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High Performance Vacuum Generator Module Type System - RXVGM

A vacuum generator is an essential safety device designed to protect gas supply lines and improve system efficiency. Equipped with an integrated non-return valve and an air-operated orifice, it prevents contamination while guaranteeing optimal performance. Used in semiconductor applications, it allows the remote evacuation of hazardous gases, safely removing them from the work environment.

By continuously eliminating moisture, it prevents corrosive gas buildup and ensures system durability. Its built-in check valve blocks reverse flow, maintaining a clean nitrogen supply. RXVGM (Module Type) features an integrated check valve and offers multiple bleed options, all in a compact, easy-to-install design.
Key advantages
  • High Performance with compact design
  • 316L Stainless Steel Construction
  • 100torr Vacuum Generated with minimum source (60slpm at 80psig N2)
  • DI water cleaned, 100% welded, assembled tested & packed in clean room
  • 100% performance test (Vacuum, Reseal, cracking Pressure)
  • Normally Closed air actuator type
  • Various bleed option available (2.5 / 5 / 8 / 15 slpm at 80psig N2)

High Performance Vacuum Generator Module Type System

Specifications
N2 inlet70 to 110psig
4.8 to 7.6 bar
Vacuum port (operating)3,500psig
241bar
Vacuum maximum26in.Hg (100torr)
Cracking pressure3psig
02 bar
Actuation pressure60 to 110 psig
4 to 7.6 bar
Proof pressure150% of operating pressures
Burst pressure300% of operating pressures
Leak rateBubble tight
Operating temperature14°F to + 160°F
-10°C to +71°C
Valve statusNomally Closed (NC)
Actuation portM5 thread
Dimensional drawings
Drawing
Product Configurator
Vacuum generator type
Inlet ports
Vent port
Vacuum port
Bleed options
M
4M
4M
4M
BL001
Module with check valve
M
1/4" Male VCR
4M
1/4" Male VCR
4M
1/4" Female VCR
4F
3/8" Male VCR
6M
3/8" Female VCR
6F
3/8" Butt Weld
6BWO
1/4" Male VCR
4M
1/4" Female VCR
4F
1/4" Butt Weld
4BWO
2.5slpm
BL001
5slpm
BL002
8slpm
BL003
15slpm
BL004
Downloadable catalogs, brochures
  • Download
    Vacuum Generator Module Type
    Last update: Feb 27, 2025
    Available in: en
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