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Diaphragm loaded high pressure regulator for HP & UHP gases - RX3600
RX3600 is a diaphragm loaded high pressure regulator for HP & UHP applications.
Key advantages
  • Unique threadless design in all versions for a higher purity level
  • Optimized supply pressure effect and excellent flow stability
  • Life duration according to CGA E4
  • Vacuum to 310 bar (4,500 psig) inlet
  • Assembling, testing & packaging in cleanroom: Class ISO 4
  • Individual serial number for full traceability
  • Electropolished surface per SEMI F19 UHP Grade
  • 316L VAR® stainless steel double melt per SEMI F20 option available

CONSTRUCTION MATERIAL

  Parts Material
Wetted parts Body SS 316L, VAR
Seat PCTFE (VESPEL® optional)
Diaphragm SS 316L (Hastelloy® optional)
Poppet SS 316L (Hastelloy® optional)
Spring SS 316L (Hastelloy® optional)
Spring Holder SS 316L
Non-wetted parts Bonnet SS 303
Handwheel PA 6.6
Others Stainless Steel and Brass

SURFACE FINISH

S V U
Ra 0.4 μm (15 μin) Ra 0.25 μm EP (10 μin) Ra 0.13 μm EP (5 μin)  

 

Flow capacity (Cv) 0.15
Supply pressure effect I* 0.5 
*1 bar / 100 bar inlet pressure change
Specifications
Max inlet pressure240 / 310 bar (3,500 / 4,500 psig)
Outlet Pressure34 / 100 bar (500 / 1,450 psig)
Regulator typeFree diaphragm
Burst pressure300% of operating pressure
Proof pressure150% of operating pressure
Temperature range-20°C to +65°C (-4°F to +149°F)
Certified max. helium outboard leak rate≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate - at max. pressure≤ 1 x 10-8 mbar.l/s
Certified max. helium inboard leak rate - at max. pressure≤ 1 x 10-9 mbar.l/s
Dimensional drawings
Drawing
Product Configurator
 
Regulator type
Outlet Pressure
Seat material
Cv value
Body material
Surface finish
Porting configuration
Connections
Actuator
Inlet pressure
Options
RX
36
K
K
015
S
S
2W1
4F
M
240
H
 
High outlet pressure with diaphragm (Free diaphragm)
36
34 bar (500 psig)
K
100 (1,450 psig
L
PCTFE*
K
Vespel
V
0.15
015
Stainless Steel AISI 316L
S
Stainless Steel AISI 316 AOD Var
V
Ra 0.4 μm (15 μin)
S
Ra 0.25 μm EP (10 μin)
V
Ra 0.13 μm EP (5 μin)
U
2 ports
2W1
3 ports
3W4
4 ports
4W6
1/4” Female VCR
4F
1/4” Male VCR
4M
Handwheel
M
240 bar (3,500 psig)*
240
310 bar (4,500 psig)
310
Hastelloy Trim
H
Gauge (bar/PSI)
PG0
Gauge (MPa)
PG1
* PCTFE seat only available for a maximum inlet pressure of 240 bar (3,500 psig)

Downloadable catalogs, brochures
  • Download
    RX3000 UHP Pressure Regulator
    Last update: Feb 23, 2024
    Available in: en/JA
  • Download
    RX3100 UHP Pressure Regulator
    Last update: Feb 23, 2024
    Available in: en
  • Download
    RX3600 UHP Pressure Regulator
    Last update: Feb 23, 2024
    Available in: en
  • Download
    RX3700 UHP Pressure Regulator
    Last update: Feb 23, 2024
    Available in: en
  • Download
    RX3900 UHP Pressure Regulator
    Last update: Feb 23, 2024
    Available in: en
  • Download
    RX4000 UHP Pressure Regulator
    Last update: Dec 04, 2023
    Available in: en/JA
  • Download
    RX4100 UHP Pressure Regulator
    Last update: Oct 11, 2023
    Available in: en
  • Download
    Complete UHP Solution
    Last update: Dec 04, 2023
    Available in: en/JA
  • Download
    RX1000 Compact UHP Pressure Regulator
    Last update: Feb 23, 2024
    Available in: en/JA
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