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Ultra High Purity fittings

Ultra high purity fittings are metal face seal and weld connection components designed for gas distribution systems where leak integrity and contamination control are critical. Rotarex UHP fittings are manufactured from 316L stainless steel and assembled in a fully integrated cleanroom process. 
Rotarex products meet the cleanliness standards required in semiconductor manufacturing, pharmaceutical production, and other contamination-sensitive applications.



The importance of UHP fittings

  • Corrosion-resistant material (316L stainless steel)
  • Reliable connection with no risk of leakage to maintain the highest level of purity
  • Compliance with strict sealing standards to guarantee reliability
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PRODUCT FEATURES

ISO 9001 Certification N°:DE-062832 Q1

Fully traceability at all steps (SPC CAQS)

Fully integrated processing: machining, electropolishing, decontamination, packaging, orbital welding

Continuous monitoring of key process parameters

Rotarex UHP fittings have been helium leak tested to a rate of 10^ –10 std cm3/sec.

Characteristics

Products Material Specifications


Gasket


Nickel: ASTM B-162


316L Stainless steel: ASTM A-167


Nuts


316L Stainless steel: ASME SA-479, ASTM A-276


Glands, Bodies


316L Stainless steel low sulfur


Barstock: ASME SA-479, ASTM A-276


Forgings: ASTM A-182

Ultra high purity fittings

Metal gasket face seal fittings

High flow fittings

  • Female Nut for High Flow Applications
  • Male Nut for High Flow Applications
  • Short Male Gland for High Flow Applications
  • Automatic Buttweld Body for High Flow Applications
  • Automatic Buttweld Body for High Flow Applications
  • Buttweld Bulkhead Union for High Flow Applications

Weld fittings

  • Automatic Buttweld Reducing Union without Shoulder
  • Automatic Buttweld Elbow without Shoulder
  • Automatic Buttweld Reducing Elbow without Shoulder
  • Automatic Buttweld Tee without Shoulder
  • Automatic Buttweld Reducing Tee without Shoulder
  • Automatic Buttweld Cross without Shoulder

Ultra high purity fittings

Ultra high purity fittings are precision-engineered connection components used in high-purity gas distribution systems to join tubing, valves, regulators, and other equipment without introducing contamination into the gas stream. Unlike standard industrial fittings, UHP fittings rely on metal-to-metal sealing technologies, such as metal gasket face seals or orbital weld connections, eliminating the need for elastomer seals that can outgas, degrade, or generate particles. The metal gasket face seal principle uses a deformable nickel or 316L stainless steel gasket compressed between precision-machined sealing faces, ensuring exceptional leak-tightness and long-term integrity across a wide range of pressures and temperatures, from high vacuum to high-pressure gas service.

These fittings are specified wherever system integrity, gas purity, and process reliability are critical to performance and yield. They are widely used in semiconductor manufacturing for process tool connections in CVD, ALD, diffusion, oxidation, etching, and lithography; in specialty gas systems such as gas cabinets, distribution panels, and valve manifold boxes; in pharmaceutical production environments supporting API and sterile processes; in analytical and instrumentation systems requiring contamination-free gas supply; and in inert or reactive gas distribution networks handling gases such as nitrogen, argon, helium, hydrogen, and other high-purity specialty gases.

Ultra high purity fittings
Materials and Construction Standards

Materials and Construction Standards

The contamination performance of ultra high purity fittings depends directly on material selection, surface finish, and manufacturing environment. Rotarex UHP fittings are built to the following specifications:

  • 316L stainless steel: low-sulfur barstock (ASME SA-479, ASTM A-276) and forgings (ASTM A-182) for glands and bodies
  • Gaskets: ASTM B-162 nickel or ASTM A-167 316L stainless steel; deformable to form a gas-tight metal-to-metal seal
  • Nuts: 316L stainless steel per ASME SA-479 and ASTM A-276
  • Surface finish: electropolished internal and external surfaces for reduced particle retention, outgassing, and adsorption sites
  • Cleanroom processing: full assembly, testing, and packaging in controlled cleanroom conditions to maintain surface integrity

Benefits of Ultra High Purity Fittings

The design and manufacturing standards of Rotarex UHP fittings deliver measurable performance advantages in contamination-critical gas systems:

  • Leak-free performance: helium leak tested to 10-10 std cm3/sec, the most stringent leak integrity standard for UHP gas connections
  • Prevent Contamination: metal-to-metal face seal and weld connections prevent gas path contamination at every connection point
  • Chemical and corrosion resistance: 316L stainless steel with corrosion-resistant surface treatment resists chemical attack in reactive and corrosive specialty gas service
  • Cleanliness standards: full manufacturing traceability supports cleanroom qualification, process audits, and industry standards compliance
  • Maintaining system integrity: face seal connections maintain seal integrity through repeated assembly and disassembly cycles, reducing maintenance costs and downtime
Benefits of Ultra High Purity Fittings

Related UHP Rotarex Products

To ensure complete system integrity and maintain ultra-high purity throughout your gas delivery system, UHP pressure regulators are typically used in combination with other high-performance components. Explore our full range of compatible UHP solutions:

UHP Valves

UHP valves are designed to provide precise flow control and absolute shut-off performance in ultra-clean gas systems. Whether used for isolation, control, or distribution, they play a key role in maintaining system integrity across complex gas networks.

