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THE ELECTRONICS INDUSTRY: A FAST-GROWING MARKET WITH SPECIFIC NEEDS

The electronics industry: a fast-growing market with specific needs

Electronic components, integrated circuits, chips and sensors are used in a growing number of products and applications, even outside the digital world.
  • Semiconductors are omnipresent in our lives, in applications such as electronics, telecommunications, automobiles, etc. The manufacture of these semiconductors requires the use of ultra-high purity gases to avoid any form of contamination and damage to the final product.
  • The photovoltaic industry is an essential element in the fight against global warming by producing renewable energy. The manufacture of photovoltaic cells requires the use of multiple specific gases.

Highly demanding and precise industry

Over the past few years, the electronics industry has seen considerable advances and a growing demand for innovative products. Components need to be smaller and more performant every year, requiring every actors of the industry to ensure the highest level of purity over the whole manufacturing process.
  • The electronics industry makes intensive use of specific corrosive or toxic gases, requiring the highest levels of tightness and safety.
  • All manufacturing processes require the highest level of gas purity to avoid contamination of the process and the final product.
  • High levels of reliability are required for valves and other UHP gas equipment.
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WORLD LEADING CYLINDER VALVES FOR HIGH & ULTRA HIGH PURITY GASES

WORLD LEADING CYLINDER VALVES FOR HIGH & ULTRA HIGH PURITY GASES
Highest level of safety and cleanliness
  • 100% tested
  • Specific packaging
  • Cleanroom manufactured
Ultra-high purity gas valves
  • Valves for UHP gases for electronics, chemicals and other applications
  • All purity levels from 4.0 to 9.0 and more
  • Low and high pressure valves
All Technologies to fit your application
  • Tied diaphragm or packed seal technology
  • Sealing level up to 10-11 mbarl/s
All connections and standards
  • Outlet connections for all standards & gases: DIN, CG, JIS, BS, AFNOR, UNI, NEN, NBR
  • All inlet connections
Learn More

FOR SEMICONDUCTOR, BIOTECH AND PHARMACEUTICAL GAS SYSTEMS, ULTRA-HIGH PURITY, LEAK INTEGRITY & RELIABILITY ARE ESSENTIAL

A FULL RANGE OF VALVES AND REGULATORS FOR UHP APPLICATIONS
UHP line valves:
  • Springless and threadless design for Minimized particle generation
  • Maximum flow capacity thanks to a minimum dead space design
  • Working pressure up to 240 bar
  • Supported temperatures from -20 to 150 Celsius degrees
  • Assembling, testing & packaging in cleanroom: Class ISO 4
  • Excellent resistance to corrosion with electropolished surface roughness as per SEMI F19 UHP Grade
  • 100% Helium leak tested
UHP line pressure regulators
  • High level of outlet pressure stability
  • Flow rates range Expanded to meet all applications
  • Pressure handling up to 240 bar
  • Supported temperatures from -20 to 65 Celsius degrees
Learn More

The electronics industry

Ultra-high purity pressure regulators

Line regulators

  • Compact single-stage diaphragm pressure regulator for HP & UHP gases - RX1000
    HP & UHP regulator
    Cv 0.09, 0.15
    Free diaphragm
  • Single-stage diaphragm pressure regulator for HP & UHP gases - RX3000
    Single stage diaphragm
    Cv 0.09, 0.15
    Inlet 21/240 bar
  • Sub-atmospheric pressure regulator for HP & UHP gases - RX3100
    Sub-atmospheric
    Cv 0.09
    Inlet 21 bar
  • Single-stage tied-diaphragm pressure regulator for HP & UHP gases - RX3200
    Single stage tied-diaphragm
    Cv 0.09, 0.15
    Inlet 21/240 bar
  • Diaphragm loaded high pressure regulator for HP & UHP gases - RX3600
    High pressure diaphragm
    Cv 0.15
    Inlet 240/310 bar
  • Piston loaded high pressure regulator for HP & UHP gases - RX3700
    High pressure piston
    Cv 0.09, 0.15
    Inlet 310 bar
  • Dual stage pressure regulator for HP & UHP gases - RX3900
    Dual stage regulator
    Cv 0.09
    Inlet 240/310 bar
  • Single-stage diaphragm pressure regulator for HP & UHP gases - RX4000
    Single stage diaphragm
    Cv 0.15, 0.25, 0.5, 0.9, 1.1
    Inlet 21/117/207/240 bar
  • Sub-atmospheric pressure regulator for HP & UHP gases - RX4100
    Sub-atmospheric regulator
    Cv 0.5
    Inlet 21 bar
  • Single-stage tied-diaphragm pressure regulator for HP & UHP gases - RX4200
    Single stage tied-diaphragm
    Cv 0.15, 0.25, 0.5, 0.9, 1.1
    Inlet 21/117/207/240 bar

