Ultra-High Purity line valves
A full range of springless diaphragm line valves for high-purity and ultra-high-purity gases. Semiconductor and photovoltaic cell manufacturing processes require the use of toxic and corrosive gases at the highest levels of purity. Therefore, the valves and equipment used must ensure exceptional tightness, preventing any particle generation in the gas they transport. Rotarex has developed a comprehensive range of diaphragm line valves, delivering safety, purity, and reliability throughout the entire process.
Key features of UHP line valves
- Diaphragm technology ensures no particle generation by eliminating moving parts in the wetted area
- Excellent sealing to prevent leakage of toxic and corrosive gases for maximum safety
- Materials specially designed to resist the corrosive nature of UHP gases
- Electropolished surface to maintain gas purity
_U93uw1.jpg "Diaphragm low pressure line valve for HP & UHP gases - M12")
