UHP Pressure Regulators | Rotarex

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Applications

Rotarex is presenting its full equipment range for high-purity and extra-high-purity gases.

Used in the all-Semiconductor manufacturing process, the products must ensure the highest level of tightness and avoid any contamination of the gas they carry.

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Technologies overview

VAC (Tied diaphragm)

VAC (Tied diaphragm)

Product line features

Assembling, testing & packaging in cleanroom: Class ISO 4

Life duration according to CGA E4

Electropolished surface per SEMI F19 UHP Grade

316L VAR® stainless steel double melt per SEMI F20 option available

Sub-atmospheric option available

Individual serial number for full traceability

Make your choice

Discover key advantages of each product as well as the flow curves, drawings, product materials and a complete datasheet:

Ultra high purity gas pressure regulators

RX1000

HP & UHP regulator
Cv 0.04, 0.09, 0.15
Free diaphragm
RX3000

HP & UHP regulator
Cv 0.09, 0.15
Free diaphragm
RX3100

HP & UHP regulator
Cv 0.09
Tied diaphragm
RX3200

HP & UHP regulator
Cv 0.09, 0.15
Tied diaphragm
RX3600

HP & UHP regulator
Cv 0.15
Free diaphragm
RX3700

HP & UHP regulator
Cv 0.09, 0.15
Tied diaphragm
RX3900

HP & UHP regulator
Cv 0.09
Tied diaphragm
RX4000

HP & UHP regulator
Cv 0.15, 0.25, 0.5, 0.9, 1.1
Free diaphragm
RX4100

HP & UHP regulator
Cv 0.5
Tied diaphragm
RX4200

HP & UHP regulator
Cv 0.15, 0.25, 0.5, 0.9, 1.1
Tied diaphragm

Why Rotarex?

Experience

100 years in the business guarantee the reliability of the products

Quality

The same quality level as Rotarex Puretec cylinder valves, a worldwide leader

Support

Customer-oriented philosophy helps to achieve and keep the efficient results

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See Also

Valves

Fittings

Connectors

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