Print

Download datasheet

FULL RANGE OF EQUIPMENT FOR SPECIALTY & UHP GASES

The specialty gas equipment range covers all major categories of gases used in industrial, laboratory and manufacturing processes. Maintaining gas purity, delivery accuracy and process safety requires specialized equipment at every stage of the gas supply chain. Inert gases, including nitrogen, argon and helium, require standard to high-purity handling equipment with clean, moisture-free internals. Reactive and toxic gases demand equipment with specific materials of construction (MOC) to ensure chemical compatibility and safe handling throughout the gas supply system. Calibration gases and rare gas blends require precise pressure regulation to maintain gas mixture composition and measurement accuracy. Carbon dioxide, oxygen and hydrogen solutions are managed through switchover panels and supply boards designed for continuous, safe gas delivery.

Rotarex designs and manufactures a complete range of specialty gas systems to meet these requirements across all major gas types and industries.
Equipment for gas systems

All gas types

  • Ultra-High Purity gases
  • High-purity specialty gases
  • Food grade gases
  • Industrial gases

Strong innovations and quality spirit

  • 4 Research & Development centers
  • Inhouse Testing Laboratories
  • 13 university collaborations
  • Simulation department
  • All required quality standards
videos

COMPACT & EFFICIENT SUPPLY AND SWITCHOVER BOARDS

Equipment for gas systems

Customized, smart design

  • Modular system with many configuration possibilities
  • Ready-to-install system: all components are pre-mounted on the panel
  • Cover a wide range of application with compatible materials according to gas type

Rotarex Duobloc Technology

  • Compact: smaller overall switchover board size
  • Up to 6 cylinder connections possible without extension - for improve process tightness and reduce leakage points
  • Independent purging possible on either side of the switchoverboard

Maximum safety

  • Accurate and constant flow supply guaranteed
  • Reduced ownership cost with improved product lifetime thanks to extra-durable components
  • Continuous gas supply thanks to a reliable automatic switching mechanism
Learn More

What Are Specialty Gas Systems?

Specialty gas systems are assemblies of equipment used to control the pressure, flow and purity of specialty gases from the cylinder to the point of use. They typically include pressure regulators, supply and switchover boards, line valves, fittings and cylinder connectors, each selected for compatibility with the specific gas type. The integrity of these systems determines the accuracy and quality of the gas delivered to the process.

From semiconductor fabs requiring ultra-clean process gases to labs running sensitive analytical work, these systems are built around precision components like line valves, semi automatic switchover panels, pressure regulators and point of uses. The result is a gas supply infrastructure you can trust to perform consistently, safely, and without compromise, no matter how demanding the application.

What Are Specialty Gas Systems?
Applications of Specialty Gas Equipment

Applications of Specialty Gas Equipment

Not all gas applications play by the same rules and that's exactly why specialty gas equipment needs to be tailored to the industry it serves. Here's how different sectors put this technology to work:

  • Electronic specialty gases require ultra-high purity (UHP) delivery systems for semiconductor and electronics manufacturing, where trace impurities affect production yield.
  • Calibration gas mixtures need accurate, stable pressure and flow management to ensure instrument calibration results comply with regulatory compliance requirements.
  • Industrial gases such as nitrogen, oxygen, and hydrogen are distributed through supply and switchover boards that maintain continuous gas delivery to the process.
  • Food-grade gases must be handled with equipment that meets the quality and safety standards applicable to food and beverage processing applications.
  • High-purity specialty gases used in laboratory and research environments require contamination-free delivery systems from source to point of use.
  • Gas mixtures used in welding and metalworking require reliable pressure control and safe distribution across multiple supply points.

Selecting the Right Specialty Gas Equipment

Selecting the correct specialty gas equipment depends on the gas type, required purity level, operating pressure, flow rate, and application environment.

High-purity specialty gases demand components with superior sealing materials, low dead volume, and surfaces that minimize contamination risk.

Ultra-high purity (UHP) gases require diaphragm or bellows-type valves and regulators with electropolished stainless steel internals to preserve gas purity throughout the delivery system.

Food-grade and industrial gas applications require equipment built to the quality and safety standards specific to each sector, including applicable certifications.

Rotarex offers a range of pressure regulators, switchover boards, line valves, cylinder valves, fittings, and accessories configured for all major specialty and UHP gas types.

