Diaphragm low pressure line valve for HP & UHP gases - M20

Diaphragm low pressure line valve for HP & UHP gases - RX20

M20 is a diaphragm valve for HP & UHP applications. Its springless design keeps the highest level of purity of the gas. The M20 is intended for low pressure up to 15 bar. Two actuation are available for purchase : multi-turn handwheel or pneumatic actuator.

Key advantages

100% Helium Leak Test performed
Available in sizes 3/4" to 1" to support a wide range of connections
Assembling, testing & Packaging in cleanroom: Class ISO 4
Individual serial number for full traceability
Electropolished surface roughness per SEMI F19 UHP Grade
Excellent purgeability due to optional purge ports
Fluid specific seat material as standard options
Replaceable seat
UHP Material - Semi F20 option available

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Download STP File

STP File Download Configurator

CONSTRUCTION MATERIAL

	Parts	Material
Wetted parts	Body	SS 316L, UHP Material - Semi F20
	Seat	PCTFE, Polyimid
	Diaphragm	Phynox^®
Non-wetted parts	Backup diaphragm	Phynox^®
	Handwheel	Aluminium
	Actuator Body	Aluminium, Stainless Steel
	Others	Stainless Steel, Alloys and Brass

SURFACE FINISH

S	V	U
Ra 0.4 μm (15 μin)	Ra 0.25 μm EP (10 μin)	Ra 0.13 μm EP (5 μin)

TEMPERATURE RANGE

Seat (Actuation type)	Temperature Range
PCTFE (manual & pneumatic)	-20°C to +65°C (-4°F to +149°F)
Polyimid (manual & pneumatic)	-20°C to +150°C (-4°F to +302°F)

VALVE VERSION / MAX. WORKING PRESSURE

Valve	Max. working pressure
M20 (MT) Multiturn handwheel	15 bar
M20 (PP2) Pneumatically actuated	15 bar

All specifications subject to change without notice.

Specifications

Max. working pressure	See table above
Pneumatic actuator opening pressure	5 to 7 bar
Temperature range	See table above
Flow capacity (cv)	3.5
Nominal seat diameter	20 mm (0.79”)
Burst pressure	>700 bar (10152 psig)
Certified max. helium across the seat leak rate (at max. pressure)	≤ 1 x 10^-9 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)	≤ 1 x 10^-9 mbar.l/s
Certified max. helium outboard leak rate	≤ 1 x 10^-9 mbar.l/s

Dimensional drawings

Download STP File

Product Configurator

	Surface finish	Actuation	Porting configuration	Body material	Seat material	End connection	Options
M20	S	MT	2W1	I	K	V 3/4 F	CI
	Ra 0.4 μm (15 μin Ra) S Ra 0.25 μm EP (10 μin) V Ra 0.13 μm EP (5 μin)(2) U	Multi-Turn Handwheel (15 bar) MT Pneumatically actuated (15 bar)* PP2*	2 ports in line 2W1 2 Ports in line, upstream purge port - left side 2 WPEG 2 Ports in line, downstream purge port - left side 2 WPSG 2 Ports in line, 2 purge ports up-/ downstream left side 2 W1p2	SS 316L I Hastelloy®** H UHP Material - Semi F20 A	PCTFE (Kel-F®) K Polyimid V	Metal face seal 3/4” - Femal V 3/4 F Metal face seal 3/4” - Male V3/4M BWO 3/4” (Butt Orbital Weld) B 3/4 BWO 1” (Butt Orbital Weld) B1 Metal face seal 1”- Male V1M Metal face seal 1'' - Female V1F Compression tube fittings RDB3/4 Compression tube fittings RDB1"	Electric limit switch*** CI