Product | Rotarex

Tied diaphragm cylinder valve for fluorine mixtures with pneumatic actuator - D386S

The D386S delivers the highest levels of purity and safety for typical applications using fluorine gas mixtures such as cleaning non-plasma deposition chambers and diffusion furnace for silicon-based films. Rotarex has designed the D386S cylinder valve with the challenges of fluorine nitrogen mixtures in mind. The new valve offers a wealth of specialized features to ensure the safety of operational staff and the purity of the F2/N2 mixtures to contribute to contamination-free manufacturing.

Key advantages

Pneumatic actuation
Valve is designed normally closed
The tapped vent hole allows the connection to a leak detector
Gas will not come in contact with the valve operating system
Backed up welded diaphragms provide a high leak tightness integrity up to 10-8 mbar.l/sec
Reduced dead spaces and gas wetted volumes allow easy purging process
No particle generating threads in the gas wetted part
Metal to Metal seat, fully suited for fluorine applications

Contact an expert
Download datasheet

Specifications

Connections	According (inter-)national standards and customer specifications
Working pressure	200 bar
Body materials	Stainless steel 1.4435 (AISI 316L), Hastelloy® C22, Nickel 200, Monel® 2.4375 (Monel 500 K)
Temperature range	-40 to +65 °c
Leak rate	1.10-8 M bar l/s
Seat Orifice Size	4 Mm
Marking	π0029 (according to TPED), 3 stars, valve number, manufacturing date
Nominal flow rate	CV=0.25
Gas type	N2/F2

Dimensional drawings

Downloadable catalogs, brochures

Puretec overview

Last update: Jun 20, 2023
Available in: en
D386S Brochure

Last update: Jan 25, 2023
Available in: en