Selecting the Right Specialty Gas Equipment
Key Specialty Gas Equipment Categories

Key Specialty Gas Equipment Categories

Pressure Regulators — single-stage and dual-stage regulators for specialty gases, available with diaphragm, piston, or bellow technology. For semiconductor and UHP applications, see our ultra-high purity gas pressure regulators.

Supply and Switchover Panels — semiautomatic and manual switchover panels provide continuous gas supply from multiple cylinders, with independent purging capability on each side.

Line Valves — O-ring, diaphragm, springless diaphragm, tied diaphragm, and bellows line valves cover the full range of pressure and flow conditions for specialty gas handling.

Cylinder Valves and Accessories — high-purity cylinder valves with integrated pressure regulators, UHP fittings, cylinder connectors, pigtails, and alarm boxes complete the gas delivery chain from storage to point of use.

UHP Fittings and Connectors — butt-weld, socket weld, reducing unions, tube adapters, and CGA/DISS connectors for semiconductor and laboratory gas systems. Full range: ultra-high purity fittings.

Specialty gas systems

Specify your search
Category

Specialty Gas Pressure regulators

  • Diaphragm single stage high pressure regulator with cartridge - SC280/SC380
    High pressure regulator
    Single stage
    Diaphragm tech. + Cartridge
  • Diaphragm single stage high pressure regulator - S220
    High pressure regulator
    Single stage
    Diaphragm technology
  • Piston single stage high pressure regulator - S400
    High pressure regulator
    Single stage
    Piston technology
  • Diaphragm single stage high pressure regulator with balanced valve - S800
    High pressure regulator
    Single stage
    Diaphragm technology + BV
  • Single stage low pressure regulator - Specyl Serie
    Low pressure regulator
    Single stage
    25 bar Inlet pressure
  • Diaphragm single stage high pressure regulator for very high flow - TDG250
    Very high flow pressure regulator
    Single stage
    Diaphragm technology
  • Diaphragm dual stage high pressure regulator with cartridge -  DC280/DC380
    High pressure regulator
    Dual stage
    Diaphragm tech. + Cartridge
  • Piston/Bellow dual stage high pressure regulator - D230
    High pressure regulator
    Dual stage
    Piston/Bellow technology
  • Piston/Diaphragm dual stage high pressure regulator - D230-0.1
    High pressure regulator
    Dual stage
    Piston/Diaphragm technology
  • Diaphragm low pressure regulator with balanced valve - S10
    Low pressure regulator
    Single stage
    Diaphragm technology + BV
  • Diaphragm low pressure regulator with balanced valve for high flow - S15
    High flow low pressure regulator
    Single stage
    Diaphragm technology + BV
  • Diaphragm Single Stage High Pressure Regulator with Cartridge for Food Industry – SC290
    High pressure regulator
    Single stage
    Diaphragm tech. + Cartridge
  • Bellow low pressure regulator - S20
    Low pressure regulator
    Single stage
    Bellow technology
  • Diaphragm low pressure regulator for very low outlet pressure - S20-0.1
    Low pressure regulator
    Single stage
    Diaphragm technology
  • Diaphragm low pressure regulator - S55
    Low pressure regulator
    Single stage
    Diaphragm technology
  • Diaphragm low pressure regulator with balanced valve for very high flow - DC50
    Low pressure regulator
    Single stage
    Diaphragm technology + BV

Specialty Gas Point of use

  • Bellow point of use - S21
    Point of use
    Bellow technology
  • Bellow modular point of use - Labline S22
    Point of use
    Modular
    Bellow technology
  • Diaphragm integrated point of use with balanced valve - MS15
    Point of use
    Integrated
    Diaphragm technology
  • Bellow integrated point of use - MS20
    Point of use
    Integrated
    Bellow technology

Flow regulators

  • Piston constant flow regulator equipped with 10 positions flow selector - S75
    Constant flow regulator
    10 positions flow selector
    Piston technology

Ultra high purity pressure regulators

  • Single-stage diaphragm pressure regulator for HP & UHP gases - RX3000
    Single stage diaphragm
    Cv 0.09, 0.15
    Inlet 21/240 bar
  • Sub-atmospheric pressure regulator for HP & UHP gases - RX3100
    Sub-atmospheric
    Cv 0.09
    Inlet 21 bar
  • Single-stage tied-diaphragm pressure regulator for HP & UHP gases - RX3200
    Single stage tied-diaphragm
    Cv 0.09, 0.15
    Inlet 21/240 bar
  • Single-stage diaphragm pressure regulator for HP & UHP gases - RX4000
    Single stage diaphragm
    Cv 0.15, 0.25, 0.5, 0.9, 1.1
    Inlet 21/117/207/240 bar
  • Sub-atmospheric pressure regulator for HP & UHP gases - RX4100
    Sub-atmospheric regulator
    Cv 0.5
    Inlet 21 bar
  • Single-stage tied-diaphragm pressure regulator for HP & UHP gases - RX4200
    Single stage tied-diaphragm
    Cv 0.15, 0.25, 0.5, 0.9, 1.1
    Inlet 21/117/207/240 bar

