Vacuum generator type | Inlet ports | Vent port | Vacuum port |
B | 4M | 4M | 4M |
High Performance Vacuum Generator Block Type System - RXVGB
A vacuum generator is an essential safety device designed for gas line purging before opening cylinders or disconnecting gas lines. Used in semiconductor industry, it efficiently evacuates residual process gases, preventing exposure to harmful or reactive substances.
By creating a vacuum, it minimizes the risk of leaks, explosions, or pressure buildup during maintenance and cylinder changeovers, ensuring a safer working environment.
RXVGB (Block Type) provides 60torr Vacuum Generated with minimum source (60slpm at 80psig N2).
By creating a vacuum, it minimizes the risk of leaks, explosions, or pressure buildup during maintenance and cylinder changeovers, ensuring a safer working environment.
RXVGB (Block Type) provides 60torr Vacuum Generated with minimum source (60slpm at 80psig N2).
Key advantages
- High Performance with compact design
- 316L Stainless Steel Construction
- 60torr Vacuum Generated with minimum source (60slpm at 80psig N2)
- 100% performance test (Vacuum & He inboard test)
- DI water cleaned, 100% welded, assembled tested & packed in clean room
Specifications
| N2 inlet | 78 to 110psig 5.3 to 7.6 bar |
| Vacuum port (operating) | 3,500psig 241bar |
| Vacuum maximum | 27in.Hg (60torr) |
| Proof pressure | 150% of operating pressures |
| Burst pressure | 300% of operating pressures |
| Leak rate | ≤1x10-9mbar.l/s |
| Operating temperature | -40°F to +160°F -40°C to +71°C |
| Finish | Ra 20μin (0.5μm) |
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