Single-stage tied-diaphragm pressure regulator for HP & UHP gases - RX3200

RX3200 is a single stage tied-diaphragm pressure regulators for HP & UHP applications. The first of its kind threadless and springless pressure regulators to reach the highest level of purity.

Key advantages

Unique threadless design in all versions for a higher purity level
Optimized supply pressure effect and excellent flow stability
Life duration according to CGA E4
Vacuum to 240 bar (3500 psi) inlet
Assembling, testing & packaging in cleanroom: Class ISO 4
Individual serial number for full traceability
Electropolished surface per SEMI F19 UHP Grade
Spring less design
UHP Material - Semi F20 option available
Sub-atmospheric option available (see RX3100)

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STP File Download Configurator

CONSTRUCTION MATERIAL

	Parts	Material
Wetted parts	Body	SS 316L, UHP Material - Semi F20
	Seat	PCTFE (Polyimid optional)
	Diaphragm	SS 316L (Hastelloy® optional)
	Poppet	SS 316L (Hastelloy® optional)
Non-wetted parts	Bonnet	SS 303
	Handwheel	PA 6.6
	Others	Stainless Steel and Brass

SURFACE FINISH

S	V	U
Ra 0.4 μm (15 μin)	Ra 0.25 μm EP (10 μin)	Ra 0.13 μm EP (5 μin)

Flow capacity (Cv)	0.09	0.15
Supply pressure effect I*	0.25	0.5

_{*1 bar / 100 bar inlet pressure change}

FLOW CURVES

RX3200 - Cv 0,09 Product image

Product image

RX3200 - Cv 0,15 Product image

Specifications

Max inlet pressure	240 bar (3500 psig), 21 bar (300 psig)
Outlet Pressure	0.7/2/4/7 bar (10/30/60/100 psig)
Temperature range	-20°C to +65°C (-4°F to +149°F)
Regulator type	Tied Diaphragm
Burst pressure	300% of operating pressure
Proof pressure	150% of operating pressure
Certified max. helium outboard leak rate	≤ 1 x 10^-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)	≤ 1 x 10^-8 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)	≤ 1 x 10^-9 mbar.l/s

Dimensional drawings

Download STP File

Product Configurator

	Regulator type	Outlet Pressure	Seat material	Cv value	Body material	Surface finish	Porting configuration	Connections	Actuation	Inlet pressure	Options
RX	32	01	K	009	S	S	2W1	4F	M	021	H
	Tied Diaphragm 32	0.7 bar (10 psig)* 01 2 bar (30 psig) 02 4 bar (60 psig) 04 7 bar (100 psig) 07	PCTFE K Polyimid V PTFE* T	0.09 009 0.15 015	Stainless Steel AISI 316L S UHP Material - Semi F20 V	Ra 0.4 μm (15 μin) S Ra 0.25 μm EP (10 μin) V Ra 0.13 μm EP (5 μin) U	2 ports 2W1 3 ports 3W4 4 ports 4W6	1/4” Female VCR 4F 1/4” Male VCR 4M	Handwheel M Panel mount F	21 bar (300 psig)* 021 240 bar (3,500 psig) 240	Hastelloy Trim H Gauge (bar/PSI)* PG0 Gauge (MPa)*** PG1

I am interested

* 21 bar (300 psig) is only available and mandatory for PTFE as well as 0.7 bar (10 psig) outlet pressure
** Includes Hastelloy C22 Poppet, wetted spring & diaphragm
*** Standard gauge ports are Metal Face Seal ¼\" Male

Downloadable catalogs, brochures

Complete UHP Solution

Last update: Oct 22, 2024
Available in: en/JA/CN
RX3200 UHP Pressure Regulator

Last update: Oct 22, 2024
Available in: en/CN