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Tied diaphragm cylinder valve for fluorine mixtures with pneumatic actuator - D386S
The D386S delivers the highest levels of purity and safety for typical applications using fluorine gas mixtures such as cleaning non-plasma deposition chambers and diffusion furnace for silicon-based films. Rotarex has designed the D386S cylinder valve with the challenges of fluorine nitrogen mixtures in mind. The new valve offers a wealth of specialized features to ensure the safety of operational staff and the purity of the F2/N2 mixtures to contribute to contamination-free manufacturing.
Key advantages
  • Pneumatic actuation
  • Valve is designed normally closed
  • The tapped vent hole allows the connection to a leak detector
  • Gas will not come in contact with the valve operating system
  • Backed up welded diaphragms provide a high leak tightness integrity up to 10-8 mbar.l/sec
  • Reduced dead spaces and gas wetted volumes allow easy purging process
  • No particle generating threads in the gas wetted part
  • Metal to Metal seat, fully suited for fluorine applications
Specifications
ConnectionsAccording (inter-)national standards and customer specifications
Working pressure200 bar
Body materialsStainless steel 1.4435 (AISI 316L), Hastelloy® C22, Nickel 200, Monel® 2.4375 (Monel 500 K)
Temperature range-40 to +65 °c
Leak rate1.10-8 M bar l/s
Seat Orifice Size4 Mm
Markingπ0029 (according to TPED), 3 stars, valve number, manufacturing date
Nominal flow rateCV=0.25
Gas typeN2/F2
Dimensional drawings
Drawing
Downloadable catalogs, brochures
  • Download
    Puretec overview
    Last update: Sep 07, 2021
    Available in: en
  • Download
    D386S Brochure
    Last update: Mar 09, 2022
    Available in: en
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