RX12 is a diaphragm valve for HP & UHP applications. Its springless design keeps the highest level of purity of the gas. The RX12 is intended for low pressure up to 15 bar. Two actuation are available for purchase : multi-turn handwheel or pneumatic actuator.
Key advantages
100% Helium Leak Test performed
Available in sizes 1/2" to 3/4" to support a wide range of connections
Assembling, testing & Packaging in cleanroom: Class ISO 4
Individual serial number for full traceability
Electropolished surface roughness per SEMI F19 UHP Grade
316L VAR® stainless steel double melt per SEMI F20 option available
Excellent purgeability due to optional purge ports
HP & UHP line valve Flow capacity 3.5 Springless diaphragm
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