Print

Download datasheet
3D Model Preview 3D View Icon

PREMIUM GAS SYSTEMS FOR ULTRA HIGH PURITY GASES

Safety & Quality
  • State-of-the-art UHP gas solutions including pressure regulators, line valves, cylinder valves, cylinder connectors and fittings
  • 100% Helium leak test performed on all products
  • Specific packaging to respect the purity level
  • ISO 4 Cleanroom manufacturing conditions
All gas types
  • HP & UHP gas equipment and cylinder valves for semiconductor, photovoltaic (solar cells), LED light manufacturing processes and other applications
  • For electronics, corrosive, toxic and specialty gases
  • Purity levels from 6.0 to 9.0 and more
  • Precise control of low to high pressure gases and fluids
All technologies to fit your application
  • Tied diaphragm, diaphragm, packed seal, bellow seal or -ring seal technologies
  • Sealing level up to 10-11 mbarl/s
All connections & standards
  • Gas systems : various end connections available to cover all needs and all applications
  • Cylinder valves : Inlet & outlet connections for all standards & gases: DIN, CG, JIS, BS, AFNOR, UNI, NEN, NBR
downloads
  • Download
    Complete UHP Solution
    Last update: Mar 13, 2024
    Available in: en/JA/CN
  • Download
    RX1000 Compact UHP Pressure Regulator
    Last update: Mar 13, 2024
    Available in: en/JA/CN
  • Download
    RX3200 UHP Pressure Regulator
    Last update: Feb 23, 2024
    Available in: en
  • Download
    RX3000 UHP Pressure Regulator
    Last update: Mar 18, 2024
    Available in: en/JA/CN
  • Download
    RX4200 UHP Pressure Regulator
    Last update: Oct 11, 2023
    Available in: en
  • Download
    RX4000 UHP Pressure Regulator
    Last update: Mar 18, 2024
    Available in: en/JA/CN

FULLY CUSTOMIZABLE UHP GAS SOLUTIONS TO FIT ANY SYSTEM CONFIGURATION

DOWN THE ENTIRE LINE
RX3000 AND RX4000 UHP PRESSURE REGULATORS
Ready to install UHP gas systems for:
  • Gas Cabinets
  • VMBs
  • Process tools
  • Gas Delivery Sytems
  • And many others...
Benefit from Rotarex high performance and quality components such as:
  • UHP Pressure Regulators
  • UHP Line Valves
  • UHP Fittings
  • UHP Cylinder Connectors
  • and much more...