Ultra-high purity line valves

Diaphragm seal

  • Diaphragm high and low pressure line valve for HP & UHP gases - RX04
    HP & UHP line valve
    Flow capacity 0.2
    Springless diaphragm
  • Diaphragm high and low pressure line valve for HP & UHP gases - RX08
    HP & UHP line valve
    Flow capacity 0.5
    Springless diaphragm
  • Diaphragm high and low pressure line valve for HP & UHP gases - RX04F
    HP & UHP line valve
    Flow capacity 0.2
    Forged body
  • Diaphragm high and low pressure line valve for HP & UHP gases - RX08F
    HP & UHP line valve
    Flow capacity 0.5
    Forged body
  • Diaphragm low pressure line valve for HP & UHP gases - M12
    HP & UHP line valve
    Flow capacity 1.75
    Springless diaphragm
  • Diaphragm low pressure line valve for HP & UHP gases - M20
    HP & UHP line valve
    Flow capacity 3.5
    Springless diaphragm

Tied diaphragm seal

  • High Pressure manual line valve for UHP gases – D604
    Manual line valve
    Soft Seat
    4mm orifice
  • High Pressure line valve for UHP gases with oleo-pneumatic actuator – D654
    Oleo-pneumatic line valve
    Soft Seat
    4mm orifice
  • High Pressure line valve for UHP gases with pneumatic actuator – D688
    Pneumatic line valve
    Soft knife edge Seat
    4mm orifice
  • High Pressure manual line valve for UHP gases – D639S
    Manual line valve
    Soft Seat
    6mm orifice
  • High Pressure line valve for UHP gases with oleo-pneumatic actuator – D689S
    Oleo-pneumatic line valve
    Soft Seat
    6mm orifice

Bellows valves

  • Bellows low to high pressure valve for HP, UHP, corrosive gases and fluids – K300
    Bellows valve
    Low or high pressure
    -40°C to + 120°C (ambient)
  • Bellows high pressure valve for HP, UHP, corrosive gases and fluids – HP2000
    Bellows valve
    High pressure
    -40°C to + 120°C (ambient)
  • Bellows high pressure valve for HP, UHP, cryogenic gases and fluids –  HP9000
    Bellows valve
    High pressure
    -196 °C to + 250°C (cryogenic)
  • Bellows high pressure valve for HP, UHP, corrosive gases and fluids – HP3000
    Bellows valve
    High pressure
    -40°C to + 120°C (ambient)
  • Bellows low pressure valve for HP, UHP, cryogenic gases and fluids –  SUPRA
    Bellows valve
    Low pressure
    -270°C to + 80°C (cryogenic)

Check valves

  • Spring type check valve for HP, UHP, cryogenic gases and fluids – CAR(S)
    Check valves
    Low to high pressure
    -196°C to +250°C (cryogenic)

Ultra-high purity fittings & connections

Cylinder connectors

Metal-to-metal face seal fittings

Weld fittings

  • UHP Fitting EB-ABW
  • UHP Fitting Automatic Buttweld Reducing Union Without Shoulder - RU-ABW
    Automatic Buttweld Reducing Union without Shoulder
  • UHP Fitting Automatic Buttweld Elbow Without Shoulder - E-ABW
    Automatic Buttweld Elbow without Shoulder
  • UHP Fitting Automatic Buttweld Reducing Elbow Without Shoulder - RE-ABW
    Automatic Buttweld Reducing Elbow without Shoulder
  • UHP Fitting Automatic Buttweld Tee Without Shoulder - T-ABW
    Automatic Buttweld Tee without Shoulder
  • UHP Fitting Automatic Buttweld Reducing Tee Without Shoulder - RT-ABW
    Automatic Buttweld Reducing Tee without Shoulder
  • UHP Fitting Automatic Buttweld Cross Without Shoulder - C-ABW
    Automatic Buttweld Cross without Shoulder

