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Applications

Rotarex is presenting its full equipment range for high-purity and extra-high-purity gases.

Used in the all-Semiconductor manufacturing process, the products must ensure the highest level of tightness and avoid any contamination of the gas they carry.

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Products features

100% Helium Leak Test performed
Electropolished surface
Individual serial number for full traceability
Manual / pneumatic actuation
Forged body available (RX04F, RX08F)
316L VAR® stainless steel double melt per SEMI F20 option available

Flow capacity overview

RX04
0.2
RX04F
0.2
RX08
0.5
RX08F
0.5
RX12
1.75
RX20
3.5

Make your choice

Discover key advantages of each product as well as the flow curves, drawings, product materials and a complete datasheet:

Springless diaphragm line valves
  • Product
    RX04
    HP & UHP line valve
    Flow capacity 0.2
    Springless diaphragm
  • Product
    RX08
    HP & UHP line valve
    Flow capacity 0.5
    Springless diaphragm
  • Product
    RX04F
    HP & UHP line valve
    Flow capacity 0.2
    Forged body
  • Product
    RX08F
    HP & UHP line valve
    Flow capacity 0.5
    Forged body
  • Product
    RX12
    HP & UHP line valve
    Flow capacity 1.75
    Springless diaphragm
  • Product
    RX20
    HP & UHP line valve
    Flow capacity 3.5
    Springless diaphragm

Why Rotarex?

Experience

100 years in the business guarantee the reliability of the products

Quality

The same quality level as Rotarex Puretec cylinder valves, a worldwide leader

Support

Customer-oriented philosophy helps to achieve and keep the efficient results

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See Also

Pressure Regulators Connectors Fittings
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