Diaphragm loaded high pressure regulator for HP & UHP gases - RX3600

The RX3600 is a high-pressure regulator designed for use with high-purity and ultra-high-purity gases. Its diaphragm loaded technology ensures the highest level of purity to meet the standards of UHP applications. This regulator is designed to withstand high inlet pressures of up to 310 bar.

Key advantages

Unique threadless design in all versions for a higher purity level
Optimized supply pressure effect and excellent flow stability
Life duration according to CGA E4
Vacuum to 310 bar (4,500 psig) inlet
Assembling, testing & packaging in cleanroom: Class ISO 4
Individual serial number for full traceability
Electropolished surface per SEMI F19 UHP Grade
UHP Material - Semi F20 option available

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CONSTRUCTION MATERIAL

	Parts	Material
Wetted parts	Body	SS 316L, UHP Material - Semi F20
	Seat	PCTFE (Polyimid optional)
	Diaphragm	SS 316L (Hastelloy® optional)
	Poppet	SS 316L (Hastelloy® optional)
	Spring	SS 316L (Hastelloy® optional)
	Spring Holder	SS 316L
Non-wetted parts	Bonnet	SS 303
	Handwheel	PA 6.6
	Others	Stainless Steel and Brass

SURFACE FINISH

S	V	U
Ra 0.4 μm (15 μin)	Ra 0.25 μm EP (10 μin)	Ra 0.13 μm EP (5 μin)

Flow capacity (Cv)	0.15
Supply pressure effect I*	0.5

_{*1 bar / 100 bar inlet pressure change}

Specifications

Max inlet pressure	240 / 310 bar (3,500 / 4,500 psig)
Outlet Pressure	34 / 100 bar (500 / 1,450 psig)
Regulator type	Free diaphragm
Burst pressure	300% of operating pressure
Proof pressure	150% of operating pressure
Temperature range	-20°C to +65°C (-4°F to +149°F)
Certified max. helium outboard leak rate	≤ 1 x 10^-9 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)	≤ 1 x 10^-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)	≤ 1 x 10^-8 mbar.l/s

Dimensional drawings

Product Configurator

	Regulator type	Outlet Pressure	Seat material	Cv value	Body material	Surface finish	Porting configuration	Connections	Actuator	Inlet pressure	Options
RX	36	K	K	015	S	S	2W1	4F	M	240	H
	High outlet pressure with diaphragm (Free diaphragm) 36	34 bar (500 psig) K 100 (1,450 psig L	PCTFE* K Polyimid V	0.15 015	Stainless Steel AISI 316L S UHP Material - Semi F20 V	Ra 0.4 μm (15 μin) S Ra 0.25 μm EP (10 μin) V Ra 0.13 μm EP (5 μin) U	2 ports 2W1 3 ports 3W4 4 ports 4W6	1/4” Female VCR 4F 1/4” Male VCR 4M	Handwheel M	240 bar (3,500 psig)* 240 310 bar (4,500 psig) 310	Hastelloy Trim H Gauge (bar/PSI)* PG0 Gauge (MPa)*** PG1

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* PCTFE seat only available for a maximum inlet pressure of 240 bar (3,500 psig)
** Includes Hastelloy C22 Poppet, wetted spring & diaphragm
*** Standard gauge ports are Metal Face Seal ¼\" Male

Downloadable catalogs, brochures

RX3600 UHP Pressure Regulator

Last update: Jul 01, 2024
Available in: en/CN
Complete UHP Solution

Last update: Dec 09, 2024
Available in: en/JA/CN