Product | Rotarex

Diaphragm low pressure line valve for HP & UHP gases - RX20

Specialty gas systems > Ultra high purity gas equipment > Springless diaphragm line valves

RX20 is a diaphragm valve for HP & UHP applications. Its springless design keeps the highest level of purity of the gas. The RX20 is intended for low pressure up to 15 bar. Two actuation are available for purchase : multi-turn handwheel or pneumatic actuator.

Key advantages

100% Helium Leak Test performed
Available in sizes 3/4" to 1" to support a wide range of connections
Assembling, testing & Packaging in cleanroom: Class ISO 4
Individual serial number for full traceability
Electropolished surface roughness per SEMI F19 UHP Grade
316L VAR® stainless steel double melt per SEMI F20 option available
Excellent purgeability due to optional purge ports
Fluid specific seat material as standard options
Replaceable seat

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CONSTRUCTION MATERIAL

	Parts	Material
Wetted parts	Body	SS 316L, VAR
	Seat	PCTFE, PVDF, VESPEL®
	Diaphragm	Phynox®
Non-wetted parts	Backup diaphragm	Phynox®
	Handwheel	Aluminium
	Actuator Body	Aluminium
	Others	Stainless Steel and Alloys

SURFACE FINISH

S	V	U
Ra 0.4 μm (15 μin)	Ra 0.25 μm EP (10 μin)	Ra 0.13 μm EP (5 μin)

TEMPERATURE RANGE

Seat (Actuation type)	Temperature Range
PCTFE / PVDF (manual & pneumatic)	-20°C to +65°C (-4°F to +149°F)
Vespel® (manual & pneumatic)	-20°C to +150°C (-4°F to +302°F)

VALVE VERSION / MAX. WORKING PRESSURE

Valve	Max. working pressure
RX20 (MT) Multiturn handwheel	15 bar
RX20 (PP2) Pneumatically actuated	15 bar

MANUAL ACTUATION

Parts for all valve grades
Upper spindle	Brass
Handle	Aluminium
All others	Stainless Steel or Alloys

PNEUMATIC ACTUATION

Parts
Actuator Body	Stainless Steel / Aluminium
Piston	Brass / Aluminium / Stainless Steel
O-ring	NBR
All others	Stainless Steel or Alloys

All specifications subject to change without notice.

Specifications

Max. working pressure	See table above
Pneumatic actuator opening pressure	5 to 7 bar
Temperature range	See table above
Flow capacity (cv)	3.5
Nominal seat diameter	20 mm (0.79”)
Burst pressure	>700 bar (10152 psig)
Certified max. helium outboard leak rate	≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure)	≤ 1 x 10-9 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure)	≤ 1 x 10-9 mbar.l/s

Dimensional drawings

Product Configurator

	Surface finish	Actuation	Porting configuration	Body material	Seat material	End connection	Options
RX20	S	MT	2V1	I	K	V 3/4 F	CI
	Ra 0.4 μm (15 μin Ra) Ra 0.25 μm EP (10 μin) Ra 0.13 μm EP (5 μin)(1)	Multi-Turn Handwheel (15 bar) Pneumatically actuated (15 bar)	2 ports in line 2 Ports in line, upstream purge port - left side 2 Ports in line, downstream purge port - left side 2 Ports in line, 2 purge ports up-/downstream-left side	SS 316L Hastelloy®(1) VAR	PCTFE (Kel-F®) PI (Vespel®) PVDF	Metal face seal 3/4” - Femal Metal face seal 3/4” - Male BWO 3/4” (Butt Orbital Weld) BWO 1” (Butt Orbital Weld) Metal face seal 1”- Male Metal face seal 1'' - Female Compression tube fittings Compression tube fittings	Electric Limit Switch(3)

I am interested

(1) On demand
(2) Add NO for normally open or NC for normally closed
(3) Only for pneumatic actuators

Downloadable catalogs, brochures

RX20

Last update: Jan 26, 2023
Available in: en