    Soft seat
    4mm orifice
  • High pressure pneumatic UHP cylinder valve - D385S
    D385S
    High pressure Pneumatic valve
    Soft seat
    4mm orifice
  • Tied diaphragm cylinder valve for fluorine mixtures with pneumatic actuator - D386S
    D386S
    Tied diaphragm cylinder valve for fluorine mixtures with pneumatic actuator
  • High Pressure, oleo-pneumatic, UHP cylinder valve - D354
    D354
    Oleo-Pneumatic
    Soft seat
    4mm orifice
  • High pressure, dual port UHP cylinder valve - D340S
    D340S
    Dual Port UHP valve
    Soft seat
    4mm orifice
  • High pressure UHP cylinder valve for highly oxidizing gases – D306
    D306
    High pressure valve
    Metal / Metal sealing
    4mm orifice
  • Oleo-pneumatic UHP cylinder valve for highly oxidizing gases – D356
    D356
    Oleo-pneumatic valve
    Metal / Metal sealing
    3.5mm orifice
  • High pressure & high flow UHP cylinder valve – D339S
    D339S
    High pressure manual valve
    Soft seat
    6mm orifice
  • High pressure UHP cylinder valve with Oleo-pneumatic actuator - D389S
    D389S
    Oleo-Pneumatic
    Soft seat
    6mm orifice
  • Dual port high pressure UHP cylinder valve - D349
    D349
    Dual Port UHP valve
    Soft seat
    6mm orifice
  • Low pressure & high flow UHP cylinder valve - D337
    D337
    Tied-diaphragm seal
    Low Pressure
    8mm orifice
  • Low pressure & high flow UHP cylinder valve with pneumatic actuator - D387
    D387
    Pneumatic actuator
    Low Pressure
    8mm orifice
  • Low pressure & high flow dual port UHP cylinder valve - D342
    D342
    Dual Port UHP valve
    Soft seat
    8mm orifice
downloads
  • Download
    Gas sampling cylinders Flyer
    Last update: Aug 05, 2024
    Available in: en
  • Download
    Complete UHP Solution
    Last update: Oct 22, 2024
    Available in: en/JA/CN
  • Download
    RX1000 Compact UHP Pressure Regulator
    Last update: Sep 12, 2024
    Available in: en/CN/JA
  • Download
    RX04F
    Last update: Sep 12, 2024
    Available in: en/CN/JA
  • Download
    RX08F
    Last update: Nov 04, 2024
    Available in: en/CN/JA
  • Download
    RX3200 UHP Pressure Regulator
    Last update: Oct 22, 2024
    Available in: en/CN
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