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Diaphragm low pressure line valve for HP & UHP gases - RX12
RX12 is a diaphragm valve for HP & UHP applications. Its springless design keeps the highest level of purity of the gas. The RX12 is intended for low pressure up to 15 bar. Two actuation are available for purchase : multi-turn handwheel or pneumatic actuator.
Key advantages
  • 100% Helium Leak Test performed
  • Available in sizes 1/2" to 3/4" to support a wide range of connections
  • Assembling, testing & Packaging in cleanroom: Class ISO 4
  • Individual serial number for full traceability
  • Electropolished surface roughness per SEMI F19 UHP Grade
  • 316L VAR® stainless steel double melt per SEMI F20 option available
  • Excellent purgeability due to optional purge ports
  • Fluid specific seat material as standard options
  • Replaceable seat

CONSTRUCTION MATERIAL

  Parts Material
Wetted parts Body SS 316L, VAR
Seat PCTFE, PVDF, VESPEL®
Diaphragm Phynox®
Non-wetted parts Backup diaphragm Phynox® 
Handwheel Aluminium
Actuator Body Aluminium
Others Stainless Steel, Alloys and brass

SURFACE FINISH

S V U
Ra 0.4 μm (15 μin) Ra 0.25 μm EP (10 μin) Ra 0.13 μm EP (5 μin)  

TEMPERATURE RANGE

Seat (Actuation type) Temperature Range
PCTFE / PVDF (manual & pneumatic(1)) -40°C to +65°C (-40°F to +149°F)
Vespel® (manual & pneumatic(1)) -40°C to +150°C (-40°F to +302°F)

(1) -20°C pneumatic versions

VALVE VERSION / MAX. WORKING PRESSURE

Valve Max. working pressure
RX12 (MT) Multiturn handwheel 15 bar
RX12 (PP2) Pneumatically actuated 15 bar

All specifications subject to change without notice.

Specifications
Max. working pressureSee table above
Pneumatic actuator opening pressure5 to 7 bar
Temperature rangeSee table above
Flow capacity (cv)1.75
Nominal seat diameter12 Mm
Wetted volume< 7 cm3
Burst pressure> 700 bar
Certified max. helium outboard leak rate≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)≤ 1 x 10-9 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)≤ 1 x 10-9 mbar.l/s
Dimensional drawings
DrawingDrawing
Product Configurator
 
Surface finish
Actuation
Porting configuration
Body material
Seat material
End connection
Options
RX12
S
MT
2W1
I
K
V 1/2 F
CI
 
Ra 0.4 μm (15 μin Ra)
S
Ra 0.25 μm EP (10 μin)
V
Ra 0.13 μm EP (5 μin)(1)
U
Multi-Turn Handwheel (15 bar)
MT
Pneumatically actuated (15 bar)*
PP2*
2 ports in line
2W1
2 Ports in line, upstream purge port - left side
2 WPEG
2 Ports in line, downstream purge port - left side
2 WPSG
2 Ports in line, 2 purge ports upstream/ Downstream - left side
2 W1p2
2 ports in line, full passage, downstream branch
3WT
2 ports in line, full passage, downstream branch, downstream purge port
3 WTPS
SS 316L
I
Hastelloy®**
H
VAR
A
PCTFE (Kel-F®)
K
PI (Vespel®)
V
PVDF
P
Metal face seal 1/2” - Female
V 1/2 F
Metal face seal 1/2” - Male
V 1/2 M
Metal face seal 3/4” - Female
V3/4F
Metal face seal 3/4” - Male
V3/4M
BWO 1/2”
B1/2
BWO 1/4”
B1/4
Compression tube fittings
RDB12
Compression tube fittings
RDB3/4
Compression tube fittings
RDB18
Electric limit switch***
CI
* Add NO for normally open or NC for normally closed
** On demand
*** For pneumatic actuators only
Downloadable catalogs, brochures
  • Download
    RX12
    Last update: Dec 04, 2023
    Available in: en/JA
  • Download
    RX20
    Last update: Dec 04, 2023
    Available in: en/JA
  • Download
    RX04
    Last update: Jan 30, 2024
    Available in: en/JA
  • Download
    RX04F
    Last update: Jan 30, 2024
    Available in: en/CN/JA
  • Download
    RX08
    Last update: Jan 30, 2024
    Available in: en/JA
  • Download
    RX08F
    Last update: Jan 30, 2024
    Available in: en/CN/JA
  • Download
    Complete UHP Solution
    Last update: Dec 04, 2023
    Available in: en/JA
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