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Piston loaded high pressure regulator for HP & UHP gases - RX3700
RX3700 is a piston loaded high pressure regulator for HP & UHP applications, self-relieving and non-relieving.
Key advantages
  • Unique threadless design in all versions for a higher purity level
  • Self-relieving option (venting)
  • Optimized supply pressure effect and excellent flow stability
  • Life duration according to CGA E4
  • Vacuum to 310 bar (4500 psig) inlet
  • Assembling, testing & packaging in cleanroom: Class ISO 4
  • Individual serial number for full traceability
  • Electropolished surface per SEMI F19 UHP Grade
  • 316L VAR® stainless steel double melt per SEMI F20 option available

CONSTRUCTION MATERIAL

  Parts Material
Wetted parts Body SS 316L, VAR
Seat PCTFE (Polyimid optional)
Diaphragm SS 316L (Hastelloy® optional)
Poppet SS 316L (Hastelloy® optional)
Spring SS 316L (Hastelloy® optional)
Spring Holder SS 316L
Non-wetted parts Bonnet SS303
Handwheel PA 6.6
Others Stainless Steel and Brass

 

SURFACE FINISH

S V U
Ra 0.4 μm (15 μin) Ra 0.25 μm EP (10 μin) Ra 0.13 μm EP (5 μin)  

 

Flow capacity (Cv) 0.09 0.15
Supply pressure effect I* 5 11
*1 bar / 100 bar inlet pressure change

FLOW CURVES 

RX3700Product image

 

Specifications
Max inlet pressure310 bar (4,500 psig)
Outlet Pressure34 / 172 bar (500 / 2,500 psig)
Regulator typeTied diaphragm
Burst pressure300% of operating pressure
Proof pressure150% of operating pressure
Temperature range-20°C to +65°C (-4°F to +149°F)
Certified max. helium outboard leak rate≤ 1 x 10-6 mbar.l/s
Certified max. helium across the seat leak rate - at max. pressure≤ 1 x 10-6 mbar.l/s
Certified max. helium inboard leak rate - at max. pressure≤ 1 x 10-6 mbar.l/s
Dimensional drawings
Drawing
Product Configurator
 
Regulator type
Outlet Pressure
Seat material
Cv value
Body material
Surface finish
Porting configuration
Connections
Actuation
Inlet pressure
Options
RX
37
K
K
009
S
S
2W1
4F
M
310
H
 
High outlet pressure with piston (Tied diaphragm)
37
34 bar (500 psig)
K
172 bar (2,500 psig)
M
PCTFE
K
Polyimid
PI
0.09
009
0.15*
015
Stainless Steel AISI 316L
S
Stainless Steel AISI 316 AOD Var
V
Ra 0.4 μm (15 μin)
S
Ra 0.25 μm EP (10 μin)
V
Ra 0.13 μm EP (5 μin)
U
2 ports
2W1
3 ports
3W4
4 ports
4W6
1/4” Female VCR
4F
1/4” Male VCR
4M
Handwheel
M
Handwheel venting
S
310 bar (4,500 psig)
310
Hastelloy Trim**
H
Gauge (bar/PSI)***
PG0
Gauge (MPa)***
PG1
* Polyimid mandatory for Cv of 0.15
** Includes Hastelloy C22 Poppet, wetted spring & diaphragm
*** Standard gauge ports are Metal Face Seal ¼\" Male

Downloadable catalogs, brochures
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    RX3100 UHP Pressure Regulator
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    RX3600 UHP Pressure Regulator
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    RX3700 UHP Pressure Regulator
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    Available in: en/CN
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    RX3900 UHP Pressure Regulator
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    Available in: en/CN
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    RX4000 UHP Pressure Regulator
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    RX4100 UHP Pressure Regulator
    Last update: Mar 26, 2024
    Available in: en/CN
  • Download
    Complete UHP Solution
    Last update: Mar 13, 2024
    Available in: en/JA/CN
  • Download
    RX1000 Compact UHP Pressure Regulator
    Last update: Mar 26, 2024
    Available in: en/CN/JA
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