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Diaphragm high and low pressure line valve for HP & UHP gases - RX04F
RX04F is a diaphragm valve for HP & UHP applications.
Key advantages
  • 100% Helium Leak Test performed
  • Assembling, testing & packaging in cleanroom
  • Reverse seat design for high life cycle
  • Individual serial number for full traceability
  • Electropolished surface
  • Fluid specific seat material as standard options
  • Low internal volume
  • 316L VAR® stainless steel double melt per SEMI F20 option available
  • Multiturn handwheel with open/close indicator
  • Loto option
  • Pneumatic version available
  • Indicative switch option

Also available with LOTO device

CONSTRUCTION MATERIAL

  Parts Material
Wetted parts Body SS 316L,VAR
Seat PCTFE, PVDF, VESPEL®
Diaphragm Phynox®
Non-wetted parts Backup diaphragm Phynox® 

SURFACE FINISH

S V
Ra 0.4 μm (15 μin) Ra 0.25 μm EP (10 μin)

TEMPERATURE RANGE

Seat (Actuation type) Temperature Range
PCTFE / PVDF (manual & pneumatic*) -40°C to +65°C (-40°F to +149°F)
Vespel® (manual & pneumatic*) -40°C to +150°C (-40°F to +302°F)

VALVE VERSION / MAX. WORKING PRESSURE

Valve Max. working pressure
RX04F (LM) Multiturn handwheel 20 bar
RX04F (HM) Multiturn handwheel 240 bar
RX04F (BP) Pneumatically actuated 10 bar
RX04F (LP) Pneumatically actuated 20 bar 
RX04F (HP) Pneumatically actuated 240 bar

All specifications subject to change without notice.

Specifications
Max. working pressureSee table above
Pneumatic actuator opening pressure5 to 7 bar
Temperature rangeSee table above
Flow capacity (cv)0,2
Nominal seat diameter4 Mm
Wetted volume< 1.2 cm3
Burst pressure> 700 bar
Certified max. helium outboard leak rate≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)≤ 1 x 10-9 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)≤ 1 x 10-9 mbar.l/s
Dimensional drawings
Drawing
Product Configurator
 
Body type
Surface finish
Maximum delivery pressure
Porting configuration
Body material
Seat material
End connection
Options
RX04
F
S
LM
2W1
K
4MI
FT
 
Forged body
F
Ra 0.4 μm (15 μin)
S
Ra 0.25 μm EP (10 μin)
V
Multi-Turn Handwheel (20 bar)
LM
Multi-Turn Handwheel (240 bar)
HM
Pneumati cally actuated (10 bar)
BP*
Pneumati cally actuated (20 bar)
LP*
Pneumati cally actuated (240 bar)
HP
2W1
2W1
SS 316L
VAR**
A
PCTFE (Kel-F®)
K
PI (Vespel®)
V
PVDF
P
Metal face seal 1/4” - Male fix
4MI
Panel Mounting
FT
Electric limit switch***
CI
LOTO
MSF
(1) Add NO for normally open or NC for normally closed
(2) On demand
(3) On HP and LP actuators only
Downloadable catalogs, brochures
  • Download
    RX04
    Last update: Jan 30, 2024
    Available in: en/JA
  • Download
    RX04F
    Last update: Jan 30, 2024
    Available in: en/CN/JA
  • Download
    RX08
    Last update: Jan 30, 2024
    Available in: en/JA
  • Download
    RX08F
    Last update: Jan 30, 2024
    Available in: en/CN/JA
  • Download
    RX12
    Last update: Dec 04, 2023
    Available in: en/JA
  • Download
    RX20
    Last update: Dec 04, 2023
    Available in: en/JA
  • Download
    Complete UHP Solution
    Last update: Dec 04, 2023
    Available in: en/JA
  • Download
    LOTO Locking Mechanism for UHP Line Valves
    Last update: Jan 25, 2023
    Available in: en
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