Product | Rotarex

Diaphragm low pressure line valve for HP & UHP gases - RX12

RX12 is a diaphragm valve for HP & UHP applications. Its springless design keeps the highest level of purity of the gas. The RX12 is intended for low pressure up to 15 bar. Two actuation are available for purchase : multi-turn handwheel or pneumatic actuator.

Key advantages

100% Helium Leak Test performed
Available in sizes 1/2" to 3/4" to support a wide range of connections
Assembling, testing & Packaging in cleanroom: Class ISO 4
Individual serial number for full traceability
Electropolished surface roughness per SEMI F19 UHP Grade
316L VAR® stainless steel double melt per SEMI F20 option available
Excellent purgeability due to optional purge ports
Fluid specific seat material as standard options
Replaceable seat

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CONSTRUCTION MATERIAL

	Parts	Material
Wetted parts	Body	SS 316L, VAR
	Seat	PCTFE, PVDF, VESPEL®
	Diaphragm	Phynox®
Non-wetted parts	Backup diaphragm	Phynox®
	Handwheel	Aluminium
	Actuator Body	Aluminium
	Others	Stainless Steel, Alloys and brass

SURFACE FINISH

S	V	U
Ra 0.4 μm (15 μin)	Ra 0.25 μm EP (10 μin)	Ra 0.13 μm EP (5 μin)

TEMPERATURE RANGE

Seat (Actuation type)	Temperature Range
PCTFE / PVDF (manual & pneumatic(1))	-40°C to +65°C (-40°F to +149°F)
Vespel® (manual & pneumatic(1))	-40°C to +150°C (-40°F to +302°F)

(1) -20°C pneumatic versions

VALVE VERSION / MAX. WORKING PRESSURE

Valve	Max. working pressure
RX12 (MT) Multiturn handwheel	15 bar
RX12 (PP2) Pneumatically actuated	15 bar

All specifications subject to change without notice.

Specifications

Max. working pressure	See table above
Pneumatic actuator opening pressure	5 to 7 bar
Temperature range	See table above
Flow capacity (cv)	1.75
Nominal seat diameter	12 Mm
Wetted volume	< 7 cm3
Burst pressure	> 700 bar
Certified max. helium outboard leak rate	≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)	≤ 1 x 10-9 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)	≤ 1 x 10-9 mbar.l/s

Dimensional drawings

Product Configurator

	Surface finish	Actuation	Porting configuration	Body material	Seat material	End connection	Options
RX12	S	MT	2W1	I	K	V 1/2 F	CI
	Ra 0.4 μm (15 μin Ra) S Ra 0.25 μm EP (10 μin) V Ra 0.13 μm EP (5 μin)(1) U	Multi-Turn Handwheel (15 bar) MT Pneumatically actuated (15 bar)* PP2*	2 ports in line 2W1 2 Ports in line, upstream purge port - left side 2 WPEG 2 Ports in line, downstream purge port - left side 2 WPSG 2 Ports in line, 2 purge ports upstream/ Downstream - left side 2 W1p2 2 ports in line, full passage, downstream branch 3WT 2 ports in line, full passage, downstream branch, downstream purge port 3 WTPS	SS 316L I Hastelloy®** H VAR A	PCTFE (Kel-F®) K PI (Vespel®) V PVDF P	Metal face seal 1/2” - Female V 1/2 F Metal face seal 1/2” - Male V 1/2 M Metal face seal 3/4” - Female V3/4F Metal face seal 3/4” - Male V3/4M BWO 1/2” B1/2 BWO 1/4” B1/4 Compression tube fittings RDB12 Compression tube fittings RDB3/4 Compression tube fittings RDB18	Electric limit switch*** CI