High pressure pneumatic UHP cylinder valve - D385S

D385S valve with pneumatic actuator is designed for keeping the highest level of purity of the gas. Its tied diaphragm technology allows to avoid any particle generation. The D385S is used for UHP, corrosive, reactive and toxic gases, common in the electronic and semicondutor industry.
Key advantages
  • Reduced dead space and gas wetted volumes allow easy purging
  • Prevents seizure - Gas does not come into contact with the valve operating mechanism
  • Back-up welded diaphragms provide a permanent and durable gas tight seal
  • Burst Disc materials are Nickel, AISI 316L
Gas typeCorrosive, reactive and toxic ultra high purity gases
ConnectionsAccording (inter-)national standards and customer specifications
Flow rate0.35 slpm
Working pressure200 bar
Body materialsStainless steel 1.4435 (AISI 316L), Hastelloy® C22, Nickel 200, Monel® 2.4375 (Monel 500 K)
Temperature range-40 to +65 °c
Leak rate1.10-8 M bar l/s
Seat Orifice Size4 Mm
Markingπ0029 (according to TPED), 3 stars, valve number, manufacturing date
Dimensional drawings
Downloadable catalogs, brochures
  • Download
    Puretec overview
    Last update: Jan 15, 2024
    Available in: en
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