THREADLESS & SPRINGLESS UHP PRESSURE REGULATORS

RX3000 AND RX4000 UHP PRESSURE REGULATORS
  • Single-stage diaphragm pressure regulator for high and ultra high purity gases
  • Unique threadless design for a higher purity level
  • Springless design for tied diaphragm version
  • Sub-atmospheric option available
  • Optimized supply pressure effect and excellent flow stability
  • Life duration according to CGA E4
  • Electropolished surface roughness per SEMI F19 UHP Grade
  • 316L VAR® stainless steel double melt per SEMI F20 option available
videos
UHP Solutions
Ultra high purity line valves & pressure regulators
Ultra high purity gas pressure regulators
  • Compact single-stage diaphragm pressure regulator for HP & UHP gases - RX1000
    HP & UHP regulator
    Cv 0.04, 0.09, 0.15
    Free diaphragm
  • Single-stage diaphragm pressure regulator for HP & UHP gases - RX3000
    HP & UHP regulator
    Cv 0.09, 0.15
    Free diaphragm
  • Sub-atmospheric pressure regulator for HP & UHP gases - RX3100
    HP & UHP regulator
    Cv 0.09
    Tied diaphragm
  • Single-stage tied-diaphragm pressure regulator for HP & UHP gases - RX3200
    HP & UHP regulator
    Cv 0.09, 0.15
    Tied diaphragm
  • Diaphragm loaded high pressure regulator for HP & UHP gases - RX3600
    HP & UHP regulator
    Cv 0.15
    Free diaphragm
  • Piston loaded high pressure regulator for HP & UHP gases - RX3700
    HP & UHP regulator
    Cv 0.09, 0.15
    Tied diaphragm
  • Dual stage pressure regulator for HP & UHP gases - RX3900
    HP & UHP regulator
    Cv 0.09
    Tied diaphragm
  • Single-stage diaphragm pressure regulator for HP & UHP gases - RX4000
    HP & UHP regulator
    Cv 0.15, 0.25, 0.5, 0.9, 1.1
    Free diaphragm
  • Sub-atmospheric pressure regulator for HP & UHP gases - RX4100
    HP & UHP regulator
    Cv 0.5
    Tied diaphragm
  • Single-stage tied-diaphragm pressure regulator for HP & UHP gases - RX4200
    HP & UHP regulator
    Cv 0.15, 0.25, 0.5, 0.9, 1.1
    Tied diaphragm
Springless diaphragm line valves
  • Diaphragm high and low pressure line valve for HP & UHP gases - RX04
    HP & UHP line valve
    Flow capacity 0.2
    Springless diaphragm
  • Diaphragm high and low pressure line valve for HP & UHP gases - RX08
    HP & UHP line valve
    Flow capacity 0.5
    Springless diaphragm
  • Diaphragm high and low pressure line valve for HP & UHP gases - RX04F
    HP & UHP line valve
    Flow capacity 0.2
    Forged body
  • Diaphragm high and low pressure line valve for HP & UHP gases - RX08F
    HP & UHP line valve
    Flow capacity 0.5
    Forged body
  • Diaphragm low pressure line valve for HP & UHP gases - RX12
    HP & UHP line valve
    Flow capacity 1.75
    Springless diaphragm
  • Diaphragm low pressure line valve for HP & UHP gases - RX20
    HP & UHP line valve
    Flow capacity 3.5
    Springless diaphragm
Tied diaphragm line valves
  • High Pressure manual line valve for UHP gases – D604
    Manual line valve
    Soft Seat
    4mm orifice
  • High Pressure line valve for UHP gases with oleo-pneumatic actuator – D654
    Oleo-pneumatic line valve
    Soft Seat
    4mm orifice
  • High Pressure line valve for UHP gases with pneumatic actuator – D688
    Pneumatic line valve
    Soft knife edge Seat
    4mm orifice
  • High Pressure manual line valve for UHP gases – D639S
    Manual line valve
    Soft Seat
    6mm orifice
  • High Pressure line valve for UHP gases with oleo-pneumatic actuator – D689S
    Oleo-pneumatic line valve
    Soft Seat
    6mm orifice
Bellows & check valves
  • Bellows low to high pressure valve for HP, UHP, corrosive gases and fluids – K300
    Bellows valve
    Low or high pressure
    -40°C to + 120°C (ambient)
  • Bellows high pressure valve for HP, UHP, corrosive gases and fluids – HP2000
    Bellows valve
    High pressure
    -40°C to + 120°C (ambient)
  • Bellows low to high pressure valve for HP, UHP, cryogenic gases and fluids –  K900
    Bellows valve
    Low to high pressure
    -196°C to + 250°C (cryogenic)
  • Bellows high pressure valve for HP, UHP, cryogenic gases and fluids –  HP9000
    Bellows valve
    High pressure
    -196 °C to + 250°C (cryogenic)
  • Bellows high pressure valve for HP, UHP, corrosive gases and fluids – HP3000
    Bellows valve
    High pressure
    -40°C to + 120°C (ambient)
  • Bellows low pressure valve for HP, UHP, cryogenic gases and fluids –  SUPRA
    Bellows valve
    Low pressure
    -270°C to + 80°C (cryogenic)
  • Spring type check valve for HP, UHP, cryogenic gases and fluids – CAR(S)
    Check valves
    Low to high pressure
    -196°C to +250°C (cryogenic)
Ultra high purity fittings & connectors
Metal gasket face seal fittings
High flow fittings
  • UHP Fitting Female Nut for High Flow Applications - FN-HF
    Female Nut for High Flow Applications
  • UHP Fitting Male Nut for High Flow Applications - MN-HF
    Male Nut for High Flow Applications
  • UHP Fitting Short Male Gland for High Flow Applications - EM-HF
    Short Male Gland for High Flow Applications
  • UHP Fittings Automatic Buttweld Body for High Flow Applications - UM-ABW HF
    Automatic Buttweld Body for High Flow Applications
  • UHP Fitting Automatic Buttweld Body for High Flow Applications - UM-AB HF
    Automatic Buttweld Body for High Flow Applications
  • UHP Fittings Buttweld Bulkhead Union for High Flow Applications - BU-HF
    Buttweld Bulkhead Union for High Flow Applications
Weld fittings
  • UHP Fitting EB-ABW
  • UHP Fitting Automatic Buttweld Reducing Union Without Shoulder - RU-ABW
    Automatic Buttweld Reducing Union without Shoulder
  • UHP Fitting Automatic Buttweld Elbow Without Shoulder - E-ABW
