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PREMIUM GAS SYSTEMS FOR ULTRA HIGH PURITY GASES

When it comes to industries where even the smallest trace of contamination can compromise an entire production run, standard gas delivery systems simply aren't good enough. Ultra high purity gas systems are engineered specifically to transport, regulate and deliver gases with contamination levels measured in parts per billion, ensuring the integrity of processes where precision isn't optional, it's essential.

These systems combine specialized materials, advanced purification technology and meticulous engineering to prevent particle contamination, moisture intrusion and cross-contamination at every point in the gas delivery chain. From the initial supply source to the final point of use, every component works together to maintain the exceptional purity levels that critical applications demand.

Whether you're running a semiconductor fab, managing a pharmaceutical cleanroom, or supporting aerospace research, choosing the right premium gas system isn't just about performance. It's about protecting your product quality, your equipment, and ultimately, your bottom line.
Equipment for gas systems

Safety & Quality

  • State-of-the-art UHP gas solutions including ultra high purity pressure regulators, line valves, cylinder valves, cylinder connectors and fittings
  • 100% Helium leak test performed on all products
  • Specific packaging to respect the purity level
  • ISO 4 Cleanroom manufacturing conditions

All gas types

  • HP & UHP gas equipment and cylinder valves for semiconductor, photovoltaic (solar cells), LED light manufacturing processes and other applications
  • For electronics, corrosive, toxic and specialty gases
  • Purity levels from 6.0 to 9.0 and more
  • Precise control of low to high pressure gases and fluids

All technologies to fit your application

  • Tied diaphragm, diaphragm, packed seal, bellow seal or o-ring seal technologies
  • Sealing level up to 10-11 mbarl/s

All connections & standards

  • Gas systems : various end connections available to cover all needs and all applications
  • Cylinder valves : Inlet & outlet connections for all standards & gases: DIN, CG, JIS, BS, AFNOR, UNI, NEN, NBR
If you want to learn more about how to select the right partner for demanding UHP applications, read our blog article: Why choose Rotarex for your Ultra High Purity application?
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FULLY CUSTOMIZABLE UHP GAS SOLUTIONS TO FIT ANY SYSTEM CONFIGURATION

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Ready to install UHP gas systems for:
  • Gas Cabinets
  • VMBs (Valves manifold boxes)
  • Process tools
  • Gas Delivery Sytems
  • And many others...
Benefit from Rotarex high performance and quality components such as:

THREADLESS & SPRINGLESS UHP PRESSURE REGULATORS

RX3000 AND RX4000 UHP PRESSURE REGULATORS
  • Single-stage diaphragm pressure regulator for high and ultra high purity gases
  • Unique threadless design for a higher purity level
  • Springless design for tied diaphragm version
  • Sub-atmospheric option available
  • Optimized supply pressure effect and excellent flow stability
  • Life duration according to CGA E4
  • Electropolished surface roughness per SEMI F19 UHP Grade
  • UHP Material - Semi F20 option available

What Are Ultra High Purity Gases?

Ultra high purity (UHP) gases are industrial gases refined to exceptionally high purity levels, typically ranging from 6.0 (99.9999%) to 9.0 (99.9999999%) and beyond. Common UHP gases include nitrogen, oxygen, argon, helium, hydrogen and carbon dioxide. These inert and reactive gases are essential in various industries where even trace levels of impurities or contamination directly impact product quality, process performance, and safety. 

Gas quality is critical in semiconductor manufacturing, pharmaceutical production, analytical instruments and laboratory applications, making proper gas systems and delivery infrastructure a key requirement for optimal performance and compliance with the most stringent industry standards. Rotarex UHP gas systems are engineered to maintain gas purity from the cylinder to the point of use, across the full range of purity levels and gas specifications.

