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Diaphragm loaded high pressure regulator for HP & UHP gases - RX3600

The RX3600 is a high-pressure regulator designed for use with high-purity and ultra-high-purity gases. Its diaphragm loaded technology ensures the highest level of purity to meet the standards of UHP applications. This regulator is designed to withstand high inlet pressures of up to 310 bar.
Key advantages
  • Unique threadless design in all versions for a higher purity level
  • Optimized supply pressure effect and excellent flow stability
  • Life duration according to CGA E4
  • Vacuum to 310 bar (4,500 psig) inlet
  • Assembling, testing & packaging in cleanroom: Class ISO 4
  • Individual serial number for full traceability
  • Electropolished surface per SEMI F19 UHP Grade
  • UHP Material - Semi F20 option available

CONSTRUCTION MATERIAL

  Parts Material
Wetted parts Body SS 316L, UHP Material - Semi F20
Seat PCTFE (Polyimid optional)
Diaphragm SS 316L (Hastelloy® optional)
Poppet SS 316L (Hastelloy® optional)
Spring SS 316L (Hastelloy® optional)
Spring Holder SS 316L
Non-wetted parts Bonnet SS 303
Handwheel PA 6.6
Others Stainless Steel and Brass

SURFACE FINISH

S V U
Ra 0.4 μm (15 μin) Ra 0.25 μm EP (10 μin) Ra 0.13 μm EP (5 μin)  

 

Flow capacity (Cv) 0.15
Supply pressure effect I* 0.5 
*1 bar / 100 bar inlet pressure change
Specifications
Max inlet pressure240 / 310 bar (3,500 / 4,500 psig)
Outlet Pressure34 / 100 bar (500 / 1,450 psig)
Regulator typeFree diaphragm
Burst pressure300% of operating pressure
Proof pressure150% of operating pressure
Temperature range-20°C to +65°C (-4°F to +149°F)
Certified max. helium outboard leak rate≤ 1 x 10-9 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)≤ 1 x 10-8 mbar.l/s
Dimensional drawings
Drawing
Product Configurator
 
Regulator type
Outlet Pressure
Seat material
Cv value
Body material
Surface finish
Porting configuration
Connections
Actuator
Inlet pressure
Options
RX
36
K
K
015
S
S
2W1
4F
M
240
H
 
High outlet pressure with diaphragm (Free diaphragm)
36
34 bar (500 psig)
K
100 (1,450 psig
L
PCTFE*
K
Polyimid
V
0.15
015
Stainless Steel AISI 316L
S
UHP Material - Semi F20
V
Ra 0.4 μm (15 μin)
S
Ra 0.25 μm EP (10 μin)
V
Ra 0.13 μm EP (5 μin)
U
2 ports
2W1
3 ports
3W4
4 ports
4W6
1/4” Female VCR
4F
1/4” Male VCR
4M
Handwheel
M
240 bar (3,500 psig)*
240
310 bar (4,500 psig)
310
Hastelloy Trim**
H
Gauge (bar/PSI)***
PG0
Gauge (MPa)***
PG1
* PCTFE seat only available for a maximum inlet pressure of 240 bar (3,500 psig)
** Includes Hastelloy C22 Poppet, wetted spring & diaphragm
*** Standard gauge ports are Metal Face Seal ¼\" Male

Downloadable catalogs, brochures
  • Download
    RX3600 UHP Pressure Regulator
    Last update: Jul 01, 2024
    Available in: en/CN
  • Download
    Complete UHP Solution
    Last update: Dec 09, 2024
    Available in: en/JA/CN
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