Print
Diaphragm low pressure line valve for HP & UHP gases - M12
Equipment for gas systems > Ultra high purity gas equipment > Springless diaphragm line valves
Key advantages
  • 100% Helium Leak Test performed
  • Available in sizes 1/2" to 3/4" to support a wide range of connections
  • Assembling, testing & Packaging in cleanroom: Class ISO 4
  • Individual serial number for full traceability
  • Electropolished surface roughness per SEMI F19 UHP Grade
  • 316L VAR® stainless steel double melt per SEMI F20 option available
  • Excellent purgeability due to optional purge ports
  • Fluid specific seat material as standard options
  • Replaceable seat

CONSTRUCTION MATERIAL

  Parts Material
Wetted parts Body SS 316L, VAR
Seat PCTFE, PVDF, VESPEL®
Diaphragm Phynox®
Non-wetted parts Backup diaphragm Phynox® 
Handwheel Aluminium
Actuator Body Aluminium
Others Stainless Steel and Alloys

SURFACE FINISH

S V U
Ra 0.4 μm (15 μin) Ra 0.25 μm EP (10 μin) Ra 0.13 μm EP (5 μin)  

TEMPERATURE RANGE

Seat (Actuation type) Temperature Range
PCTFE / PVDF (manual & pneumatic(1)) -40°C to +65°C (-40°F to +149°F)
Vespel® (manual & pneumatic(1)) -40°C to +150°C (-40°F to +302°F)

(1) -20°C pneumatic versions

VALVE VERSION / MAX. WORKING PRESSURE

Valve Max. working pressure
M12 (MT) Multiturn handwheel 15 bar
M12 (PP2) Pneumatically actuated(2) 15 bar

(2) -20°C pneumatic versions

MANUAL ACTUATION

Parts for all valve grades
Upper spindle Brass
Handle Aluminium
All others  Stainless Steel or Alloys

PNEUMATIC ACTUATION

Parts
Actuator Body Aluminium 
Piston Brass / Aluminium / Stainless Steel
O-ring NBR
All others Stainless Steel or Alloys

All specifications subject to change without notice.

Specifications
Max. working pressureSee table above
Pneumatic actuator opening pressure5 to 7 bar
Temperature rangeSee table above
Flow capacity (cv)1.75
Nominal seat diameter12 Mm
Wetted volume< 7 cm3
Burst pressure> 700 bar
Certified max. helium outboard leak rate≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)≤ 1 x 10-9 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)≤ 1 x 10-9 mbar.l/s
Dimensional drawings
Product Configurator
 
Surface finish
Actuation
Porting configuration
Body material
Seat material
End connection
Options
M12
S
MT
2V1
I
K
V 1/2 F
CI
 
(1) On demand
(2) Add NO for normally open or NC for normally closed
(3) Only for pneumatic actuators
Downloadable catalogs, brochures
  • Ultra High Purity valves and pressure regulators
    Last update: May 17, 2021
    Available in: en/fr/cn
Connect with an Expert
×

This site uses cookies.

Rotarex uses cookies to ensure a better and easier online experience. Please click here to accept the continued use of these cookies after reading our revised COOKIES POLICY.

Please note, you may continue to use the website even if you do not accept the use of cookies. However, the visitor experience on subsequent visits will be diminished.

Read the full COOKIES POLICY.