What Are Ultra High Purity Gases?
UHP Applications: Semiconductor, Pharmaceutical & Industrial

UHP Applications: Semiconductor, Pharmaceutical & Industrial

UHP gas systems play a crucial role in industries where gas purity directly determines product quality and process integrity. Rotarex gas systems and components are utilized across a wide range of demanding applications:

  • Semiconductor manufacturing: etching, doping, deposition, and surface fabrication processes require ultra high purity gases to prevent contamination of electronic components and maintain cleanroom environments. Rotarex UHP pressure regulators and line valves are designed for demanding semiconductor applications, with electropolished surface roughness per SEMI F19 UHP Grade and UHP material compliant with SEMI F20 available as an option, depending on the selected product configuration.
  • Pharmaceutical & laboratory: consistent, contamination-free gas supply and precise gas regulation ensure repeatable analysis and production processes, meeting stringent purity specifications for quality control and regulatory compliance.
  • Analytical instruments: gas chromatography, mass spectrometry, and other advanced analytical tools demand UHP gas purity to deliver accurate, consistent measurements. Reliable gas delivery and stable pressure control are essential for instrument performance.
  • Industrial processes: orbital welding, metal fabrication, corrosion control, and energy applications require controlled gas delivery, precise flow rates, and consistent gas quality. Rotarex UHP fittings and cylinder connectors ensure leak-free gas distribution systems spanning all standard connections.
  • Solar panel manufacturing: high-purity gases are essential for thin-film deposition, etching, and surface treatment processes that define panel efficiency and longevity. Rotarex UHP regulators and components ensure contamination-free gas delivery critical to achieving optimal photovoltaic performance and yield.

Why choose Rotarex for your Ultra High Purity application?

Rotarex brings decades of expertise in gas control technology, built specifically around the demands of ultra high purity applications. Every valve, regulator and connector is manufactured in ISO 4 cleanroom conditions and undergoes 100% helium leak testing, so quality is never in question. Beyond manufacturing, we place a strong emphasis on testing and traceability. Each product is individually tested before it leaves our facility, and full traceability is maintained throughout the production process, from raw materials to final assembly.

We support a wide range of gases, pressures, and industries, from semiconductor manufacturing to photovoltaic production, with sealing technologies and connection standards designed to fit your exact application, not a generic one. Choosing Rotarex means choosing a partner who takes purity, testing, and traceability as seriously as you do.

Why choose Rotarex for your Ultra High Purity application?

UHP Solutions

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Category
  • Single-stage diaphragm pressure regulator for HP & UHP gases - RX3000
    Single stage diaphragm
    Cv 0.09, 0.15
    Inlet 21/240 bar
  • Sub-atmospheric pressure regulator for HP & UHP gases - RX3100
    Sub-atmospheric
    Cv 0.09
    Inlet 21 bar
  • Single-stage tied-diaphragm pressure regulator for HP & UHP gases - RX3200
    Single stage tied-diaphragm
    Cv 0.09, 0.15
    Inlet 21/240 bar
  • Single-stage diaphragm pressure regulator for HP & UHP gases - RX4000
    Single stage diaphragm
    Cv 0.15, 0.25, 0.5, 0.9, 1.1
    Inlet 21/117/207/240 bar
  • Sub-atmospheric pressure regulator for HP & UHP gases - RX4100
    Sub-atmospheric regulator
    Cv 0.5
    Inlet 21 bar
  • Single-stage tied-diaphragm pressure regulator for HP & UHP gases - RX4200
    Single stage tied-diaphragm
    Cv 0.15, 0.25, 0.5, 0.9, 1.1
    Inlet 21/117/207/240 bar

Springless diaphragm line valves

  • Diaphragm high and low pressure line valve for HP & UHP gases - RX04
    HP & UHP line valve
    Flow capacity 0.2
    Springless diaphragm
  • Diaphragm high and low pressure line valve for HP & UHP gases - RX08
    HP & UHP line valve
    Flow capacity 0.5
    Springless diaphragm
  • Diaphragm low pressure line valve for HP & UHP gases - M12
    HP & UHP line valve
    Flow capacity 1.75
    Springless diaphragm
  • Diaphragm low pressure line valve for HP & UHP gases - M20
    HP & UHP line valve
    Flow capacity 3.5
    Springless diaphragm

