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Sub-atmospheric pressure regulator for HP & UHP gases - RX3100
RX3100 is a sub-atmospheric pressure regulator for HP & UHP applications. The absolute pressure regulator for the highest level of purity.
Key advantages
  • Unique threadless design in all versions for a higher purity level
  • Spring less design
  • Optimized supply pressure effect and excellent flow stability
  • Life duration according to CGA E4
  • Vacuum to 21 bar (300 psig) inlet
  • Assembling, testing & packaging in cleanroom: Class ISO 4
  • Individual serial number for full traceability
  • Electropolished surface per SEMI F19 UHP Grade
  • 316L VAR® stainless steel double melt per SEMI F20 option available

CONSTRUCTION MATERIAL

  Parts Material
Wetted parts Body SS 316L, VAR
Seat PCTFE (PVDF, PTFE, VESPEL® optional)
Diaphragm SS 316L (Hastelloy® optional)
Poppet SS 316L (Hastelloy® optional)
Spring SS 316L (Hastelloy® optional)
Spring Holder SS 316L
Non-wetted parts Bonnet SS 303
Handwheel PA 6.6
Others Stainless Steel and Brass

SURFACE FINISH

S V U
Ra 0.4 μm (15 μin) Ra 0.25 μm EP (10 μin) Ra 0.13 μm EP (5 μin)  

 

Flow capacity (Cv) 0.09
Supply pressure effect I* 0.25
*1 bar / 100 bar inlet pressure change

FLOW CURVES 

 RX3100Product image

 

 

 

Specifications
Max inlet pressure21 bar (305 psig)
Outlet Pressure0,7/2 bar (10/29 psig)
Regulator typeTied diaphragm
Temperature range-20°C to +65°C (-4°F to +149°F)
Burst pressure300% of operating pressure
Proof pressure150% of operating pressure
Certified max. helium outboard leak rate≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate - at max. pressure≤ 1 x 10-8 mbar.l/s
Certified max. helium inboard leak rate - at max. pressure≤ 1 x 10-9 mbar.l/s
Dimensional drawings
Drawing
Product Configurator
 
Regulator type
Outlet Pressure
Seat material
Cv value
Body material
Surface finish
Porting configuration
Connections
Actuation
Inlet pressure
Options
RX
31
01
K
009
S
S
2W1
4F
M
021
H
 
Vacuum (Tied diaphragm)
31
0.7 bar (10 psig)
01
2 bar (29 psig)
02
PCTFE
K
Vespel
V
PVDF
P
PTFE
T
0.09
009
Stainless Steel AISI 316L
S
Stainless Steel AISI 316 AOD Var
V
Ra 0.4 μm (15 μin)
S
Ra 0.25 μm EP (10 μin)
V
Ra 0.13 μm EP (5 μin)
U
2 ports
2W1
3 ports
3W4
4 ports
4W6
1/4” Female VCR
4F
1/4” Male VCR
4M
Handwheel
M
21 bar (305 psig)
021
Hastelloy Trim
H
Gauge (bar/PSI)
PG0
Gauge (MPa)
PG1
Downloadable catalogs, brochures
  • Download
    RX3000 UHP Pressure Regulator
    Last update: Feb 23, 2024
    Available in: en/JA
  • Download
    RX3100 UHP Pressure Regulator
    Last update: Feb 23, 2024
    Available in: en
  • Download
    RX3600 UHP Pressure Regulator
    Last update: Feb 23, 2024
    Available in: en
  • Download
    RX3700 UHP Pressure Regulator
    Last update: Feb 23, 2024
    Available in: en
  • Download
    RX3900 UHP Pressure Regulator
    Last update: Feb 23, 2024
    Available in: en
  • Download
    RX4000 UHP Pressure Regulator
    Last update: Dec 04, 2023
    Available in: en/JA
  • Download
    RX4100 UHP Pressure Regulator
    Last update: Oct 11, 2023
    Available in: en
  • Download
    Complete UHP Solution
    Last update: Dec 04, 2023
    Available in: en/JA
  • Download
    RX1000 Compact UHP Pressure Regulator
    Last update: Feb 23, 2024
    Available in: en/JA
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