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Single-stage diaphragm pressure regulator for HP & UHP gases - RX3000
Specialty gas systems > Ultra high purity gas equipment > Ultra high purity pressure regulators
RX3000 is a single stage diaphragm pressure regulator for HP & UHP applications. The first of its kind threadless and springless pressure regulator for the highest level of purity.
Key advantages
  • Unique threadless design in all versions for a higher purity level
  • Spring less design for tied diaphragm version
  • Sub-atmospheric option available
  • Optimized supply pressure effect and excellent flow stability
  • Life duration according to CGA E4
  • Vacuum to 240 bar (3500 psi) inlet
  • Assembling, testing & packaging in cleanroom: Class ISO 4
  • Individual serial number for full traceability
  • Electropolished surface per SEMI F19 UHP Grade
  • 316L VAR® stainless steel double melt per SEMI F20 option available

CONSTRUCTION MATERIAL

  Parts Material
Wetted parts Body SS 316L, VAR
Seat PCTFE (PVDF optional)
Diaphragm SS 316L (Hastelloy® optional)
Poppet SS 316L (Hastelloy® optional)
Spring SS 316L (Hastelloy® optional)
Spring Holder SS 316L
Non-wetted parts Bonnet SS 303
Handwheel PA 6.6
Others Stainless Steel and Brass

SURFACE FINISH

S V U
Ra 0.4 μm (15 μin) Ra 0.25 μm EP (10 μin) Ra 0.13 μm EP (5 μin)  

 

FLOW CURVES 

Product image

Product image

   

Specifications
Max. inlet pressure240 bar (3500 psig), 21 bar for sub atmospheric
Max. delivery pressure0.7/2/4/7/10/21 bar (10/29/58/102/145/305 psig)
Temperature range-20°C to +65°C (-4°F to +149°F)
Flow capacityStandard: 0.09 / High Flow: 0.15
Regulator typeFree poppet: RX3000 / Tied diaphragm: RX3200
Burst pressure300% of operating pressure (*)
Proof pressure150% of operating pressure (*)
Supply pressure effectStandard: 0.25 bar/100 bar - HF: 0.5 bar/100 bar
Certified max. helium outboard leak rate≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate - at max. pressure≤ 1 x 10-8 mbar.l/s
Certified max. helium inboard leak rate - at max. pressure≤ 1 x 10-9 mbar.l/s
Dimensional drawings
Drawing
Product Configurator
 
Regulator type
Max. delivery pressure
Body material
Surface finish
Porting configuration
Inlet / outlet connections
Seat material
Options
Version
RX
30
01 **
-
S
2W1
4F
-
H
-
 
Free poppet
30
Tied and sub atmospheric delivery pressure (min 100 mbara)
31
Tied diaphragm
32
0.7 bar (10 psig)
01 **
2 bar (29 psig)
02
4 bar (58 psig)
04
7 bar (102 psig)
07
10 bar (145 psig)
10
21 bar (305 psig)
21
SS 316L
-
VAR
V
Ra 0.4 μm (15 μin)
S
Ra 0.25 μm EP (10 μin)
V
Ra 0.13 μm EP (5 μin)
U
2 ports
2W1
3 ports
3W4
4 ports
4W6
Metal face seal 1/4” - Female
4F
Metal face seal 1/4” - Male
4M
Metal face seal 1/4” - Internal
4FI
PCTFE Seat
-
PVDF Seat
P
Hastelloy Trim***
H
Gauge(s) ****
PG
Standard (Cv 0.09)
-
High Flow (Cv 0.15)
HF
* Recommended with a max. delivery pressure of 0.7 bar or 2 bar
** Max inlet pressure 21 bar
*** Hastelloy poppet, diaphragm and spring
**** Gauge(s) port(s) only
Downloadable catalogs, brochures
  • Download
    RX3000 UHP Pressure Regulator
    Last update: Mar 15, 2023
    Available in: en
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