Tied diaphragm line valves

  • High Pressure manual line valve for UHP gases – D604
    Manual line valve
    Soft Seat
    4mm orifice
  • High Pressure line valve for UHP gases with oleo-pneumatic actuator – D654
    Oleo-pneumatic line valve
    Soft Seat
    4mm orifice
  • High Pressure line valve for UHP gases with pneumatic actuator – D688
    Pneumatic line valve
    Soft knife edge Seat
    4mm orifice
  • High Pressure manual line valve for UHP gases – D639S
    Manual line valve
    Soft Seat
    6mm orifice
  • High Pressure line valve for UHP gases with oleo-pneumatic actuator – D689S
    Oleo-pneumatic line valve
    Soft Seat
    6mm orifice
  • Bellows low to high pressure valve for HP, UHP, corrosive gases and fluids – K300
    Bellows valve
    Low or high pressure
    -40°C to + 120°C (ambient)
  • Bellows high pressure valve for HP, UHP, corrosive gases and fluids – HP2000
    Bellows valve
    High pressure
    -40°C to + 120°C (ambient)
  • Bellows low to high pressure valve for HP, UHP, cryogenic gases and fluids –  K900
    Bellows valve
    Low to high pressure
    -196°C to + 250°C (cryogenic)
  • Bellows high pressure valve for HP, UHP, cryogenic gases and fluids –  HP9000
    Bellows valve
    High pressure
    -196 °C to + 250°C (cryogenic)
  • Bellows high pressure valve for HP, UHP, corrosive gases and fluids – HP3000
    Bellows valve
    High pressure
    -40°C to + 120°C (ambient)
  • Bellows low pressure valve for HP, UHP, cryogenic gases and fluids –  SUPRA
    Bellows valve
    Low pressure
    -270°C to + 80°C (cryogenic)
  • Spring type check valve for HP, UHP, cryogenic gases and fluids – CAR(S)
    Check valves
    Low to high pressure
    -196°C to +250°C (cryogenic)

Stainless steel canisters

Vacuum generators

  • High Performance Vacuum Generator Block Type System - RXVGB
    60torr Vacuum
    Without Check Valve
    Block type
  • High Performance Vacuum Generator Module Type System - RXVGM
    100torr Vacuum
    With Check Valve
    Module type

Tied diaphragm seal type

  • High pressure UHP cylinder valve – D304
    High pressure
    Soft seat
    4mm orifice
  • High pressure pneumatic UHP cylinder valve - D385S
    High pressure Pneumatic valve
    Soft seat
    4mm orifice
  • Tied diaphragm cylinder valve for fluorine mixtures with pneumatic actuator - D386S
    Tied diaphragm cylinder valve for fluorine mixtures with pneumatic actuator
  • High Pressure, oleo-pneumatic, UHP cylinder valve - D354
    Oleo-Pneumatic
    Soft seat
    4mm orifice
  • High pressure, dual port UHP cylinder valve - D340S
    Dual Port UHP valve
    Soft seat
    4mm orifice
  • High pressure UHP cylinder valve for highly oxidizing gases – D306
    High pressure valve
    Metal / Metal sealing
    4mm orifice
  • Oleo-pneumatic UHP cylinder valve for highly oxidizing gases – D356
    Oleo-pneumatic valve
    Metal / Metal sealing
    3.5mm orifice
  • High pressure & high flow UHP cylinder valve – D339S
    High pressure manual valve
    Soft seat
    6mm orifice
  • High pressure UHP cylinder valve with Oleo-pneumatic actuator - D389S
    Oleo-Pneumatic
    Soft seat
    6mm orifice
  • Dual port high pressure UHP cylinder valve - D349
    Dual Port UHP valve
    Soft seat
    6mm orifice
  • Low pressure & high flow UHP cylinder valve - D337
    Tied-diaphragm seal
    Low Pressure
    8mm orifice
  • Low pressure & high flow UHP cylinder valve with pneumatic actuator - D387
    Pneumatic actuator
    Low Pressure
    8mm orifice
  • Low pressure & high flow dual port UHP cylinder valve - D342
    Dual Port UHP valve
    Soft seat
    8mm orifice

