Pneumatic Diaphragm Valves – Efficient Flow Control for Electronic Applications

Combining precision and reliability, Rotarex pneumatic diaphragm valves are suitable for use in semiconductor and photovoltaic cells manufacturing and other processes requiring ultra-high-purity and optimal performance, where purity, leak tightness, and durability are critical.

To meet a wide range of system requirements, our UHP line valves are offered in a wide variety of configurations, with inlet pressures from 10 to 240 bar, flow rate from 0.2 to 3.5, and seat diameters ranging from 4 to 20 mm, providing optimal performance across ultra-high-purity applications. Some models are also available with a forged body (F series).

Discover our full series and find the solution that best meets your needs or get in touch with our specialists, who will be happy to guide you toward the right solution.

Ultra high purity gas line valves

Springless diaphragm line valves

RX04

HP & UHP line valve
Flow capacity 0.2
Springless diaphragm
RX08

HP & UHP line valve
Flow capacity 0.5
Springless diaphragm
RX04F

HP & UHP line valve
Flow capacity 0.2
Forged body
RX08F

HP & UHP line valve
Flow capacity 0.5
Forged body
M12

HP & UHP line valve
Flow capacity 1.75
Springless diaphragm
M20

HP & UHP line valve
Flow capacity 3.5
Springless diaphragm

Tied diaphragm line valves

D604

Manual line valve
Soft Seat
4mm orifice
D654

Oleo-pneumatic line valve
Soft Seat
4mm orifice
D688

Pneumatic line valve
Soft knife edge Seat
4mm orifice
D639S

Manual line valve
Soft Seat
6mm orifice
D689S

Oleo-pneumatic line valve
Soft Seat
6mm orifice

What is a Pneumatic Diaphragm Valve?

A pneumatic valve is operated by a pneumatic actuator that uses compressed air to open or close the valve. These valves are typically normally closed (NC) but are also available in normally open (NO) configurations.
Key advantages:

100% Helium Leak Test performed
Individual serial number for full traceability
Pneumatic actuator
Electropolished surface roughness per SEMI F19 UHP Grade

Key Benefits of Pneumatically Actuated Diaphragm Valves

One of the main advantages of high-purity valves with pneumatic actuator is that they can be remotely actuated via a control system or computer, eliminating the need to physically access the area where the valve is installed. This is especially valuable in environments that require special protective equipment for entry.

In ultra-high-purity (UHP) systems, where the valves often handle toxic, corrosive or hazardous gases, pneumatic actuation enhances operator safety and simplifies system monitoring operations.
Are you looking for a complete Ultra-High-Purity Solution? Rotarex full UHP series includes UHP pressure regulators, UHP Fittings, UHP Connectors, Canisters, Vacuum Generators, engineered to maintain purity, reliability, and safety across your gas delivery system.

Main Applications by Industry

Semiconductors

Used in process gas lines, VMBs, and VMPs for applications within the semiconductor manufacturing process, for critical steps such as etching, deposition, and lithography, where ultra-high-purity and leak-tight performance are essential.

Photovoltaic (Solar Panel Manufacturing)

Ideal for managing specialty gases in thin-film deposition and other vacuum processes, ensuring clean and consistent flow monitoring.

Electronics

Support high-purity gas distribution in the production of advanced electronic components, including displays, sensors, and microelectronics.

Pharmaceutical & Biotechnology

Used in gas supply systems for controlled environments, ensuring hygienic and contaminant-free operation in cleanroom or sterile conditions.

Laboratories & R&D

Provide precise control and purity in analytical instruments, calibration systems, and research setups handling high-purity or specialty gases, where the highest levels of cleanliness, leak tightness, and contamination prevention are critical.

Materials, Sizes, and Connection Types Available

Valve Body Material: Stainless Steel 316L, UHP Material - Semi F20
Seat Material: PCTFE, Polyimid
Operating pressure: -40°C to +150°C
Pneumatic actuator opening pressure: 5 to 7 bar
Flow rate: flow rate from 0.2 to 3.5
Size:Compact Design
Electric limit Switch
Panel Mounted
LOTO System

How to Select the Right Diaphragm Valve?

Choosing the right UHP equipment can be complex, especially with so many variables like gas type, pressure range, flow rate, and application, specific requirements. That's why our team of gas supply specialists is here to support you every step of the way:

Select the right valve for your UHP system
Ensure material compatibility and compliance
Corrosion resistant thanks to specific surface treatment
Optimize safety and performance

If you already know which valve you need, we have created an online configurator on each product page to help you determine the exact configuration of your line valve.

Frequently Asked Questions (FAQ)

What is the difference between manual and pneumatic diaphragm valves?

Manual diaphragm valves are designed to be operated by a handle. They are used in situations where you don't need to adjust them a lot.
Pneumatic diaphragm valves are operated by compressed air to enable remote control of the valve. They are ideal for applications using hazardous or toxic gases, or in hard-to-reach locations to ensure operator safety and process efficiency.

Where are pneumatic diaphragm valves typically used in the semiconductor manufacturing process?

Pneumatic diaphragm sealed valves are used in some semiconductor manufacturing processes where precise gas flow control and ultra-high purity are essential. Typical uses include bulk gas delivery to fabs, oxidation furnaces, lithography tools, etching and deposition systems, ion implantation, annealing, and cleaning steps. These valves are ideal for controlling hazardous or sensitive gases with high precision while enhancing safety and enabling automation.

What are the main benefits of using a pneumatic diaphragm valve?

What is the difference between normally closed (NC) and normally open (NO) valves?

The difference is the default position of the valve when no signal is sent to the pneumatic valve. An NC valve, normally closed, will be closed by default and must be actuated to open. This is the most common configuration. An NO valve, normally open, will be open by default and will close when actuated. It is used when a constant flow is required and no interruption should occur.
The type of valve depends mainly on the safety requirements and the process.

Connect with an Expert