Tied diaphragm cylinder valve for fluorine mixtures with pneumatic actuator - D386S

The D386S delivers the highest levels of purity and safety for typical applications using fluorine gas mixtures such as cleaning non-plasma deposition chambers and diffusion furnace for silicon-based films. Rotarex has designed the D386S cylinder valve with the challenges of fluorine nitrogen mixtures in mind. The new valve offers a wealth of specialized features to ensure the safety of operational staff and the purity of the F2/N2 mixtures to contribute to contamination-free manufacturing.

Key advantages

Pneumatic actuation
Valve is designed normally closed
The tapped vent hole allows the connection to a leak detector
Gas will not come in contact with the valve operating system
Backed up welded diaphragms provide a high leak tightness integrity up to 10-8 mbar.l/sec
Reduced dead spaces and gas wetted volumes allow easy purging process
No particle generating threads in the gas wetted part
Metal to Metal seat, fully suited for fluorine applications

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Specifications

Connections	According (inter-)national standards and customer specifications
Working pressure	200 bar
Body materials	Stainless steel 1.4435 (AISI 316L), Hastelloy® C22, Nickel 200, Monel® 2.4375 (Monel 500 K)
Temperature range	-40 to +65 °c
Leak rate	1.10-8 M bar l/s
Seat Orifice Size	4 Mm
Marking	π0029 (according to TPED), 3 stars, valve number, manufacturing date
Nominal flow rate	CV=0.25
Gas type	N2/F2

Dimensional drawings

Downloadable catalogs, brochures

D386S Brochure

Last update: Jan 25, 2023
Available in: en