Compact single-stage diaphragm pressure regulator for HP & UHP gases - RX1000

RX1000 is a compact single-stage diaphragm pressure regulator for high-purity & ultra-high-purity applications. The first of its kind threadless pressure regulator for the highest level of purity.

Key advantages

Unique threadless design in all versions for a higher purity level
Life duration according to CGA E4
As compact as UHP line valves
Assembling, testing & packaging in cleanroom: Class ISO 4
Individual serial number for full traceability
Electropolished surface per SEMI F19 UHP Grade
UHP Material - Semi F20 option available
Up to 240 bar (3500 psi) inlet

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CONSTRUCTION MATERIAL

	Parts	Material
Wetted parts	Body	SS 316L, UHP Material - Semi F20
	Seat	PCTFE
	Diaphragm	SS 316L
	Poppet	SS 316L
	Spring	SS 316L
	Spring Holder	SS 316L
Non-wetted parts	Handwheel	PA 6.6
Non-wetted parts	Others	Stainless Steel and Brass

SURFACE FINISH

S	V
Ra 0.4 μm (15 μin)	Ra 0.25 μm EP (10 μin)

Flow capacity	0.09	0.15
Supply pressure effect I*	0.8	1.7

*1 bar / 100 bar inlet pressure change

FLOW CURVES

Product image

Specifications

Max. inlet pressure	10 bar (150 psig) 240 bar (3,500 psig)
Outlet Pressure	0.7/2/4/7/10 bar (10/30/60/100/150 psig)
Poppet type	Free diaphragm
Temperature range	-20°C to +65°C (-4°F to +149°F)
Burst pressure	300% of operating pressure
Proof pressure	150% of operating pressure
Certified max. helium outboard leak rate (at max. pressure)	≤ 1 x 10^-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)	≤ 1 x 10^-8 mbar.l/s
Certified max. helium inboard leak rate	≤ 1 x 10^-9 mbar.l/s

Dimensional drawings

Product Configurator

	Regulator type	Outlet Pressure	Seat material	Cv value	Body material	Surface finish	Porting configuration	Connections	Actuation	Inlet pressure
RX	10	01	K	009	S	S	2W1	4F	M	10
	Free diaphragm 10	0.7 bar (10 psig) 01 2 bar (30 psig) 02 4 bar (60 psig) 04 7 bar (100 psig) 07 10 bar (150 psig) 10	PCTFE K Polyimid V	0.09 009 0.15 015	Stainless Steel AISI 316L S UHP Material - Semi F20 V	Ra 0.4 μm (15 μin) S Ra 0.25 μm EP (10 μin) V Ra 0.13 μm EP (5 μin) U	2 ports 2W1 3 ports 3W4	1/4” Female VCR 4F 1/4” Male VCR 4M	Handwheel M	10 bar (150 psig) 10 240 bar (3500 psig) 240

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*Outlet pressure 0.7 bar (10 psig) only with 10 bar (150 psig) inlet pressure

Downloadable catalogs, brochures

RX1000 Compact UHP Pressure Regulator

Last update: Dec 09, 2024
Available in: en/CN/JA
Complete UHP Solution

Last update: Dec 09, 2024
Available in: en/JA/CN