High purity gas line valves

  • High pressure bundle valve for hydrogen, helium and other gases – D615 ​
    Bundle Valve
    Up to 500 bar
    Manual actuation
  • Pneumatic high-pressure bundle valve for hydrogen, helium and other gases - D655
    Bundle Valve
    Up to 500 bar
    Pneumatic actuation
  • High pressure line valve specific applications - D605
    Hydrogen, methane and acetylene applications
    O-ring
    12mm orifice

High purity gas cylinder valves

Valves with integrated pressure regulator (VIPR)

  • Integrated valve with adjustable pressure regulator - DUCAL D551
    Stainless Steel VIPR
    Adjustable pressure regulator
    For calibration applications
  • Integrated valve with flow selector - D552 Flowcal
    Stainless Steel VIPR
    Integrated flow selector
    For calibration applications

Diaphragm seal type

  • High pressure cylinder valve for High purity gases – D200
    High pressure
    Soft seat
    4mm orifice
  • Diaphragm seal lecture bottle valve - D250
    Lecture bottle valve
    High pressure
    4mm orifice size
  • High pressure dual port cylinder valve for High Purity gases - D265
    Dual Port high purity valve
    Soft seat
    3.5mm orifice
  • Brass cylinder inline RPV valve for High Purity gases - D283
    Brass inline RPV
    Soft Seat
    3.5mm orifice
  • Stainless steel cylinder offline RPV valve for High Purity gases - D282
    Offline RPV
    Soft Seat
    3.5mm orifice
  • Direct seal brass cylinder valve for high purity gases - D203
    Direct seal type
    Soft Seat
    3.5mm orifice
  • Low pressure dual port brass cylinder valves - D285
    Dual port
    8mm orifice
    Low pressure

Packed seal type

  • High pressure cylinder valves, packed needle stem design, for high purity gases - D100
    High pressure cylinder valve
    Metal / Metal seat
    3.3mm orifice
  • High pressure cylinder and bundle valve with pneumatic actuator for corrosive gases - D131
    Pneumatic actuator
    Metal / Metal seat
    2.8mm orifice
  • 2-pieces sturdy stem design high pressure cylinder valves for corrosive gases – D160S
    2-pieces sturdy stem design
    Soft Seat
    6mm orifice
  • High pressure cylinder valves with pneumatic actuator for corrosive gases – D156S
    Pneumatic actuator
    6 mm orifice
    Soft seat
  • Spring loaded dual port cylinder valve for corrosive gases – D195S
    Spring loaded
    Soft seat
    6mm orifice
  • Drum valve, 2-pieces sturdy stem packed type design for corrosive and toxic gases – D154S
    Drum valve
    soft seat
    6mm orifice
  • High pressure cylinder valve with spring loaded v-gaskets and RPV – D167S
    Soft seat
    6mm orifice
    Offline RPV
  • Drum valve, 2-pieces sturdy stem packed type design for corrosive and toxic gases – D158
    Drum valve
    soft seat
    12mm orifice
  • High pressure, packed type cylinder valve for corrosive and toxic gases with non-return valve – D183
    With non-return valve
    Soft reversed seat
    12mm orifice

O-ring seal type

  • Constant Flow Cylinder Valve - D405
    Constant Flow Cylinder Valve
    Self-closing valve
    Up to 110 bar
  • High pressure cylinder valve specific applications - D488
    Hydrogen, methane and acetylene applications
    O-ring
    6mm orifice
downloads
  • Download
    Complete UHP Solution
    Last update: Feb 17, 2026
    Available in: en/JA/CN
  • Download
    Stainless steel canisters
    Last update: Apr 02, 2026
    Available in: en
  • Download
    RX3000 UHP Pressure Regulator
    Last update: Apr 02, 2026
    Available in: en
  • Download
    RX3100 UHP Pressure Regulator
    Last update: Jun 09, 2026
    Available in: en
  • Download
    RX3200 UHP Pressure Regulator
    Last update: Apr 02, 2026
    Available in: en
  • Download
    RX4000 UHP Pressure Regulator
    Last update: Apr 20, 2026
    Available in: en/CN/JA
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