Ultra High Purity Gas Cylinder Valves

PREMIUM GAS CYLINDER VALVES FOR ULTRA HIGH PURITY GASES

Electronic industry has complex processes which requires the use of toxic and corrosive gases. These manufacturing processes need the highest gas purity level so that no particle can alter the smooth operation of the final product.

Equipment such as valves must ensure the highest level of tightness and avoid any contamination of the gas they carry. Rotarex Puretec is the market leader in this type of high-tech equipment.

Driven by excellence, we pursue the highest tightness to deliver robust valves with a wide range of technologies to choose from: standard diaphragm and tied diaphragm, packed and O-ring types, as well as valves with integrated pressure regulators (VIPRs).

The UHP cylinder valves are produced from durable materials to resist the dangerous nature of the UHP gases and to serve you for a long time. Assembled in the cleanroom, they guarantee the utmost level of purity.

SAFETY & QUALITY

  • 100% tested
  • Specific packaging to respect the purity level
  • Cleanroom manufacturing for all UHP valves

ALL CONNECTIONS AND STANDARDS

  • Outlet connections for all standards & gases: DIN, CG, JIS, BS, AFNOR, UNI, NEN, NBR
  • All inlet connections

ALL TECHNOLOGIES TO FIT YOUR APPLICATION

  • Tied diaphragm, diaphragm, packed seal, bellow seal or O-ring seal technologies
  • Sealing level up to 10-11 mbarl/s

ALL GAS TYPES

  • HP & UHP gas valves for Semiconductor manufacturing, industrial processing, laboratories, calibration and other applications
  • For electronics, corrosive, toxic and specialty gases
  • Purity levels from 4.0 to 9.0 and more
  • Low and high pressure

Ultra high purity gas cylinder valves

Tied diaphragm seal type

  • High pressure
    Soft seat
    4mm orifice
  • High pressure Pneumatic valve
    Soft seat
    4mm orifice
  • Tied diaphragm cylinder valve for fluorine mixtures with pneumatic actuator
  • Oleo-Pneumatic
    Soft seat
    4mm orifice
  • Dual Port UHP valve
    Soft seat
    4mm orifice
  • High pressure valve
    Metal / Metal sealing
    4mm orifice
  • Oleo-pneumatic valve
    Metal / Metal sealing
    3.5mm orifice
  • High pressure manual valve
    Soft seat
    6mm orifice
  • Oleo-Pneumatic
    Soft seat
    6mm orifice
  • Dual Port UHP valve
    Soft seat
    6mm orifice
  • Tied-diaphragm seal
    Low Pressure
    8mm orifice
  • Pneumatic actuator
    Low Pressure
    8mm orifice
  • Dual Port UHP valve
    Soft seat
    8mm orifice
Contact us
In case you have any questions, please feel free to contact us using the below form.

I accept that Rotarex may transfer this contact data to the respective Rotarex sales or customer service representative or technician who can best respond to my request, and that Rotarex may use this information to respond to my information request.


Your contact details will be stored on a secure server for a reasonable period of time in order to fulfill your information request. Please refer to the Website Privacy Notice for more information regarding how your data/information is processed.

Please send me additional information such as white papers and new product announcements via email for the indicated product categories

×
Loading