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Diaphragm high and low pressure line valve for HP & UHP gases - RX04

Specialty gas systems > Ultra high purity gas equipment > Springless diaphragm line valves

Open-close indicator handwheel (closed position) - RX04

Open-close indicator handwheel (open position) - RX04

LOTO (Lock Out Tag Out) option and hasp - RX04

RX04 is a diaphragm valve for HP & UHP applications. Its springless design keeps the highest level of purity of the gas. The RX04 valve exists in low, medium or high pressure versions. Different actuation are available for purchase : multi-turn or quarter-turn handwheel, and pneumatic actuator. The multi-turn version is delivered with an open-close indicator handwheel. It can be mounted on a panel.

Key advantages

100% Helium Leak Test performed
Assembling, testing & Packaging in cleanroom: Class ISO 4
Reverse seat design for high life cycle
Individual serial number for full traceability
Electropolished surface roughness per SEMI F19 UHP Grade
Fluid specific seat material as standard options
Low internal volume
Constant bleed option available
316L VAR® stainless steel double melt per SEMI F20 option available
Additional Multi-port options
270° multiturn handwheel with open/close indicator

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Download datasheet

Also available with LOTO device

CONSTRUCTION MATERIAL

	Parts	Material
Wetted parts	Body	SS 316L,VAR
	Seat	PCTFE, PVDF, VESPEL®
	Diaphragm	Phynox®
Non-wetted parts	Backup diaphragm	Phynox®
	Handwheel	Aluminium (QT) or Plastic (MT)
	Actuator Body	SS 316L or Aluminium
	Others	Stainless Steel and Alloys

SURFACE FINISH

S	V
Ra 0.4 μm (15 μin)	Ra 0.25 μm EP (10 μin)

TEMPERATURE RANGE

Seat (Actuation type)	Temperature Range
PCTFE / PVDF (manual & pneumatic*)	-40°C to +65°C (-40°F to +149°F)
Vespel® (manual & pneumatic*)	-40°C to +150°C (-40°F to +302°F)

VALVE VERSION / MAX. WORKING PRESSURE

Valve	Max. working pressure
RX04 (LM) Multiturn handwheel(1)(2)	20 bar
RX04 (HM) Multiturn handwheel(1)(2)	240 bar
RX04 (LQ) Quarter turn handwheel(1)	20 bar
RX04 (HQ) Quarter turn handwheel(1)	240 bar
RX04 (BP) Pneumatically actuated	10 bar
RX04 (LP) Pneumatically actuated	20 bar
RX04 (HP) Pneumatically actuated	240 bar

(1) FT (Panel Mounting) option available

(2) MSF LOTO option available

MANUAL ACTUATION

Parts for all valve grades
Upper spindle	Brass
Handle	Aluminium (QT) or Plastic (MT)
All others	Stainless Stee

PNEUMATIC ACTUATION

Parts
Actuator Body	Aluminium / Stainless Steel
Piston	Brass / Aluminium / Stainless Steel
O-ring	NBR
All others	Stainless Steel

All specifications subject to change without notice.

Specifications

Max. working pressure	See table above
Pneumatic actuator opening pressure	5 to 7 bar
Temperature range	See table above
Flow capacity (cv)	0,2
Nominal seat diameter	4 Mm
Wetted volume	< 1.2 cm3
Burst pressure	> 700 bar
Certified max. helium outboard leak rate	≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)	≤ 1 x 10-9 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)	≤ 1 x 10-9 mbar.l/s

Dimensional drawings

Product Configurator

	Surface finish	Actuation	Port configuration	Body material	Seat material	End connection	Options
RX04	S	LM	2W1	-	K	V 1/4 F	FT
	Ra 0.4 μm (15 μin) S Ra 0.25 μm EP (10 μin) V	Multi-Turn Handwhel (20bar) LM rn Handwheel (240bar) HM Multi-TuPneumatically actuated (10bar) BP(1) Pneumatically actuated (20bar) LP(1) Pneumatically actuated (240bar) HP(1) Quarter-Turn Handwheel (20bar) LQ Quarter-Turn Handwheel (240 bar) HQ	2 ports configuration 1 2W1 2 ports configuration 2 2W2 3 ports configuration 4 3W4 3 ports configuration 5 3W5 3 ports configuration 6 3W6 3 ports configuration 8 3W8 3 ports configuration 9 3W9 4 ports configuration 10 4W10 4 ports configuration 11 4W11	SS 316L - VAR(3) A Monel(3) M Hastelloy®(3) H	PCTFE (Kel-F®) K PI (Vespel®) V PVDF P	Metal face seal 1/4” - Female V 1/4 F Metal face seal 1/4” - Male V 1/4 M BWO 1/4” B 1/4 BWO 6 mm B6 Compression tube fittings RDB 1/4 Compression tube fittings RDB 6	Panel Mounting FT Electric limit switch(4) CI LOTO MSF Constant bleed FPT

I am interested

(1) Add NO for normally open or NC for normally closed
(2) See dimensional drawings nr. 3
(3) On demand
(4) On HP and LP actuators only

Downloadable catalogs, brochures

LOTO Locking Mechanism for UHP Line Valves

Last update: Jan 25, 2023
Available in: en
RX04

Last update: Mar 24, 2023
Available in: en