Diaphragm loaded high pressure regulator for HP & UHP gases - RX3600

RX3600 is a diaphragm loaded high pressure regulator for HP & UHP applications.

Key advantages

Unique threadless design in all versions for a higher purity level
Optimized supply pressure effect and excellent flow stability
Life duration according to CGA E4
Vacuum to 310 bar (4,500 psig) inlet
Assembling, testing & packaging in cleanroom: Class ISO 4
Individual serial number for full traceability
Electropolished surface per SEMI F19 UHP Grade
UHP Material - Semi F20 option available

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CONSTRUCTION MATERIAL

	Parts	Material
Wetted parts	Body	SS 316L, UHP Material - Semi F20
	Seat	PCTFE (Polyimid optional)
	Diaphragm	SS 316L (Hastelloy® optional)
	Poppet	SS 316L (Hastelloy® optional)
	Spring	SS 316L (Hastelloy® optional)
	Spring Holder	SS 316L
Non-wetted parts	Bonnet	SS 303
	Handwheel	PA 6.6
	Others	Stainless Steel and Brass

SURFACE FINISH

S	V	U
Ra 0.4 μm (15 μin)	Ra 0.25 μm EP (10 μin)	Ra 0.13 μm EP (5 μin)

Flow capacity (Cv)	0.15
Supply pressure effect I*	0.5

_{*1 bar / 100 bar inlet pressure change}

Specifications

Max inlet pressure	240 / 310 bar (3,500 / 4,500 psig)
Outlet Pressure	34 / 100 bar (500 / 1,450 psig)
Regulator type	Free diaphragm
Burst pressure	300% of operating pressure
Proof pressure	150% of operating pressure
Temperature range	-20°C to +65°C (-4°F to +149°F)
Certified max. helium outboard leak rate	≤ 1 x 10^-9 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)	≤ 1 x 10^-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)	≤ 1 x 10^-8 mbar.l/s

Dimensional drawings

Product Configurator

	Regulator type	Outlet Pressure	Seat material	Cv value	Body material	Surface finish	Porting configuration	Connections	Actuator	Inlet pressure	Options
RX	36	K	K	015	S	S	2W1	4F	M	240	H
	High outlet pressure with diaphragm (Free diaphragm) 36	34 bar (500 psig) K 100 (1,450 psig L	PCTFE* K Polyimid V	0.15 015	Stainless Steel AISI 316L S UHP Material - Semi F20 V	Ra 0.4 μm (15 μin) S Ra 0.25 μm EP (10 μin) V Ra 0.13 μm EP (5 μin) U	2 ports 2W1 3 ports 3W4 4 ports 4W6	1/4” Female VCR 4F 1/4” Male VCR 4M	Handwheel M	240 bar (3,500 psig)* 240 310 bar (4,500 psig) 310	Hastelloy Trim H Gauge (bar/PSI)* PG0 Gauge (MPa)*** PG1

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* PCTFE seat only available for a maximum inlet pressure of 240 bar (3,500 psig)
** Includes Hastelloy C22 Poppet, wetted spring & diaphragm
*** Standard gauge ports are Metal Face Seal ¼\" Male

Downloadable catalogs, brochures

RX3600 UHP Pressure Regulator

Last update: Jul 01, 2024
Available in: en/CN
Complete UHP Solution

Last update: Oct 22, 2024
Available in: en/JA/CN