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Tied diaphragm cylinder valve for fluorine mixtures with pneumatic actuator - D386S

The D386S ensures the highest levels of purity and safety for applications using fluorine gas mixtures, such as cleaning non-plasma deposition chambers and diffusion furnaces for silicon-based films. Designed with the challenges of fluorine-nitrogen mixtures in mind, this UHP cylinder valve incorporates specialized features to enhance operational safety and maintain the purity of F₂/N₂ mixtures, supporting contamination-free manufacturing
Key advantages
  • Pneumatic actuation
  • Valve is designed normally closed
  • The tapped vent hole allows the connection to a leak detector
  • Gas will not come in contact with the valve operating system
  • Backed up welded diaphragms provide a high leak tightness integrity up to 10-8 mbar.l/sec
  • Reduced dead spaces and gas wetted volumes allow easy purging process
  • No particle generating threads in the gas wetted part
  • Metal to Metal seat, fully suited for fluorine applications

Product image

Specifications
ConnectionsAccording (inter-)national standards and customer specifications
Working pressure200 bar
Body materialsStainless steel 1.4435 (AISI 316L), Hastelloy® C22, Nickel 200, Monel® 2.4375 (Monel 500 K)
Temperature range-40 to +65 °c
Leak rate1.10-8 M bar l/s
Seat Orifice Size4 Mm
Markingπ0029 (according to TPED), 3 stars, valve number, manufacturing date
Nominal flow rateCV=0.25
Gas typeN2/F2
Dimensional drawings
Drawing
Downloadable catalogs, brochures
  • Download
    D386S Brochure
    Last update: Jan 25, 2023
    Available in: en
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