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THE ELECTRONICS INDUSTRY: A FAST-GROWING MARKET WITH SPECIFIC NEEDS
The electronics industry
Semiconductors evolution
  • Electronic components, integrated-circuits, chips and sensors are now used in more and more products & applications, even outside the digital world
  • Components tend to be smaller, more performant & cheaper
Techniques & process evolution
  • Strong use of specific corrosive or toxic gases requiring the highest level of tightness and security
  • The highest level of gas purity is required to avoid contamination of the process and final product
  • Requirement of the highest level of UHP gas valves & equipment reliability
downloads
  • Download
    Gas sampling cylinders Flyer
    Last update: Nov 24, 2023
    Available in: en
  • Download
    Complete UHP Solution
    Last update: Dec 04, 2023
    Available in: en/JA
  • Download
    RX1000 Compact UHP Pressure Regulator
    Last update: Feb 23, 2024
    Available in: en/JA
  • Download
    RX3200 UHP Pressure Regulator
    Last update: Feb 23, 2024
    Available in: en
  • Download
    RX3000 UHP Pressure Regulator
    Last update: Feb 23, 2024
    Available in: en/JA
  • Download
    RX4200 UHP Pressure Regulator
    Last update: Oct 11, 2023
    Available in: en
WORLD LEADING CYLINDER VALVES FOR HIGH & ULTRA HIGH PURITY GASES
WORLD LEADING CYLINDER VALVES FOR HIGH & ULTRA HIGH PURITY GASES
Highest level of safety and cleanliness
  • 100% tested
  • Specific packaging
  • Cleanroom manufactured
Ultra-high purity gas valves
  • Valves for UHP gases for electronics, chemicals and other applications
  • All purity levels from 4.0 to 9.0 and more
  • Low and high pressure valves
All Technologies to fit your application
  • Tied diaphragm or packed seal technology
  • Sealing level up to 10-11 mbarl/s
All connections and standards
  • Outlet connections for all standards & gases: DIN, CG, JIS, BS, AFNOR, UNI, NEN, NBR
  • All inlet connections
Learn More >>
FOR SEMICONDUCTOR, BIOTECH AND PHARMACEUTICAL GAS SYSTEMS, ULTRA-HIGH PURITY, LEAK INTEGRITY & RELIABILITY ARE ESSENTIAL
A FULL RANGE OF VALVES AND REGULATORS FOR UHP APPLICATIONS
UHP line valves:
  • Springless and threadless design for Minimized particle generation
  • Maximum flow capacity thanks to a minimum dead space design
  • Working pressure up to 240 bar
  • Supported temperatures from -20 to 150 Celsius degrees
  • Assembling, testing & packaging in cleanroom: Class ISO 4
  • Excellent resistance to corrosion with electropolished surface roughness as per SEMI F19 UHP Grade
  • 100% Helium leak tested
UHP line pressure regulators
  • High level of outlet pressure stability
  • Flow rates range Expanded to meet all applications
  • Pressure handling up to 240 bar
  • Supported temperatures from -20 to 65 Celsius degrees
Learn More >>
videos
The electronics industry
Ultra-high purity pressure regulators
Line regulators
  • Product
    HP & UHP regulator
    Cv 0.04, 0.09, 0.15
    Free diaphragm
  • Product
    HP & UHP regulator
    Cv 0.09, 0.15
    Free diaphragm
  • Product
    HP & UHP regulator
    Cv 0.09
    Tied diaphragm
  • Product
    HP & UHP regulator
    Cv 0.09, 0.15
    Tied diaphragm
  • Product
    HP & UHP regulator
    Cv 0.15
    Free diaphragm
  • Product
    HP & UHP regulator
    Cv 0.09, 0.15
    Tied diaphragm
  • Product
    HP & UHP regulator
    Cv 0.09
    Tied diaphragm
  • Product
    HP & UHP regulator
    Cv 0.15, 0.25, 0.5, 0.9, 1.1
