Vacuum generator type | Inlet ports | Vent port | Vacuum port | Bleed options |
M | 4M | 4M | 4M | BL001 |
High Performance Vacuum Generator Module Type System - RXVGM
A vacuum generator is an essential safety device designed to protect gas supply lines and improve system efficiency. Equipped with an integrated non-return valve and an air-operated orifice, it prevents contamination while guaranteeing optimal performance. Used in semiconductor applications, it allows the remote evacuation of hazardous gases, safely removing them from the work environment.
By continuously eliminating moisture, it prevents corrosive gas buildup and ensures system durability. Its built-in check valve blocks reverse flow, maintaining a clean nitrogen supply. RXVGM (Module Type) features an integrated check valve and offers multiple bleed options, all in a compact, easy-to-install design.
By continuously eliminating moisture, it prevents corrosive gas buildup and ensures system durability. Its built-in check valve blocks reverse flow, maintaining a clean nitrogen supply. RXVGM (Module Type) features an integrated check valve and offers multiple bleed options, all in a compact, easy-to-install design.
Key advantages
- High Performance with compact design
- 316L Stainless Steel Construction
- 100torr Vacuum Generated with minimum source (60slpm at 80psig N2)
- DI water cleaned, 100% welded, assembled tested & packed in clean room
- 100% performance test (Vacuum, Reseal, cracking Pressure)
- Normally Closed air actuator type
- Various bleed option available (2.5 / 5 / 8 / 15 slpm at 80psig N2)
Specifications
N2 inlet | 70 to 110psig 4.8 to 7.6 bar |
Vacuum port (operating) | 3,500psig 241bar |
Vacuum maximum | 26in.Hg (100torr) |
Cracking pressure | 3psig 02 bar |
Actuation pressure | 60 to 110 psig 4 to 7.6 bar |
Proof pressure | 150% of operating pressures |
Burst pressure | 300% of operating pressures |
Leak rate | Bubble tight |
Operating temperature | 14°F to + 160°F -10°C to +71°C |
Valve status | Nomally Closed (NC) |
Actuation port | M5 thread |
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