Supply & switchover boards

  • Diaphragm single stage supply board with cartridge - CM280/CM380
    Supply board with duo bloc
    Single stage
    Diaphragm tech. + Cartridge
  • Diaphragm single stage supply board with balanced valve - MOD
    Supply board with duo bloc
    Single stage
    Diaphragm technology + BV
  • Diaphragm single stage supply board - CM104
    Supply board with duo bloc
    Single stage
    Diaphragm technology
  • Piston single stage supply board - CM454
    Supply board with duo bloc
    Single stage
    Piston technology
  • High flow automatic switchover board with manual reset - CEN
    Automatic SOB with manual reset
    Single stage
    Diaphragm technology
  • Diaphragm single stage automatic switchover board with manual reset - TDI High Purity
    Automatic SOB with manual reset
    Single stage
    Diaphragm technology
  • Diaphragm single stage automatic switchover board with manual reset - TDI Specyl
    Automatic SOB with manual reset
    Single stage
    Diaphragm technology
  • Diaphragm single stage automatic switchover board with manual reset - TD202
    Automatic SOB with manual reset
    Single stage
    Diaphragm technology

Line Valves

O-ring and diaphragm line valves

  • Line valve for acetylene use - HP12
    Line valve
    High flow
    Acetone and DMF resistant
  • Diaphragm low to high pressure line valve - VD
    Low to high pressure line valve
    ¼ turn handwheel
    Diaphragm technology
  • Diaphragm low pressure line valve - VM20
    Low pressure line valve
    ¼ turn or multi-turn handwheel
    Diaphragm technology
  • Diaphragm low pressure line valve for high flow - VM45
    High flow low pressure line valve
    ¼ turn or multi-turn handwheel
    Diaphragm technology
  • Metering valve with needle - RD10
    Low pressure metering valve
    Multi-turn
    With needle

Springless diaphragm line valves

  • Diaphragm high and low pressure line valve for HP & UHP gases - RX04
    HP & UHP line valve
    Flow capacity 0.2
    Springless diaphragm
  • Diaphragm high and low pressure line valve for HP & UHP gases - RX08
    HP & UHP line valve
    Flow capacity 0.5
    Springless diaphragm
  • Diaphragm low pressure line valve for HP & UHP gases - M12
    HP & UHP line valve
    Flow capacity 1.75
    Springless diaphragm
  • Diaphragm low pressure line valve for HP & UHP gases - M20
    HP & UHP line valve
    Flow capacity 3.5
    Springless diaphragm

Tied diaphragm line valves

  • High Pressure manual line valve for UHP gases – D604
    Manual line valve
    Soft Seat
    4mm orifice
  • High Pressure line valve for UHP gases with oleo-pneumatic actuator – D654
    Oleo-pneumatic line valve
    Soft Seat
    4mm orifice
  • High Pressure line valve for UHP gases with pneumatic actuator – D688
    Pneumatic line valve
    Soft knife edge Seat
    4mm orifice
  • High Pressure manual line valve for UHP gases – D639S
    Manual line valve
    Soft Seat
    6mm orifice
  • High Pressure line valve for UHP gases with oleo-pneumatic actuator – D689S
    Oleo-pneumatic line valve
    Soft Seat
    6mm orifice

Bellows valves

  • Bellows low to high pressure valve for HP, UHP, corrosive gases and fluids – K300
    Bellows valve
    Low or high pressure
    -40°C to + 120°C (ambient)
  • Bellows high pressure valve for HP, UHP, corrosive gases and fluids – HP2000
    Bellows valve
    High pressure
    -40°C to + 120°C (ambient)
  • Bellows low to high pressure valve for HP, UHP, cryogenic gases and fluids –  K900
    Bellows valve
    Low to high pressure
    -196°C to + 250°C (cryogenic)
  • Bellows high pressure valve for HP, UHP, cryogenic gases and fluids –  HP9000
    Bellows valve
    High pressure
    -196 °C to + 250°C (cryogenic)
  • Bellows high pressure valve for HP, UHP, corrosive gases and fluids – HP3000
    Bellows valve
    High pressure
    -40°C to + 120°C (ambient)
  • Bellows low pressure valve for HP, UHP, cryogenic gases and fluids –  SUPRA
    Bellows valve
    Low pressure
    -270°C to + 80°C (cryogenic)