High-flow fittings

  • UHP Fitting Female Nut for High Flow Applications - FN-HF
    Female Nut for High Flow Applications
  • UHP Fitting Male Nut for High Flow Applications - MN-HF
    Male Nut for High Flow Applications
  • UHP Fitting Short Male Gland for High Flow Applications - EM-HF
    Short Male Gland for High Flow Applications
  • UHP Fittings Automatic Buttweld Body for High Flow Applications - UM-ABW HF
    Automatic Buttweld Body for High Flow Applications
  • UHP Fitting Automatic Buttweld Body for High Flow Applications - UM-AB HF
    Automatic Buttweld Body for High Flow Applications
  • UHP Fittings Buttweld Bulkhead Union for High Flow Applications - BU-HF
    Buttweld Bulkhead Union for High Flow Applications

Ultra-high purity gas cylinder valves

Tied diaphragm seal

  • High pressure UHP cylinder valve – D304
    High pressure
    Soft seat
    4mm orifice
  • High pressure pneumatic UHP cylinder valve - D385S
    High pressure Pneumatic valve
    Soft seat
    4mm orifice
  • Tied diaphragm cylinder valve for fluorine mixtures with pneumatic actuator - D386S
    Tied diaphragm cylinder valve for fluorine mixtures with pneumatic actuator
  • High Pressure, oleo-pneumatic, UHP cylinder valve - D354
    Oleo-Pneumatic
    Soft seat
    4mm orifice
  • High pressure, dual port UHP cylinder valve - D340S
    Dual Port UHP valve
    Soft seat
    4mm orifice
  • High pressure UHP cylinder valve for highly oxidizing gases – D306
    High pressure valve
    Metal / Metal sealing
    4mm orifice
  • Oleo-pneumatic UHP cylinder valve for highly oxidizing gases – D356
    Oleo-pneumatic valve
    Metal / Metal sealing
    3.5mm orifice
  • High pressure & high flow UHP cylinder valve – D339S
    High pressure manual valve
    Soft seat
    6mm orifice
  • High pressure UHP cylinder valve with Oleo-pneumatic actuator - D389S
    Oleo-Pneumatic
    Soft seat
    6mm orifice
  • Dual port high pressure UHP cylinder valve - D349
    Dual Port UHP valve
    Soft seat
    6mm orifice
  • Low pressure & high flow UHP cylinder valve - D337
    Tied-diaphragm seal
    Low Pressure
    8mm orifice
  • Low pressure & high flow UHP cylinder valve with pneumatic actuator - D387
    Pneumatic actuator
    Low Pressure
    8mm orifice
  • Low pressure & high flow dual port UHP cylinder valve - D342
    Dual Port UHP valve
    Soft seat
    8mm orifice

Canisters Precursors Bubblers

Vacuum generators

  • High Performance Vacuum Generator Block Type System - RXVGB
    60torr Vacuum
    Without Check Valve
    Block type
  • High Performance Vacuum Generator Module Type System - RXVGM
    100torr Vacuum
    With Check Valve
    Module type
downloads
  • Download
    Gas sampling cylinders Flyer
    Last update: Aug 05, 2024
    Available in: en
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    Vacuum Generator Block Type
    Last update: Feb 27, 2025
    Available in: en
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    Vacuum Generator Module Type
    Last update: Feb 27, 2025
    Available in: en
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    Complete UHP Solution
    Last update: Dec 09, 2024
    Available in: en/JA/CN
  • Download
    SUPRA
    Last update: Jan 29, 2025
    Available in: en
  • Download
    HP2000
    Last update: Jan 29, 2025
    Available in: en
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