UHP Regulators

Our comprehensive range of UHP regulators ensures accurate and stable pressure control throughout the entire gas distribution system. Each regulator is engineered to deliver exceptional pressure stability, low internal volume, and minimal particle generation, even under continuous operation.

UHP Connectors

UHP connectors provide flexible and reliable connection solutions for complex gas distribution systems, enabling safe and efficient gas transfer between modules or subsystems. They are particularly valuable in environments requiring frequent connection and disconnection without compromising purity.

UHP Bellows Valves

UHP bellows valves feature a metal-to-metal sealing design, eliminating the need for elastomers and significantly reducing the risk of contamination or permeation. This makes them particularly suited for ultra-high purity and high-cycle applications.

UHP Cylinder Valves

Installed directly on gas cylinders, UHP cylinder valves represent the first and most critical control point in the gas delivery chain. Their design is essential to preserving gas purity right from the source, preventing contamination before the gas even enters the distribution system.

Types of Ultra High Purity Fittings

Metal Gasket Face Seal Fittings

Metal gasket face seal fittings are the standard connection type for UHP gas distribution systems. Rotarex offers a complete range of configurations: male and female nuts, glands, unions, adapters, plugs, caps, bulkhead unions, and NPT/tube fitting connectors, available in both standard and mini versions.

High Flow Fittings

High flow UHP fittings are designed for applications requiring elevated gas flow rates. The range includes female and male nuts, male glands, buttweld bodies, and bulkhead unions, built to the same material and surface finish standards as the standard face seal range.

Weld Fittings

UHP weld fittings provide permanent, zero-leak connections for fixed semiconductor and specialty gas piping systems. The range covers automatic buttweld unions, reducing unions, elbows, reducing elbows, tees, reducing tees, and crosses, all designed for orbital welding to maintain internal surface cleanliness. Shoulderless designs facilitate consistent automated welding.

Types of Ultra High Purity Fittings
How to Choose Ultra High Purity Fittings

How to Choose Ultra High Purity Fittings

Selecting the correct ultra high purity fittings requires matching the fitting type, material, and configuration to the gas system requirements:

  • Connection type: face seal fittings where the connection must be broken for maintenance or cylinder changes; weld fittings for permanent installations
  • Tube size and configuration: confirm tube outer diameter and select appropriate gland, nut, and union sizes; reducing adapters available for cross-diameter connections
  • Material and gasket type: standard 316L construction suits the majority of inert and reactive specialty gas applications; nickel gaskets provide enhanced sealing for critical applications
  • Flow requirements: select high flow variants (FN-HF, MN-HF, EM-HF series) where process flow rates exceed the capacity of standard UHP fittings
  • End connections: NPT, NPTF, JIC, and tube fitting connectors available for interface with standard instrumentation and threaded pipe

Compliance & Certifications

Rotarex UHP fittings are manufactured under a certified quality management system and tested to the standards applicable to ultra high purity gas equipment:

  • ISO 9001 (No DE-062832 Q1): quality management system certification for UHP fitting design and manufacture
  • 10-10 std cm3/sec helium leak test: helium leak test standard for UHP gas fittings and connections
  • SEMI F19: electropolished surface finish specification for UHP gas wetted components
  • SPC CAQS: statistical process control and computer-aided quality system ensuring material traceability at every manufacturing step
Ultra High Purity Fittings: FAQ
What is the difference between face seal fittings and compression fittings in UHP systems?

Face seal fittings use a metal gasket compressed between precision-machined metal surfaces, with no elastomers in the gas path. Compression fittings use a ferrule deformed against the tube outer diameter, which can introduce particles and does not achieve the same leak integrity. Metal gasket face seal fittings are the standard choice wherever contamination control and cleanliness standards are critical.

Are Rotarex UHP fittings compatible with JIC and NPT connections?

Yes. Rotarex UHP fittings include connectors for NPT and NPTF threaded connections (UM-NPT, UF-NPT, UM-NPTF, UF-NPTF), tube fitting connectors (UM-DB, UF-DB), and bulkhead NPT unions (BU-NPT). These transition fittings allow UHP face seal systems to connect to standard instrumentation, threaded pipe, and compression fitting installations.

Can Rotarex UHP fittings be used with reactive and corrosive specialty gases?

Yes. The 316L stainless steel construction and metal-to-metal sealing provide the chemical resistance required for reactive and corrosive specialty gas service. For highly aggressive or pyrophoric gas applications, material compatibility should be confirmed with Rotarex prior to specification.

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