High pressure pneumatic UHP cylinder valve - D385S

D385S valve with pneumatic actuator is designed for keeping the highest level of purity of the gas. Its tied diaphragm technology allows to avoid any particle generation. The D385S is used for UHP, corrosive, reactive and toxic gases, common in the electronic and semicondutor industry.

Key advantages

Reduced dead space and gas wetted volumes allow easy purging
Prevents seizure - Gas does not come into contact with the valve operating mechanism
Back-up welded diaphragms provide a permanent and durable gas tight seal
Burst Disc materials are Nickel, AISI 316L

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Specifications

Gas type	Corrosive, reactive and toxic ultra high purity gases
Connections	According (inter-)national standards and customer specifications
Flow rate	0.35 slpm
Working pressure	200 bar
Body materials	Stainless steel 1.4435 (AISI 316L), Hastelloy® C22, Nickel 200, Monel® 2.4375 (Monel 500 K)
Temperature range	-40 to +65 °c
Leak rate	1.10-8 M bar l/s
Seat Orifice Size	4 Mm
Marking	π0029 (according to TPED), 3 stars, valve number, manufacturing date

Dimensional drawings

Downloadable catalogs, brochures