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Diaphragm high and low pressure line valve for HP & UHP gases - RX08

RX08 is a diaphragm valve for HP & UHP applications. Its springless design keeps the highest level of purity of the gas. The RX08 valve exists in different pressure versions.
Key advantages
  • 100% Helium Leak Test performed
  • Assembling, testing & Packaging in cleanroom: Class ISO 4
  • Reverse seat design for high life cycle
  • Individual serial number for full traceability
  • Electropolished surface roughness per SEMI F19 UHP Grade
  • Fluid specific seat material as standard options
  • Low internal volume
  • Additional Multi-port options
  • 270° multiturn handwheel with open/close indicator
  • Loto option
  • Pneumatic version available
  • Indicative switch option
  • UHP Material - Semi F20 option available

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Configure product

Download datasheet

Download STP File
STP File Download Configurator
Number of ports
Max. delivery pressure
End connection (1)
End connection (2)
End connection (3)
End connection (4)
Options

CONSTRUCTION MATERIAL

  Parts Material
Wetted parts Body SS 316L, UHP Material - Semi F20
Seat PCTFE, Polyimid
Diaphragm Phynox®
Non-wetted parts Backup diaphragm Phynox® 
Handwheel Aluminium (QT) or Plastic (MT)
Actuator Body SS 316L or Aluminium
Others Stainless Steel, Alloys and brass

SURFACE FINISH

S V
Ra 0.4 μm (15 μin) Ra 0.25 μm EP (10 μin)

TEMPERATURE RANGE

Seat (Actuation type) Temperature Range
PCTFE (manual & pneumatic(1)) -40°C to +65°C (-40°F to +149°F)

Polyimid (manual & pneumatic(1))

-40°C to +150°C (-40°F to +302°F)

(1) -20°C pneumatic versions

VALVE VERSION / MAX. WORKING PRESSURE

Valve Max. working pressure
RX08 (LM) Multiturn handwheel(2)(3) 20 bar
RX08 (HM) Multiturn handwheel(2)(3) 240 bar
RX08 (LQ) Quarter turn handwheel(2) 20 bar
RX08 (HQ) Quarter turn handwheel(2) 240 bar
RX08 (LP*) Pneumatically actuated 20 bar
RX08 (HP*) Pneumatically actuated(4) 240 bar

(2) FT (Panel Mounting) option available

(3) MSF LOTO option available

(4) Position indication switch available

 

All specifications subject to change without notice.

Specifications
Max. working pressureSee table above
Pneumatic actuator opening pressure5 to 7 bar
Temperature rangeSee table above
Flow capacity (cv)0.5
Nominal seat diameter8 Mm
Wetted volume< 1.6 cm3
Burst pressure> 700 bar
Certified max. helium outboard leak rate≤ 1 x 10-9 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)≤ 1 x 10-9 mbar.l/s
Dimensional drawings
DrawingDrawing
Product Configurator
 
Surface finish
Maximum delivery pressure
Porting configuration
Body material
Seat material
End connection
Options
RX08
S
LM
2W1
-
K
V 3/8 F
FT
 
Ra 0.4 μm (15 μin)
S
Ra 0.25 μm EP (10 μin)
V
Multi-Turn Handwheel (20bar)
LM
Multi-Turn Handwheel (240bar)
HM
Pneumatically actuated (20 bar)
LP*
Pneumatically actuated (240 bar)
HP*
Quarter-Turn Handwheel (20 bar)
LQ
Quarter-Turn Handwheel (240 bar)
HQ
2W1
2W1
2W2
2W2
3W4
3W4
3W5
3W5
3W6
3W6
3W8
3W8
3W9
3W9
4W10
4W10
4W11
4W11
SS 316L
-
UHP Material - Semi F20**
A
PCTFE (Kel-F®)
K
Polyimid
V
Metal face seal 3/8” - Female
V 3/8 F
Metal face seal 3/8” - Male non-Swiel
V 3/8 M
BWO 1/2”
B 1/2
BWO 3/8" mm
B 3/8
BWO 10 mm
B10
BWO 12 mm
B12
Compression tube fittings
RDB3/8
Compression tube fittings
RDB1/2
Compression tube fittings
RDB 10
Compression tube fittings
RDB 12
Panel Mounting
FT
Electric limit switch***
CI
LOTO
MSF
Constant bleed
FPT
* Add NO for normally open or NC for normally closed
** On demand
*** On HP and LP actuators only
Downloadable catalogs, brochures
  • Download
    RX08
    Last update: Sep 12, 2024
    Available in: en/CN/JA
  • Download
    Complete UHP Solution
    Last update: Sep 12, 2024
    Available in: en/JA/CN
  • Download
    LOTO Locking Mechanism for UHP Line Valves
    Last update: Aug 05, 2024
    Available in: en
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