Regulator type | Outlet Pressure | Seat material | Cv value | Body material | Surface finish | Porting configuration | Connections | Actuation | Inlet pressure | Options | |
RX | 31 | 01 | K | 009 | S | S | 2W1 | 4F | M | 021 | H |
Sub-atmospheric pressure regulator for HP & UHP gases - RX3100
RX3100 is a sub-atmospheric pressure regulator for HP & UHP applications. The absolute pressure regulator for the highest level of purity.
Key advantages
- Unique threadless design in all versions for a higher purity level
- Spring less design
- Optimized supply pressure effect and excellent flow stability
- Life duration according to CGA E4
- Vacuum to 21 bar (300 psig) inlet
- Assembling, testing & packaging in cleanroom: Class ISO 4
- Individual serial number for full traceability
- Electropolished surface per SEMI F19 UHP Grade
- 316L VAR® stainless steel double melt per SEMI F20 option available
CONSTRUCTION MATERIAL
| Parts | Material | |
| Wetted parts | Body | SS 316L, VAR |
| Seat | PCTFE (PVDF, PTFE, VESPEL® optional) | |
| Diaphragm | SS 316L (Hastelloy® optional) | |
| Poppet | SS 316L (Hastelloy® optional) | |
| Spring | SS 316L (Hastelloy® optional) | |
| Spring Holder | SS 316L | |
| Non-wetted parts | Bonnet | SS 303 |
| Handwheel | PA 6.6 | |
| Others | Stainless Steel and Brass |
SURFACE FINISH
| S | V | U |
| Ra 0.4 μm (15 μin) | Ra 0.25 μm EP (10 μin) | Ra 0.13 μm EP (5 μin) |
| Flow capacity (Cv) | 0.09 |
| Supply pressure effect I* | 0.25 |
*1 bar / 100 bar inlet pressure change
FLOW CURVES
RX3100
Specifications
| Max inlet pressure | 21 bar (305 psig) |
| Outlet Pressure | 0,7/2 bar (10/29 psig) |
| Regulator type | Tied diaphragm |
| Temperature range | -20°C to +65°C (-4°F to +149°F) |
| Burst pressure | 300% of operating pressure |
| Proof pressure | 150% of operating pressure |
| Certified max. helium outboard leak rate | ≤ 1 x 10-9 mbar.l/s |
| Certified max. helium across the seat leak rate - at max. pressure | ≤ 1 x 10-8 mbar.l/s |
| Certified max. helium inboard leak rate - at max. pressure | ≤ 1 x 10-9 mbar.l/s |
Dimensional drawings
Product Configurator
Downloadable catalogs, brochures
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