Tied diaphragm cylinder valve for fluorine mixtures with pneumatic actuator - D386S
The D386S ensures the highest levels of purity and safety for applications using fluorine gas mixtures, such as cleaning non-plasma deposition chambers and diffusion furnaces for silicon-based films. Designed with the challenges of fluorine-nitrogen mixtures in mind, this UHP cylinder valve incorporates specialized features to enhance operational safety and maintain the purity of F₂/N₂ mixtures, supporting contamination-free manufacturing
Key advantages
- Pneumatic actuation
- Valve is designed normally closed
- The tapped vent hole allows the connection to a leak detector
- Gas will not come in contact with the valve operating system
- Backed up welded diaphragms provide a high leak tightness integrity up to 10-8 mbar.l/sec
- Reduced dead spaces and gas wetted volumes allow easy purging process
- No particle generating threads in the gas wetted part
- Metal to Metal seat, fully suited for fluorine applications
Specifications
Connections | According (inter-)national standards and customer specifications |
Working pressure | 200 bar |
Body materials | Stainless steel 1.4435 (AISI 316L), Hastelloy® C22, Nickel 200, Monel® 2.4375 (Monel 500 K) |
Temperature range | -40 to +65 °c |
Leak rate | 1.10-8 M bar l/s |
Seat Orifice Size | 4 Mm |
Marking | π0029 (according to TPED), 3 stars, valve number, manufacturing date |
Nominal flow rate | CV=0.25 |
Gas type | N2/F2 |
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