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Compact single-stage diaphragm pressure regulator for HP & UHP gases - RX1000

RX1000 is a compact single-stage diaphragm pressure regulator for HP & UHP applications. The first of its kind threadless pressure regulator for the highest level of purity.
Key advantages
  • Unique threadless design in all versions for a higher purity level
  • Life duration according to CGA E4
  • As compact as UHP line valves
  • Vacuum to 240 bar (3500 psi) inlet
  • Assembling, testing & packaging in cleanroom: Class ISO 4
  • Individual serial number for full traceability
  • Electropolished surface per SEMI F19 UHP Grade
  • 316L VAR® stainless steel double melt per SEMI F20 option available

CONSTRUCTION MATERIAL

  Parts Material
Wetted parts Body SS 316L, VAR
Seat PCTFE (PVDF, Polyimid optional)
Diaphragm SS 316L (Hastelloy® optional)
Poppet SS 316L (Hastelloy® optional)
Spring SS 316L (Hastelloy® optional)
Spring Holder SS 316L
Non-wetted parts Bonnet SS 303
Handwheel PA 6.6
Others Stainless Steel and Brass

SURFACE FINISH

S V U
Ra 0.4 μm (15 μin) Ra 0.25 μm EP (10 μin) Ra 0.13 μm EP (5 μin)  

 

Flow capacity 0.04 0.09 0.15
Supply pressure effect I* 0.5 0.8 1.7

*1 bar / 100 bar inlet pressure change

FLOW CURVES 

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Specifications
Max.inlet pressure240 bar (3,500 psig)
Outlet Pressure0.7/2/4/7/10 bar (10/30/60/100/145 psig)
Poppet typeFree diaphragm
Temperature range-20°C to +65°C (-4°F to +149°F)
Burst pressure300% of operating pressure
Proof pressure150% of operating pressure
Certified max. helium outboard leak rate≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)≤ 1 x 10-8 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)≤ 1 x 10-9 mbar.l/s
Dimensional drawings
Drawing
Product Configurator
 
Regulator type
Outlet Pressure
Seat material
Cv value
Body material
Surface finish
Porting configuration
Connections
Actuation
Inlet pressure
Options
RX
10
01
K
004
S
S
2W1
4F
M
240
H
 
Free diaphragm
10
0.7 bar (10 psig)
01
2 bar (29 psig)
02
4 bar (58 psig)
04
7 bar (102 psig)
07
10 bar (145 psig)
10
PCTFE
K
Polyimid
V
PVDF
P
0.04
004
0.09
009
0.15
015
Stainless Steel AISI 316L
S
Stainless Steel AISI 316 AOD Var
V
Ra 0.4 μm (15 μin)
S
Ra 0.25 μm EP (10 μin)
V
Ra 0.13 μm EP (5 μin)
U
2 ports
2W1
1/4” Female VCR
4F
1/4” Male VCR
4M
Handwheel
M
240 bar (3,500 psig)
240
Hastelloy Trim*
H
*Includes Hastelloy C22 Poppet, wetted spring & diaphragm
Downloadable catalogs, brochures
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    RX1000 Compact UHP Pressure Regulator
    Last update: Mar 26, 2024
    Available in: en/CN/JA
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    RX3900 UHP Pressure Regulator
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    RX4000 UHP Pressure Regulator
    Last update: Apr 24, 2024
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    RX4100 UHP Pressure Regulator
    Last update: Apr 24, 2024
    Available in: en/CN
  • Download
    Complete UHP Solution
    Last update: Mar 13, 2024
    Available in: en/JA/CN
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