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Single-stage diaphragm pressure regulator for HP & UHP gases - RX3000

Specialty gas systems > Ultra high purity gas equipment > Ultra high purity pressure regulators

RX3000 is a single stage diaphragm pressure regulator for HP & UHP applications. The first of its kind threadless and springless pressure regulator for the highest level of purity.

Key advantages

Unique threadless design in all versions for a higher purity level
Spring less design for tied diaphragm version
Sub-atmospheric option available
Optimized supply pressure effect and excellent flow stability
Life duration according to CGA E4
Vacuum to 240 bar (3500 psi) inlet
Assembling, testing & packaging in cleanroom: Class ISO 4
Individual serial number for full traceability
Electropolished surface per SEMI F19 UHP Grade
316L VAR® stainless steel double melt per SEMI F20 option available

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CONSTRUCTION MATERIAL

	Parts	Material
Wetted parts	Body	SS 316L, VAR
	Seat	PCTFE (PVDF optional)
	Diaphragm	SS 316L (Hastelloy® optional)
	Poppet	SS 316L (Hastelloy® optional)
	Spring	SS 316L (Hastelloy® optional)
	Spring Holder	SS 316L
Non-wetted parts	Bonnet	SS 303
	Handwheel	PA 6.6
	Others	Stainless Steel and Brass

SURFACE FINISH

S	V	U
Ra 0.4 μm (15 μin)	Ra 0.25 μm EP (10 μin)	Ra 0.13 μm EP (5 μin)

FLOW CURVES

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Specifications

Max. inlet pressure	240 bar (3500 psig), 21 bar for sub atmospheric
Max. delivery pressure	0.7/2/4/7/10/21 bar (10/29/58/102/145/305 psig)
Temperature range	-20°C to +65°C (-4°F to +149°F)
Flow capacity	Standard: 0.09 / High Flow: 0.15
Regulator type	Free poppet: RX3000 / Tied diaphragm: RX3200
Burst pressure	300% of operating pressure (*)
Proof pressure	150% of operating pressure (*)
Supply pressure effect	Standard: 0.25 bar/100 bar - HF: 0.5 bar/100 bar
Certified max. helium outboard leak rate	≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate - at max. pressure	≤ 1 x 10-8 mbar.l/s
Certified max. helium inboard leak rate - at max. pressure	≤ 1 x 10-9 mbar.l/s

Dimensional drawings

Product Configurator

	Regulator type	Max. delivery pressure	Body material	Surface finish	Porting configuration	Inlet / outlet connections	Seat material	Options	Version
RX	30	01 **	-	S	2W1	4F	-	H	-
	Free poppet 30 Tied and sub atmospheric delivery pressure (min 100 mbara) 31 Tied diaphragm 32	0.7 bar (10 psig) 01 ** 2 bar (29 psig) 02 4 bar (58 psig) 04 7 bar (102 psig) 07 10 bar (145 psig) 10 21 bar (305 psig) 21	SS 316L - VAR V	Ra 0.4 μm (15 μin) S Ra 0.25 μm EP (10 μin) V Ra 0.13 μm EP (5 μin) U	2 ports 2W1 3 ports 3W4 4 ports 4W6	Metal face seal 1/4” - Female 4F Metal face seal 1/4” - Male 4M Metal face seal 1/4” - Internal 4FI	PCTFE Seat - PVDF Seat P	Hastelloy Trim* H Gauge(s) ** PG	Standard (Cv 0.09) - High Flow (Cv 0.15) HF

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* Recommended with a max. delivery pressure of 0.7 bar or 2 bar
** Max inlet pressure 21 bar
*** Hastelloy poppet, diaphragm and spring
**** Gauge(s) port(s) only

Downloadable catalogs, brochures

RX3000 UHP Pressure Regulator

Last update: Mar 15, 2023
Available in: en