Stainless Steel Canisters: a Critical Asset for High-Purity Semiconductor Processes

In semiconductor manufacturing, process stability, purity, and safety are non-negotiable. From R&D labs to high-volume fabs, the handling and delivery of ultra-high-purity (UHP) precursors play a decisive role in final device performance. This is where stainless steel canisters become a critical element of the gas and chemical delivery chain.

Designed to complement the Rotarex portfolio for high and ultra-high purity gases, our stainless steel canisters are engineered to safely store, transport, and deliver metalorganic precursors, dopants, and specialty chemicals for the most demanding applications. Sampling, product, and storage canisters can be fully customized in terms of capacity, port configuration (up to four ports), deep tube and N₂ options, wall thickness (1 to 6 mm), and required certifications or specific testing protocols.

Discover our full range of UHP canisters or contact us to discuss your application and requirements.

What are UHP Stainless Steel Canisters?

A stainless steel canister is a chemically inert pressure vessel designed to store and transport ultra-high-purity gases or liquids. It ensures clean, stable delivery while preserving chemical integrity in semiconductor gas and chemical supply applications.

Used extensively in semiconductor production, canisters are essential equipment that include features required to support advanced process control and reliable operation at the tool level, and are used for:

Storing sensitive metalorganic precursors
Delivering controlled vapor flows to deposition tools
Providing precise material supply for thin-film layer formation
Maintaining purity throughout CVD (Chemical Vapor Deposition), ALD (atomic layer deposition), and MOCVD (Metal-Organic Chemical Vapor Deposition) processes

Thanks to their stainless-steel construction and electropolished internal surfaces, canisters minimize contamination, corrosion and support clean operation across the semiconductor fabrication environment.

Where Are Canisters Used?

While semiconductor manufacturing is the primary application, stainless steel canisters are also used across multiple high-purity environments, supporting wafer processing, material stability, and safe chemical distribution throughout the value chain and up to the process tools level.

Semiconductor fabrication: gas canister solutions for precursor storage and delivery for wafer processing, etching, and cleaning chemicals
Pharmaceutical industry: sterile and contamination material free storage
Research & laboratories: calibration gases and controlled chemical reactions
Industrial applications: cryogenic and specialty gases
Medical gas systems, aerospace, automotive, food & beverage, and environmental monitoring

In the semiconductor ecosystem, canisters are typically owned and operated by advanced chemical producers and distributors, supporting both R&D and high-volume production.

How Do Stainless Steel Canisters Work?

In deposition processes, liquid or solid precursors are vaporized and transported into the process chamber, sometimes with the help of a carrier gas (such as N₂, Ar₂ H₂, or He).

Depending on the process and precursor properties, different configurations are used:

Bubbler-type canisters: a carrier gas bubbles through the liquid precursor and becomes saturated with vapor before entering the process tool.
Vaporization-Flow-Through (VFT) canisters: vapor is generated by controlled surface evaporation as the carrier gas flows over the liquid.
Direct Liquid Injection (DLI) canisters: the liquid precursor is precisely injected into a heated vaporizer for rapid and controlled vapor formation.

Purging before, during, and after deposition cycles ensures removal of contaminants and by-products, maintaining process repeatability and safety.

Why Canisters Are Essential in Semiconductor Processes?

In semiconductor manufacturing, canisters are not simple containers, they are process-critical equipment that directly impact wafer quality, material stability, and process repeatability throughout wafer processing and process development. From precursor storage to final distribution at the tool level, canisters play a central role in ensuring secure, consistent, and contamination-free delivery of high-purity materials and process fluids.

Ultra-high purity & chemical resistance

Electropolished stainless steel surfaces preserve material integrity, prevent contamination, and provide excellent corrosion resistance to protect sensitive precursors used in wafer processing.

Stable gas delivery

Canisters minimize adsorption and concentration drift, ensuring precise and repeatable vapor flow throughout CVD, ALD, and MOCVD processes.

Thermal compatibility

Designed for heated operation, canisters enable controlled vaporization of liquid and solid precursors without compromising safety or material performance.

Safety & leak prevention

Robust mechanical design and certified leak tightness support secure precursor distribution from bulk storage to point-of-use tools while helping maintain safe operating conditions across the fab.

Reusability & cost efficiency

Reusable stainless steel canisters are cleanable, refillable, and engineered for long service life, reducing total cost of ownership by minimizing replacement frequency and helping maintain stable fabrication operations.

Compliance with industry standards

Certified designs, leak-tested assemblies, and refillable architectures reduce operational risk while supporting long-term cost efficiency in high volume semiconductor industry.

A Complete Range for Every Production Scale

Rotarex offers a comprehensive portfolio of stainless steel canisters, covering the full spectrum from laboratory testing to high-volume manufacturing.

Small Canisters - RX507L (50 cc to 7 L)

Designed for sampling, precursor validation, and R&D applications, RX507L canisters are ideal for laboratories and pilot setups.

Key features:

Capacity: 50 cc to 7 L
SS 316L body with electropolished internal surface for enhanced durability
Excellent helium leak tightness (< 1×10^-9 mbar·l/s)
Compact design for easy integration

Ideal for small-scale testing and impurity analysis.

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Medium Canisters – RX171L (17 L to 100 L)

RX171L canisters support pilot production and medium-volume semiconductor processes, providing extended precursor supply and stable delivery.

Key features:

Capacity: 17 L to 100 L
Dual-valve configurations available
Designed for automated and precision flow control
Certified for UHP gases applications

Perfect for advanced research fabs and specialty gas systems.

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Medium Canisters – RX171L (17 L to 100 L)

Large Canisters – RX200B (200 L to 3000 L)

For high-volume semiconductor production, RX200B canisters ensure long-term precursor availability and uninterrupted processing.

Key features:

Capacity: 200 L up to 3000 L on request
Thick-wall construction for enhanced safety
Multiple valve options for complex process integration
Designed for continuous CVD, ALD, and MOCVD production

The solution of choice for high-throughput semiconductor fabs.

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Designed for Safety, Purity, and Customization

All Rotarex stainless steel canisters are:

Manufactured from SS 316L with electropolished internal surfaces
Individually traceable with serial numbers
Tested for tightness and pressure integrity
Available with customized port configurations, valve types, and options

This flexibility ensures full compatibility with customer-specific precursor properties and process requirements.

From small laboratory canisters to large-scale production vessels, Rotarex supports semiconductor manufacturers and chemical suppliers with reliable, certified, and application-driven canister solutions.