UHP Vacuum Generators – A key innovation in the Rotarex UHP range for the semiconductor industry

Safe and Efficient Vacuum Solutions for Ultra-High Purity Gas Applications

These vacuum generators are specifically developed for use in critical environments such as semiconductor fabrication, chemical processing, and other high-purity industries. They provide a reliable solution when working with toxic, corrosive, or flammable gases, helping reduce contamination risks and ensure operator safety. Used together with purge systems, the vacuum generator enables safe evacuation of residual gases. As inert gas flows through the body of the device, a vacuum is naturally generated — minimizing hazardous pressure buildup and ensuring clean gas lines during maintenance or disconnection.

What is a UHP vacuum generator and how does it work?

UHP block-type vacuum generator

The UHP block-type vacuum generator operates with an inlet pressure range of 5.3 to 7.6 bar and a temperature range from -40°C to +71°C. The RXVGB series is designed for use before opening a gas cylinder or disconnecting a gas line.

The process is based on the Venturi effect and Bernoulli’s principle. Compressed air enters through an inlet and passes through a narrow section called a nozzle. As the air speeds up, its pressure drops. It then flows into a wider section called a diffuser, which creates a low-pressure area. This low pressure pulls in air from a secondary inlet, generating suction.

As a result, the system helps reduce contamination risks during UHP gas evacuation, minimize the risk of accidents, and prevent hazardous pressure buildup during maintenance.

UHP module-type vacuum generator

The RXVGM operates with an inlet pressure range from 4.8 to 7.6 bar and a temperature range from -10°C to +71°C. By choosing the UHP module-type vacuum generator, you benefit from an incorporated check valve, which offers a wide range of advantages. It provides protection against reverse flow, ensures the etching line remains uncontaminated, and eliminates risks related to moisture, such as the attachment of corrosive gases.

There are four bleed flow rate options available—2.5, 5, 8, and 15 standard liters per minute—at 80 psi nitrogen pressure. This allows you to choose between slow pressure equalization or faster pressure build-up, depending on your system’s requirements.

When nitrogen enters, the check valve allows a small, steady flow of gas. As pressure builds, the internal piston lifts, and the vacuum generator becomes ready to operate. At the same time, the check valve fully opens, and the system begins generating a vacuum.

Another advantage of the module type is its pneumatic actuation. The normally closed port enables remote operation for the safe exhaust of hazardous gases.

Despite its complex functionality, this module-type vacuum generator remains compact—maintaining both high performance and safety characteristics.

Find the Right Vacuum System for Your Needs

Whether you need a simple block version or a more advanced module with a built-in check valve, Rotarex offers the right vacuum generator for your ultra-high purity gas application.