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Diaphragm pressure regulator for HP & UHP gases - RX3000
RX3000 is a single stage diaphragm pressure regulator for HP & UHP applications. The first of its kind threadless and springless pressure regulator for the highest level of purity.
Key advantages
  • Unique threadless design in all versions for a higher purity level
  • Spring less design for tied diaphragm version
  • Sub-atmospheric option available
  • Optimized supply pressure effect and excellent flow stability
  • Life duration according to CGA E4
  • Vacuum to 240 bar (3500 psi) inlet
  • Assembling, testing & packaging in cleanroom: Class ISO 4
  • Individual serial number for full traceability
  • Electropolished surface roughness per SEMI F19 UHP Grade
  • 316L VAR® stainless steel double melt per SEMI F20 option available

CONSTRUCTION MATERIAL

  Parts Material
Wetted parts Body SS 316L, VAR
Seat PCTFE (PVDF, VESPEL® optional)
Diaphragm SS 316L (Hastelloy® optional)
Poppet SS 316L (Hastelloy® optional)
Spring SS 316L (Hastelloy® optional)
Spring Holder SS 316L
Non-wetted parts Bonnet SS 303
Handwheel PA 6.6
Others Stainless Steel and Brass

SURFACE FINISH

S V U
Ra 0.4 μm (15 μin) Ra 0.25 μm EP (10 μin) Ra 0.13 μm EP (5 μin)  

 

FLOW CURVES 

Product image

Product image

   

Specifications
Max. inlet pressure240 bar (3000 psig)/ 21 bar (304 psig) for sub atmospheric
Max. delivery pressure0,7/2/4/7/10/21 bar (29/58/102/145 psig)
Temperature range-20°C to +65°C (-4°F to +149°F)
Flow capacityStandard: 0.09 / High Flow: 0.15
Regulator typeFree poppet: RX3000 / Tied diaphragm: RX3200
Burst pressure300% of operating pressure (*)
Proof pressure150% of operating pressure (*)
Supply pressure effectStandard: 0.25 bar/100 bar - HF: 0.5 bar/100 bar
Certified max. helium outboard leak rate≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate - at max. pressure≤ 1 x 10-8 mbar.l/s
Certified max. helium inboard leak rate - at max. pressure≤ 1 x 10-9 mbar.l/s
Dimensional drawings
Drawing
Product Configurator
 
Regulator type
Maximum delivery pressure
Body material
Surface finish
Porting configuration
Inlet / outlet connections
Options
Version
RX
30
01
-
S
2W1
4F
V
 
Free poppet
Tied and sub atmospheric delivery pressure (min 100 mbara)
Tied diaphragm
0,7 bar (10 psig)
2 bar (29 psig)
4 bar (58 psig)
7 bar (102 psig)
10 bar (145 psig)
21 bar (304 psig)
SS 316L
VAR (316L secondary remelt)
Ra 0.4 μm (15 μin)
Ra 0.13 μm EP (10 μin)
Ra 0.25 μm EP (10 μin)
2 ports
3 ports
4 ports
Metal face seal 1/4” - Female
Metal face seal 1/4” - Male
Metal face seal 1/4” - Internal (1)
Vespel Seat
PVDF Seat
Hastelloy trim (2)
Gauge(s)
PCTFE seat (by default)
Standard (Cv 0.09)
High Flow (Cv 0.15)
(1) Gauge port(s) only
(2) Hastelloy poppet, diaphragm and spring
Downloadable catalogs, brochures
  • Download
    Ultra High Purity valves and pressure regulators
    Last update: May 17, 2021
    Available in: en/fr/cn
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