    Free diaphragm
  • Product
    HP & UHP regulator
    Cv 0.5
    Tied diaphragm
  • Product
    HP & UHP regulator
    Cv 0.15, 0.25, 0.5, 0.9, 1.1
    Tied diaphragm
Ultra-high purity line valves
Diaphragm seal
  • Product
    HP & UHP line valve
    Flow capacity 0.2
    Springless diaphragm
  • Product
    HP & UHP line valve
    Flow capacity 0.5
    Springless diaphragm
  • Product
    HP & UHP line valve
    Flow capacity 0.2
    Forged body
  • Product
    HP & UHP line valve
    Flow capacity 0.5
    Forged body
  • Product
    HP & UHP line valve
    Flow capacity 1.75
    Springless diaphragm
  • Product
    HP & UHP line valve
    Flow capacity 3.5
    Springless diaphragm
Tied diaphragm seal
  • Product
    Manual line valve
    Soft Seat
    4mm orifice
  • Product
    Oleo-pneumatic line valve
    Soft Seat
    4mm orifice
  • Product
    Pneumatic line valve
    Soft knife edge Seat
    4mm orifice
  • Product
    Manual line valve
    Soft Seat
    6mm orifice
  • Product
    Oleo-pneumatic line valve
    Soft Seat
    6mm orifice
Bellows valves
  • Product
    Bellows valve
    Low or high pressure
    -40°C to + 120°C (ambient)
  • Product
    Bellows valve
    High pressure
    -40°C to + 120°C (ambient)
  • Product
    Bellows valve
    High pressure
    -196 °C to + 250°C (cryogenic)
  • Product
    Bellows valve
    High pressure
    -40°C to + 120°C (ambient)
  • Product
    Bellows valve
    Low pressure
    -196 °C to + 250°C (cryogenic)
Check valves
  • Product
    Check valves
    Low to high pressure
    -196°C to +250°C (cryogenic)
Ultra-high purity fittings & connections
Cylinder connectors
Metal-to-metal face seal fittings
Weld fittings
  • Product
  • Product
    Automatic Buttweld Reducing Union without Shoulder
  • Product
    Automatic Buttweld Elbow without Shoulder
  • Product
    Automatic Buttweld Reducing Elbow without Shoulder
  • Product
    Automatic Buttweld Tee without Shoulder
  • Product
    Automatic Buttweld Reducing Tee without Shoulder
  • Product
    Automatic Buttweld Cross without Shoulder
High-flow fittings
  • Product
    Female Nut for High Flow Applications
  • Product
    Male Nut for High Flow Applications
  • Product
    Short Male Gland for High Flow Applications
  • Product
    Automatic Buttweld Body for High Flow Applications
  • Product
    Automatic Buttweld Body for High Flow Applications
  • Product
    Buttweld Bulkhead Union for High Flow Applications
Ultra-high purity gas cylinder valves
Tied diaphragm seal
  • Product
    High pressure
    Soft seat
    4mm orifice
  • Product
    High pressure Pneumatic valve
    Soft seat
    4mm orifice
  • Product
    Tied diaphragm cylinder valve for fluorine mixtures with pneumatic actuator
  • Product
    Oleo-Pneumatic
    Soft seat
    4mm orifice
  • Product
    Dual Port UHP valve
    Soft seat
    4mm orifice
  • Product
    High pressure valve
    Metal / Metal sealing
    4mm orifice
  • Product
    Oleo-pneumatic valve
    Metal / Metal sealing
    3.5mm orifice
  • Product
    High pressure manual valve
    Soft seat
    6mm orifice
  • Product
    Oleo-Pneumatic
    Soft seat
    6mm orifice
  • Product
    Dual Port UHP valve
    Soft seat
    6mm orifice
  • Product
    Tied-diaphragm seal
    Low Pressure
    8mm orifice
  • Product
    Pneumatic actuator
    Low Pressure
    8mm orifice
  • Product
    Dual Port UHP valve
    Soft seat
    8mm orifice
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