    Automatic Buttweld Elbow without Shoulder
  • UHP Fitting Automatic Buttweld Reducing Elbow Without Shoulder - RE-ABW
    Automatic Buttweld Reducing Elbow without Shoulder
  • UHP Fitting Automatic Buttweld Tee Without Shoulder - T-ABW
    Automatic Buttweld Tee without Shoulder
  • UHP Fitting Automatic Buttweld Reducing Tee Without Shoulder - RT-ABW
    Automatic Buttweld Reducing Tee without Shoulder
  • UHP Fitting Automatic Buttweld Cross Without Shoulder - C-ABW
    Automatic Buttweld Cross without Shoulder
Ultra high purity connectors
Ultra high purity gas cylinder valves
Tied diaphragm seal type
  • High pressure UHP cylinder valve – D304
    High pressure
    Soft seat
    4mm orifice
  • High pressure pneumatic UHP cylinder valve - D385S
    High pressure Pneumatic valve
    Soft seat
    4mm orifice
  • Tied diaphragm cylinder valve for fluorine mixtures with pneumatic actuator - D386S
    Tied diaphragm cylinder valve for fluorine mixtures with pneumatic actuator
  • High Pressure, oleo-pneumatic, UHP cylinder valve - D354
    Oleo-Pneumatic
    Soft seat
    4mm orifice
  • High pressure, dual port UHP cylinder valve - D340S
    Dual Port UHP valve
    Soft seat
    4mm orifice
  • High pressure UHP cylinder valve for highly oxidizing gases – D306
    High pressure valve
    Metal / Metal sealing
    4mm orifice
  • Oleo-pneumatic UHP cylinder valve for highly oxidizing gases – D356
    Oleo-pneumatic valve
    Metal / Metal sealing
    3.5mm orifice
  • High pressure & high flow UHP cylinder valve – D339S
    High pressure manual valve
    Soft seat
    6mm orifice
  • High pressure UHP cylinder valve with Oleo-pneumatic actuator - D389S
    Oleo-Pneumatic
    Soft seat
    6mm orifice
  • Dual port high pressure UHP cylinder valve - D349
    Dual Port UHP valve
    Soft seat
    6mm orifice
  • Low pressure & high flow UHP cylinder valve - D337
    Tied-diaphragm seal
    Low Pressure
    8mm orifice
  • Low pressure & high flow UHP cylinder valve with pneumatic actuator - D387
    Pneumatic actuator
    Low Pressure
    8mm orifice
  • Low pressure & high flow dual port UHP cylinder valve - D342
    Dual Port UHP valve
    Soft seat
    8mm orifice
High purity gas cylinder valves
Valves with integrated pressure regulator (VIPR)
  • Integrated valve with adjustable pressure regulator - DUCAL D551
    Stainless Steel VIPR
    Adjustable pressure regulator
    For calibration applications
  • Integrated valve with flow selector - D552 Flowcal
    Stainless Steel VIPR
    Integrated flow selector
    For calibration applications
Diaphragm seal type
  • High pressure cylinder valve for High purity gases – D200
    High pressure
    Soft seat
    4mm orifice
  • Diaphragm seal lecture bottle valve - D250
    Lecture bottle valve
    High pressure
    4mm orifice size
  • High pressure dual port cylinder valve for High Purity gases - D265
    Dual Port high purity valve
    Soft seat
    3.5mm orifice
  • Brass cylinder inline RPV valve for High Purity gases - D283
    Brass inline RPV
    Soft Seat
    3.5mm orifice
  • Stainless steel cylinder offline RPV valve for High Purity gases - D282
    Offline RPV
    Soft Seat
    3.5mm orifice
  • Direct seal brass cylinder valve for high purity gases - D203
    Direct seal type
    Soft Seat
    3.5mm orifice
  • Low pressure dual port brass cylinder valves - D285
    Dual port
    8mm orifice
    Low pressure
Packed seal type
  • High pressure cylinder valves, packed needle stem design, for high purity gases - D100
    High pressure cylinder valve
    Metal / Metal seat
    3.3mm orifice
  • High pressure cylinder and bundle valve with pneumatic actuator for corrosive gases - D131
    Pneumatic actuator
    Metal / Metal seat
    2.8mm orifice
  • 2-pieces sturdy stem design high pressure cylinder valves for corrosive gases – D160S
    2-pieces sturdy stem design
    Soft Seat
    6mm orifice
  • High pressure cylinder valves with pneumatic actuator for corrosive gases – D156S
    Pneumatic actuator
    6 mm orifice
    Soft seat
  • Spring loaded dual port cylinder valve for corrosive gases – D195S
    Spring loaded
    Soft seat
    6mm orifice
  • Drum valve, 2-pieces sturdy stem packed type design for corrosive and toxic gases – D154S
    Drum valve
    soft seat
    6mm orifice
  • High pressure cylinder valve with spring loaded v-gaskets and RPV – D167S
    Offline RPV
    Soft seat
    6mm orifice
  • Drum valve, 2-pieces sturdy stem packed type design for corrosive and toxic gases – D158
    Drum valve
    soft seat
    12mm orifice
  • High pressure, packed type cylinder valve for corrosive and toxic gases with non-return valve – D183
    With non-return valve
    Soft reversed seat
    12mm orifice
O-ring seal type
  • High pressure line valve specific applications - D605
    Hydrogen, methane and acetylene applications
    O-ring
    12mm orifice
  • Constant Flow Cylinder Valve - D405
    Constant Flow Cylinder Valve
    Self-closing valve
    Up to 110 bar
  • High pressure cylinder valve specific applications - D488
    Hydrogen, methane and acetylene applications
    O-ring
    6mm orifice
Go up
×
Loading

This site uses cookies.

Rotarex uses cookies to ensure a better and easier online experience. Please click here to accept the continued use of these cookies after reading our revised COOKIES POLICY.

Please note, you may continue to use the website even if you do not accept the use of cookies. However, the visitor experience on subsequent visits will be diminished.

Read the full COOKIES POLICY.

Refuse all non essential cookies