Check valves

  • Spring type check valve for HP, UHP, cryogenic gases and fluids – CAR(S)
    Check valves
    Low to high pressure
    -196°C to +250°C (cryogenic)
  • Safety device for acetylene use - DF3L
    High pressure safety device
    Non-return valve
    Fashback arrestor + Shut off
  • Safety device for acetylene use - 50HD
    High pressure safety device
    Fashback arrestor
    Thermal shut-off device
  • Safety device for acetylene use - 10HD-N
    High pressure safety device
    Fashback arrestor
    Shut-off device
  • Safety device For acetylene use - DF10
    High pressure shut off device
    Shut off device
  • Safety device for acetylene use - DF50
    High pressure safety device
    Thermal shut-off device

Cylinder Valves

Valves with integrated pressure regulator

  • Integrated valve with adjustable pressure regulator - DUCAL D551
    Stainless Steel VIPR
    Adjustable pressure regulator
    For calibration applications
  • Integrated valve with flow selector - D552 Flowcal
    Stainless Steel VIPR
    Integrated flow selector
    For calibration applications

Diaphragm seal type

  • High pressure cylinder valve for High purity gases – D200
    High pressure
    Soft seat
    4mm orifice
  • Diaphragm seal lecture bottle valve - D250
    Lecture bottle valve
    High pressure
    4mm orifice size
  • High pressure dual port cylinder valve for High Purity gases - D265
    Dual Port high purity valve
    Soft seat
    3.5mm orifice
  • Brass cylinder inline RPV valve for High Purity gases - D283
    Brass inline RPV
    Soft Seat
    3.5mm orifice
  • Stainless steel cylinder offline RPV valve for High Purity gases - D282
    Offline RPV
    Soft Seat
    3.5mm orifice
  • Direct seal brass cylinder valve for high purity gases - D203
    Direct seal type
    Soft Seat
    3.5mm orifice
  • Low pressure dual port brass cylinder valves - D285
    Dual port
    8mm orifice
    Low pressure

Specialty Gas Accessories

Accessories

  • BS, UNI, DIN, CGA/DISS, AFNOR, NEN cylinder connectors
    High pressure cylinder connectors
    200/300 bar versions
    BS, UNI, DIN, CGA/DISS, AFNOR, NEN..
  • Diaphragm low to high pressure line valve - VD
    Low to high pressure line valve
    ¼ turn handwheel
    Diaphragm technology
  • Gas cylinder holder for storage area
    Gas cylinder holder
    Fixed permanently to the wall
    With fixing belt
  • Flexible hoses for food industry- FX06 F
    Flex hoses
    High pressure
    Stainless steel
  • Alarm boxes - BA12
    Alarm boxes
    Available in 3 versions
    Signal sent automatically
  • Contact Pressure Gauges
    Spare part contact pressure gauges for regulators, points of use, supply boards or switch over boards
  • TD & CM / CEN & MOD extensions
    For supply and switchover board
    Right or left versions
    2 or 3 cylinders
  • Straight or elbow pigtails
    Pigtails
    Straigh or elbow versions
    AFNOR, DIN, NEN, UNI…
  • 3 inlets/2 outlets monoblock valves - Duoblocs
    Monoblock valve
    200 bar or 300 bar
    3 inlets/2 outlets

Ultra high purity fittings & connectors

downloads
  • Download
    Supply and Switchover Boards
    Last update: May 07, 2026
    Available in: en
  • Download
    Pressure Regulators Catalog
    Last update: Feb 17, 2026
    Available in: en/FR
  • Download
    Foodline - Gas equipment for food processing
    Last update: Feb 17, 2026
    Available in: en
  • Download
    Gas sampling cylinders Flyer
    Last update: Feb 17, 2026
    Available in: en
  • Download
    SPECYL Pressure regulator
    Last update: Feb 17, 2026
    Available in: en
  • Download
    TDI HIGH PURITY
    Last update: Feb 17, 2026
    Available in: en
Connect with an Expert
Go up
×
Loading